171101 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass
EXTENSION OF A CIRCUIT FOR INERTIAL SENSORS FOR THE DETECTION, CALIBRATION AND DYNAMIC CORRECTION OF SQUEEZE FILM DAMPING AND RESTORING EFFECTS DURING HIGH-LOAD OPERATION
#23-AXIS ANGULAR ACCELEROMETER
#3ACCELEROMETER WITH PROOF MASS DISPLACEMENT REDUCTION FEATURE
#4Physical Quantity Sensor, Physical Quantity Sensor Device, And Inertial Measurement Unit
#5Compliant Stops for MEMS Inertial Device Drive PLL Stability
#6MEMS Device, Electronic Apparatus, And Vehicle
#7TRANSLATIONAL MASS ACCELEROMETER
#8MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
#9Physical Quantity Sensor, Physical Quantity Sensor Device, And Inertial Measurement Unit
#10Micromechanical component, in particular, inertial sensor, including a seismic mass, a substrate, and a cap
#11Mems device, electronic apparatus, and vehicle
#12LOW STRESS OVERTRAVEL STOP
#13WIRE-BOND DAMPER FOR SHOCK ABSORPTION
#14MEMS Structure and Method of Forming Same
#15MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication method thereof
#16Inertial Sensor And Inertial Measurement Module
#17Accelerometer having an over travel stop with a stop gap less than a minimum etch size
#18Low stress overtravel stop
#19MEMS device, electronic apparatus, and vehicle
#20Physical Quantity Sensor and Inertial Measurement Unit
#21METHOD FOR PRODUCING AN INTEGRATED CIRCUIT POINTED ELEMENT COMPRISING ETCHING FIRST AND SECOND ETCHABLE MATERIALS WITH A PARTICULAR ETCHANT TO FORM AN OPEN CRATER IN A PROJECT
#22Accelerometer having an over travel stop with a stop gap less than a minimum etch size
#233-axis angular accelerometer
#24Physical quantity sensor, physical quantity sensor device, and inertial measurement unit
#25Micromechanical structure and micromechanical sensor
#26Micromechanical component and method for manufacturing a micromechanical component
#27Z-axis inertial sensor with extended motion stops
#28SYSTEMS AND METHODS HAVING MULTI-AXIS SENSITIVITY AND TRANSLATIONAL MODE SHAPES
#29MEMS accelerometer with mechanically decoupled proof mass
#30Physical quantity sensor, electronic apparatus, and vehicle
#31MEMS device, electronic apparatus, and vehicle
#32Physical quantity sensor, physical quantity sensor device, electronic apparatus, portable electronic apparatus, and vehicle
#33THREE-AXIS ACCELEROMETER
#34Micromechanical sensor
#35Microelectromechanical device with stopper
#36Physical quantity sensor, electronic device, and vehicle
#37Low-power accelerometer
#383-axis angular accelerometer
#39INERTIAL SENSOR, ELECTRONIC DEVICE, AND VEHICLE
#40MEMS structure and method of forming same
#41System with oven control and compensation for detecting motion and/or orientation
#42MEMS devices with an element having varying widths
#43Multi-stage MEMS accelerometer for mixed g-level operation
#44Asymmetric out-of-plane accelerometer
#45Low-power accelerometer
#46MEMS device with two-stage motion limit structure
#47MEMS device, inertial measurement unit, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
#48MEMS device, electronic apparatus, and vehicle
#49Micromechanical sensor system
#50Physical quantity sensor, physical quantity sensor device, portable electronic device, electronic device, and mobile body
#51Physical quantity sensor, physical quantity sensor device, electronic device, and mobile body
#52Physical quantity sensor, method for manufacturing physical quantity sensor, complex sensor, inertia measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#53Physical quantity sensor, complex sensor, inertial measurement unit, portable electronic device, electronic device, and vehicle
#54Physical quantity sensor, complex sensor, inertial measurement unit, portable electronic device, electronic device, and vehicle
#55Elastic bump stops for MEMS devices
#56Microelectromechanical component
#57Micromechanical structure for an acceleration sensor
#58Physical quantity sensor, electronic device, and vehicle
#59Acceleration sensor
#60Acceleration event detection and differential sensory devices and methods
#61MEMS device with off-axis shock protection
#62Physical quantity detection element, physical quantity detection device, electronic apparatus, and moving object
#63MEMS structure and method of forming same
#64Folded tether structure for MEMS sensor devices
#65Semiconductor device and method of manufacturing the same
#663-axis angular accelerometer
#67Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, and moving object
#68SENSOR
#69System with oven control and compensation for detecting motion and/or orientation
#70MEMS device
#71Micro-electro-mechanical system (MEMS) device
#72MEMS device with over-travel stop structure and method of fabrication
#73Reducing MEMS stiction by deposition of nanoclusters
#74Methods of forming micro-electro-mechanical devices including a conductive feature extending through an escort ring
#75Accelerometer and its fabrication technique
#76Geophysical acceleration sensor and method
#77Capacitive micromechanical sensor structure and micromechanical accelerometer
#78Micro-electromechanical device comprising a mobile mass that can move out-of-plane
#79MEMS structure and method of forming same
#80Inertia sensors with multi-directional shock protection
#81Microelectromechanical structure with frames
#82Microelectromechanical device with motion limiters
#83Microelectromechanical structure with motion limiter
#84Method of manufacturing a motion sensor device
#85Micromechanical Z-sensor
#86Variable area capacitive lateral acceleration sensor and preparation method thereof
#87Physical quantity detection element, physical quantity detection device, electronic apparatus, and moving object
#88Systems and methods to determine stiction failures in MEMS devices
#89Capacitive acceleration sensor with a bending elastic beam and preparation method thereof
#90Reducing MEMS stiction by introduction of a carbon barrier
#91Micromechanical sensor and method for manufacturing a micromechanical sensor
#92MEMS device mechanism enhancement for robust operation through severe shock and acceleration
#93Inertial sensor and method of manufacturing the same
#94MEMS devices and methods of forming the same
#95Reducing the effect of glass charging in MEMS devices
#96Sensor element, electronic apparatus and moving object
#97Multi-axis integrated MEMS inertial sensing device on single packaged chip
#98Microelectromechanical z-axis out-of-plane stopper
#99Acceleration sensor
#100Reducing MEMS stiction by deposition of nanoclusters
#101Acceleration sensor having a capacitor array located in the center of an inertial mass
#102Accelerometer and its fabrication technique
#103Physical quantity sensor, manufacturing method thereof, and electronic apparatus
#104Out-of plane travel restriction structures
#105Flexible stop for an acceleration sensor
#106MEMS devices and methods of forming the same
#107Accelerometer
#108Suspended masses in micro-mechanical devices
#109Physical quantity sensor and electronic apparatus
#110Micromechanical structure and method for manufacturing a micromechanical structure
#111INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME
#112PROOF MASS POSITIONING FEATURES HAVING TANGENTIAL CONTACT SURFACES
#113INERTIAL SENSOR
#114Motion sensor device and methods for forming the same
#115Micro electro mechanical systems component
#116MEMS structure and method of forming same
#117Acceleration detector, acceleration detecting device, inclination sensor, inclination sensor device, and electronic device
#118MEMS sensor with movable Z-axis sensing element
#119MEMS device with enhanced resistance to stiction
#120External force detecting device and external force detecting sensor
#121External force detecting method and external force detecting device
#122Inertia sensors with multi-directional shock protection
#123Shock Resistant Mounting for High G Shock Accelerometer
#124Physical quantity sensor
#125Micromechanical system
#126Inertial sensor and method of manufacturing the same
#127Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process
#128Vertically integrated MEMS acceleration transducer
#129Semiconductor acceleration sensor