171097 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring using a torsional suspension spring
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication method thereof
#2MEMS accelerometer
#3Seesaw accelerometer
#4Single proof mass based three-axis accelerometer
#5Single proof mass based three-axis accelerometer
#6Acceleration sensor
#7Translating Z axis accelerometer
#8MEMS accelerometer with proof masses moving in an anti-phase direction
#9Semiconductor device including accelerometer devices
#10MEMS sensor with folded torsion springs
#11Inertial sensor and method for manufacturing an inertial sensor
#12Micromechanical capacitive acceleration sensor
#13Multiaxial monolithic acceleration sensor