171094 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of spring-mass systems, each system having a different range of sensitivity to acceleration
Resonant microelectromechanical sensor with improved operation
#2Low-power accelerometer
#3Low-power accelerometer
#4Micromechanical spring for a sensor element
#5Spring sensor element having carbon nanotubes
#6ACCELERATION SENSOR
#7Vertically integrated MEMS acceleration transducer
#8Pendulous in-plane MEMS accelerometer device