171103 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using integrated interconnect structures
Sensor Module
#2HIGH DYNAMIC RANGE VIBRATING BEAM ACCELEROMETER
#3IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
#4METHOD FOR PRODUCING AN INTEGRATED CIRCUIT POINTED ELEMENT COMPRISING ETCHING FIRST AND SECOND ETCHABLE MATERIALS WITH A PARTICULAR ETCHANT TO FORM AN OPEN CRATER IN A PROJECT
#5THREE-AXIS ACCELEROMETER
#6Strain gauge sensor accelerometer with improved accuracy
#7Semiconductor device and method including an intertial mass element
#8Micropatterned component and method for manufacturing a micropatterned component
#9Micromechanical structure, in particular sensor arrangement, and corresponding operating method
#10MEMS SENSOR
#11ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE
#12Semiconductor physical quantity sensor
#13Region divided substrate and semiconductor device
#14SEMICONDUCTOR DEVICE AND METHOD