171095 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the mass, e.g. annular
Vibrating beam accelerometer with pressure damping
#2Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers
#3Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling
#4Micromechanical z-inertial sensor
#5Physical quantity sensor having a spring connected to a movable unit
#6Translating Z axis accelerometer
#7Device for measuring force components, and method for its production
#8Dynamic quantity sensor and manufacturing method thereof
#9Acceleration sensor
#10UNSTABLE ELECTROSTATIC SPRING ACCELEROMETER
#11MEMS accelerometer with enhanced structural strength
#12Accelerometer
#13Free mass MEMS accelerometer