171093 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different
ACCELEROMETER
#2Transducer
#3Physical Quantity Sensor And Inertial Measurement Unit
#4MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
#5DUAL AXIS ACCELEROMETER WITH COMPENSATION ELECTRODES
#6IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
#7MEMS TRI-AXIAL ACCELEROMETER WITH ONE OR MORE DECOUPLING ELEMENTS
#8MEMS accelerometer
#9SENSOR APPARATUS
#10Micromechanical component and method for manufacturing a micromechanical component
#11Single proof mass based three-axis accelerometer
#12Single proof mass based three-axis accelerometer
#13Low-noise multi-axis MEMS accelerometer
#14Sensor with fixed and movble components
#15MEMS tri-axial accelerometer with one or more decoupling elements
#16MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#17MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#18Single axis inertial sensor with suppressed parasitic modes
#19MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
#20Multi-axis accelerometers with reduced cross-axis sensitivity
#21MEMS tri-axial accelerometer with one or more decoupling elements
#22Microelectromechanical accelerometer device
#23Sensor with moving sensitive element having mixed vibrating and pendular operation, and methods for controlling such a sensor
#24Micromachined monolithic 3-axis gyroscope with single drive
#25MEMS proof mass with split Z-axis portions
#26Optomechanical inertial sensor
#27Chip level sensor with multiple degrees of freedom
#28Micromachined monolithic 3-axis gyroscope with single drive
#29Micromachined 3-axis accelerometer with a single proof-mass
#30MEMS-based dual and single proof-mass accelerometer methods and apparatus
#31MEMS proof mass with split z-axis portions
#32INERTIA SENSING APPARATUS
#33Accelerometer
#34DUAL-AXIS ACCELERATION DETECTION ELEMENT
#35Vertically integrated MEMS acceleration transducer
#36Accelerometer