171128 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
Accelerometer including protective housing
#2MEMS ACCELEROMETER SYSTEMS
#3Closed-loop microelectromechanical accelerometer with compensation of spurious vibration modes and process for manufacturing a microelectromechanical accelerometer
#4Pendular accelerometer sensor with conditional capacitive detection
#5Method for lithography process
#6MECHANICALLY-SENSITIVE SEMICONDUCTING TRIODE CAPACITOR
#7MEMS vibrating beam accelerometer with built-in test actuators
#8MEMS sensor detection device and MEMS sensor system
#9MEMS sensor structure comprising mechanically preloaded suspension springs
#10Moisture detector, moisture detection method, electronic device, and log output system
#11High performance micro-electro-mechanical systems accelerometer
#12Sensor with servo noise reduction
#13MEMS electrostatic capacitor type acceleration sensor
#14ACCELEROMETERS
#15MEMS sensor compensation for off-axis movement
#16ACCELEROMETERS
#17Acceleration sensor
#18Closed loop accelerometer
#19Dual capacitive linearization circuit
#20Physical quantity sensor, electronic device, and mobile body
#21Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
#22Dynamic self-calibration of an accelerometer system
#23Accelerometer
#24Vibrating device, vibrating device module, electronic apparatus, and vehicle
#25Window sensing device with movement detection
#26MEMS pendulum accelerometer having two measurement ranges
#27High-precision pendulous accelerometer
#28Sensor apparatus, planning processing system, and planning method
#29Inertia sensor with improved detection sensitivity using servo voltage to detect a physical quantity
#30Capacitive accelerometer
#31Accelerometer control
#32OPTICALLY ENABLED MEMS INERTIAL SENSORS ON INTEGRATED PHOTONIC PLATFORMS
#33Acceleration sensor having spring force compensation
#34Acceleration sensor
#35Accelerometer sensor system
#36Dynamic self-calibration of an accelerometer system
#37Accelerometers
#38MEMS sensor structure comprising mechanically preloaded suspension springs
#39Accelerometers
#40Accelerometers
#41In-situ bias correction for MEMS accelerometers
#42Accelerometers
#43Accelerometer control
#44Force feedback electrodes in MEMS accelerometer
#45Physical quantity sensor, electronic device, and mobile body
#46Sensor with electrostatic pendular accelerometer and method of controlling such a sensor
#47Performance optimization of a differential capacitance based motion sensor
#48Capacitive micromechanical sensor structure and micromechanical accelerometer
#49Fully differential capacitive architecture for MEMS accelerometer
#50Atomic referenced optical accelerometer
#51Fabrication process and package design for use in a micro-machined seismometer or other device
#52Resonator
#53Method and structure of an integrated MEMS inertial sensor device using electrostatic quadrature-cancellation
#54Extended-range closed-loop accelerometer
#55Range-dependent bias calibration of an accelerometer sensor system
#56Range-dependent bias calibration of an accelerometer sensor system
#57Bias reduction in force rebalanced accelerometers
#58Dynamic self-calibration of an accelerometer system
#59Device for measuring force components, and method for its production
#60Accelerometer having multiple feedback systems operating on a given proof mass
#61Electrostatic force generator and force measurement system and accelerometer having the same
#62Three-axis accelerometers and fabrication methods
#63Accelerometer systems and methods
#64Tethered, levitated-mass accelerometer
#65Three phase capacitance-based sensing
#66Method and apparatus to test an accelerometer
#67Anti-capture method and apparatus for micromachined devices
#68Three-axis accelerometers and fabrication methods
#69Out-of plane comb-drive accelerometer
#70Fabrication process and package design for use in a micro-machined seismometer or other device
#71MICROMECHANICAL ACCELERATION SENSOR
#72Micromachined accelerometer with monolithic electrodes and method of making the same
#73Bidirectional, out-of-plane, comb drive accelerometer
#74PROVIDING FEEDBACK IN AN ELECTRONIC CIRCUIT
#75Low vibration rectification in a closed-loop, in-plane MEMS device
#76Operating method and circuit arrangement for a capacitive micromechanical sensor with analog reset
#77MEMS-based capacitive sensor
#78Systems and methods for vibration rectification error reduction in closed-loop accelerometer systems
#79Method of transmitting modulated signals multiplexed by frequency division multiplexing and physical quantity detector using this method
#80Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
#81ELECTROSTATIC MICROACTUATOR
#82Device sensitive to a movement comprising at least one transistor
#83Anti-capture method and apparatus for micromachined devices
#84Three-axis accelerometers and fabrication methods
#85Accelerometer with offset compensation
#86Pendulous accelerometer with balanced gas damping
#87Physical quantity sensor
#88Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
#89System and method for mitigating errors in electrostatic force balanced instrument
#90Fabrication process and package design for use in a micro-machined seismometer or other device
#91Accelerometer with reduced extraneous vibrations owing to improved electrode shape
#92Method and apparatus for closed loop offset cancellation
#93Systems and methods for isolation of torque and sense capacitors of an accelerometer
#94Method of reducing the drift rate of accelerometer and accelerometer with reduced drift rate
#95Accelerometer with reduced extraneous vibrations owing to improved return movement
#96Torque driving circuit
#97Closed-loop comb drive sensor
#98MEMS vertical comb drive with improved vibration performance
#99Free fall detector device and free fall detection method
#100Detection circuit using a differential capacitive sensor with input-common-mode control in a sense interface
#101Capacitive measuring sensor and associated ,measurement method
#102Capacitive-type physical quantity sensor
#103Low vibration rectification in a closed-loop, in-plane MEMS device
#104Diamagnetic levitation system
#105Miniature electro-optic device having a conductive element for modifying the state of passage of light between inlet/outlet points and corresponding uses thereof
#106Force balanced instrument system and method for mitigating errors
#107Pendulous in-plane MEMS accelerometer device
#108Miniaturized relay and corresponding uses
#109Accelerometer in closed loop with error detection
#110Linearity enhancement for capacitive sensors
#111Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
#112Micro-sensor
#113Method and unit for sensing physical quantity using capacitive sensor
#114Electrostatically softened accelerometer spring
#115Systems and methods to stabilize high-Q MEMS sensors