171084 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
Sub-classes:Single proof mass based three-axis accelerometer
#2Single proof mass based three-axis accelerometer
#3Vibration rectification error correction circuit, physical quantity sensor module, structure monitoring device, and correction value adjustment method of vibration rectification error correction circuit
#4Microelectromechanical device with at least one translationally guided moveable element
#5DYNAMIC QUANTITY SENSOR
#6Microelectromechanical or/and nanoelectromechanical device with out-of-plane displacement having capacitive elements having a variable surface
#7Electrode for a microelectromechanical device
#8Systems and methods for a time-based optical pickoff for MEMS sensors
#9Micro-electro-mechanical system (MEMS) device
#10System and methods for highly integrated optical readout MEMS sensors
#11Angular velocity sensor
#12Capacitive acceleration sensor with an H-shaped beam and preparation method thereof
#13Semiconductor physical quantity detecting sensor
#14MEMS multi-axis accelerometer electrode structure
#15MEMS tilt sensor