171105 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
EXTENSION OF A CIRCUIT FOR INERTIAL SENSORS FOR THE DETECTION, CALIBRATION AND DYNAMIC CORRECTION OF SQUEEZE FILM DAMPING AND RESTORING EFFECTS DURING HIGH-LOAD OPERATION
#2HIGH DYNAMIC RANGE VIBRATING BEAM ACCELEROMETER
#3MICROELECTROMECHANICAL SENSOR COMPONENT AND MICROELECTROMECHANICAL INERTIAL SENSOR
#4Physical Quantity Sensor, Inertial Measurement Unit, And Electronic Apparatus
#5Compliant Stops for MEMS Inertial Device Drive PLL Stability
#6TRANSLATIONAL MASS ACCELEROMETER
#7MEMS DEVICE HAVING IMPROVED DETECTION PERFORMANCES
#8Physical Quantity Sensor And Inertial Measurement Unit
#9MICROMECHANICAL SENSOR STRUCTURE WITH DAMPING STRUCTURE
#10Physical Quantity Sensor And Inertial Measurement Unit
#11Resonant microelectromechanical sensor with improved operation
#12Signal processing method, signal processing device, physical quantity measurement device, and sensor module
#13WIDE BANDWIDTH MEMS ACCELEROMETER FOR DETECTING VIBRATIONS
#14Physical quantity sensor, electronic apparatus, and vehicle
#15Vibration damping in MEMS acceleration sensors
#16Vibrating beam accelerometer with pressure damping
#17Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers
#18Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling
#19Inertial sensor with integrated damping structures
#20Vibration sensor for a portable device including a damping arrangement to reduce mechanical resonance peak of sensor
#21High performance micro-electro-mechanical systems accelerometer
#22Microelectromechanical device for out-of-plane motion detection
#23Physical quantity sensor, physical quantity sensor device, complex sensor device, inertial measurement unit, and vehicle
#24FM inertial sensor and method for operating the FM inertial sensor
#25Method of production of semiconductor device having semiconductor layer and support substrate spaced apart by recess
#26Vibration sensor for a portable device including a damping arrangement to reduce mechanical resonance peak of sensor
#27Capacitive microelectromechanical accelerometer
#28Physical quantity sensor
#29VIBRATION DAMPING MOUNT
#30Accelerometers
#31Microelectronic structure comprising means of control of viscous damping
#32Acceleration sensor having spring force compensation
#33Damping of a Sensor
#34Microelectromechanical device and a method of damping a mass thereof
#35Vibration or acceleration sensor applying squeeze film damping
#36Damped linear accerelometer
#37Damped fiber optic accelerometers, sensors, and sensor assemblies, and methods of assembling the same
#38Structure-borne noise decoupling on sensors working with transmitter fields
#39Mechanical low pass filter for motion sensors
#40Mechanical low pass filter for motion sensors
#41Multi-axis inertial sensor with dual mass and integrated damping structure
#42Accelerometers
#43Robust inertial sensors
#44Inertial Sensor
#45Force feedback electrodes in MEMS accelerometer
#46Performance improvement of MEMS devices
#47Acceleration sensor and method for producing an acceleration sensor
#48Damped fiber optic accelerometers, sensors, and sensor assemblies, and methods of assembling the same
#49Inertial sensor
#50Vibration damper for a sensor unit and sensor arrangement for a motor vehicle
#51Fully differential capacitive architecture for MEMS accelerometer
#52Apparatus and method for extending analog front end sense range of a high-Q MEMS sensor
#53Capacitance type physical quantity sensor
#54Micromechanical sensor device
#55Capacitive acceleration sensor with a bending elastic beam and preparation method thereof
#56Micromechanical sensor and method for manufacturing a micromechanical sensor
#57Micropatterned component and method for manufacturing a micropatterned component
#58Microelectromechanical and/or nanoelectromechanical structure with a variable quality factor
#59Acceleration sensor
#60Chip level sensor with multiple degrees of freedom
#61Printed circuit board arrangement comprising an oscillatory system
#62Physical quantity sensor and electronic apparatus
#63Damping device for a micromechanical sensor device
#64Electronic damper circuit for MEMS sensors and resonators
#65Method for manufacturing a micromechanical structure, and micromechanical structure
#66Microelectromechanical accelerometer with wireless transmission capabilities
#67Acceleration sensor having a damping device
#68Electrical Damping for Isolation and Control of Mems Sensors Experiencing High-G Launch
#69Manufacturing method of combined sensor
#70Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors
#71Method for sensing acceleration using a translational mass in-plane MEMS accelerometer
#72Translational mass in-plane MEMS accelerometer
#73DAMPING DEVICE
#74Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
#75Compact dual beam vector sensor
#76Systems and methods for canceling road noise in a microphone signal