171102 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using means for preventing stiction of the seismic mass to the substrate
MICROELECTROMECHANICAL SENSOR COMPONENT AND MICROELECTROMECHANICAL INERTIAL SENSOR
#23-AXIS ANGULAR ACCELEROMETER
#3MEMS INERTIAL SENSOR WITH HIGH RESISTANCE TO STICTION
#4Physical Quantity Sensor, Physical Quantity Sensor Device, And Inertial Measurement Unit
#5Mems inertial sensor with high resistance to stiction
#6METHOD FOR PRODUCING AN INTEGRATED CIRCUIT POINTED ELEMENT COMPRISING ETCHING FIRST AND SECOND ETCHABLE MATERIALS WITH A PARTICULAR ETCHANT TO FORM AN OPEN CRATER IN A PROJECT
#73-axis angular accelerometer
#8Physical quantity sensor, physical quantity sensor device, and inertial measurement unit
#9Active stiction recovery
#10MEMs inertial sensor with high resistance to stiction
#113-axis angular accelerometer
#12Elastic bump stops for MEMS devices
#13Physical quantity detection element, physical quantity detection device, electronic apparatus, and moving object
#14Microelectromechanical systems device and method
#15Stiction detection and recovery in a micro-electro-mechanical system device
#163-axis angular accelerometer
#17SENSOR
#18Semi-flexible proof-mass
#19Physical quantity sensor, sensor device, electronic apparatus, and moving object
#20Reducing MEMS stiction by deposition of nanoclusters
#21Functional element, electronic apparatus, and moving object
#22Physical quantity detection element, physical quantity detection device, electronic apparatus, and moving object
#23Systems and methods to determine stiction failures in MEMS devices
#24Reducing MEMS stiction by introduction of a carbon barrier
#25Reducing the effect of glass charging in MEMS devices
#26Reducing MEMS stiction by deposition of nanoclusters
#27PROOF MASS POSITIONING FEATURES HAVING TANGENTIAL CONTACT SURFACES
#28ACCELERATION SENSOR
#29MEMS device and method of manufacturing MEMS device