171100 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using self-test structures integrated into the microstructure
INERTIAL MEMS DEVICE COMPRISING MEMS ACCELEROMETERS HAVING DIFFERENT SENSITIVITY SCALES
#2ACCELERATION SENSOR
#3Robust inertial sensor self-test
#4Real-time isolation of self-test and linear acceleration signals
#5Differential mems device and methods
#6MEMS vibrating beam accelerometer with built-in test actuators
#7Real-time isolation of self-test and linear acceleration signals
#8Accelerometer sensitivity self-calibration with duty cycle control of drive signal
#9MEMS accelerometer self-test using an active mobile mass deflection technique
#10Sensor blending with offset adjustment
#11Continuous calibration of accelerometer sensitivity by proof-mass dithering
#12Stiction detection and recovery in a micro-electro-mechanical system device
#13Accelerometers
#14Accelerometer with offset compensation
#15Self test of MEMS accelerometer with ASICS integrated capacitors
#16Differential MEMS device and methods