171092 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of spring-mass systems being arranged on one common planar substrate, the systems not being mechanically coupled and the sensitive direction of each system being different
ACCELERATION SENSOR
#2MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
#3INERTIAL SENSOR AND INERTIAL MEASUREMENT UNIT
#4MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
#5DUAL AND TRIPLE AXIS ACCELEROMETERS
#6SENSOR APPARATUS
#7MEMS tri-axial accelerometer with one or more decoupling elements
#8INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING AND EMBEDDED DIGITAL ELECTRONICS
#9MEMS tri-axial accelerometer with one or more decoupling elements
#10Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame
#11Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
#12MEMS-based dual and single proof-mass accelerometer methods and apparatus
#13Three-dimensional micro-electro-mechanical-system sensor
#14Semiconductor device and method for manufacturing same
#15INERTIA SENSING APPARATUS
#16Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
#17Interconnection system on a plane adjacent to a solid-state device structure
#18Acceleration sensor
#19MEMS SENSOR
#20Low Cost Optical Accelerometer
#21Element structure, inertia sensor, and electronic device
#22Inertial force sensor
#23Acceleration sensor
#24Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
#25Micromechanical capacitive acceleration sensor
#26Multiaxial monolithic acceleration sensor