171104 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing wafer-level encapsulation
Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element
#2Physical quantity sensor, composite sensor, inertial measurement unit, vehicle positioning device, portable electronic device, electronic device, vehicle, traveling supporting system, display device, and manufacturing method for physical quantity sensor
#3INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING AND EMBEDDED DIGITAL ELECTRONICS
#4Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element
#5Method for manufacturing a micromechanical inertial sensor
#6Micromechanical component
#7Capacitive physical quantity sensor
#8Capacitive physical quantity sensor
#9Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
#10Electronic device having a cover in which a penetration hole is provided and manufacturing method of electronic device
#11Inertial and pressure sensors on single chip
#12Micropatterned component and method for manufacturing a micropatterned component
#13Multi-axis integrated MEMS inertial sensing device on single packaged chip
#14MEMS sensor device with multi-stimulus sensing
#15Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
#16Method of producing a microelectromechanical (MEMS) sensor device
#17MEMS device and method of manufacturing MEMS device
#18MEMS tunneling accelerometer
#19ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE
#20Method for manufacturing a micro-electromechanical structure
#21Semiconductor physical quantity sensor
#22Region divided substrate and semiconductor device
#23Laterally integrated MEMS sensor device with multi-stimulus sensing
#24Vertically integrated MEMS acceleration transducer
#25Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics