METHOD OF INSPECTING TIP OF ATOMIC FORCE MICROSCOPE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SYSTEM FOR PERFORMING ATOMIC FORCE MICROSCOPY, INCLUDING A GRID PLATE QUALIFICATION TOOL

METHOD OF REMOVING DEFECT OF MASK

FIDUCIAL MARKER DESIGN, FIDUCIAL MARKER, SCANNING PROBE MICROSCOPY DEVICE AND METHOD OF CALIBRATING A POSITION OF A PROBE TIP

AUTOMATED LANDING METHOD OF A SCANNING PROBE MICROSCOPY SYSTEM AND SCANNING PROBE MICROSCOPY SYSTEM USING THE SAME

PROBE ASSESSMENT METHOD AND SPM

STANDARD SAMPLE AND MANUFACTURING METHOD THEREOF

METHOD OF INSPECTING TIP OF ATOMIC FORCE MICROSCOPE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method for calibrating nano measurement scale and standard material used therein

Apparatus and method for a scanning probe microscope

Method and apparatus for examining a measuring tip of a scanning probe microscope

System and method of performing scanning probe microscopy on a substrate surface

Reference-standard device for calibration of measurements of length, and corresponding calibration process

Method and apparatus for examining a measuring tip of a scanning probe microscope

Apparatus and method for a scanning probe microscope

System and method for generating and analyzing roughness measurements and their use for process monitoring and control

Determining interaction forces in a dynamic mode AFM during imaging

Automatic calibration and tuning of feedback systems

Non-contact velocity measurement instruments and systems, and related methods

Method of calibrating a nanometrology instrument

Calibration standard with pre-determined features

Nanometer standard prototype and method for manufacturing nanometer standard prototype

Characterization structure for an atomic force microscope tip

Transferable probe tips

Characterizing Dimensions of Structures Via Scanning Probe Microscopy

Optical grid for high precision and high resolution method of wafer-scale nanofabrication

Method and structure for characterising an atomic force microscopy tip

Method and apparatus for characterizing a probe tip

Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions

Test surfaces useful for calibration of surface profilometers

Apparatus and method using a disk drive slider and/or a peltier plate in an atomic force microscope

Sample holder for holding samples at pre-determined angles

ATOMIC FORCE MICROSCOPE TIP SHAPE DETERMINATION TOOL

Scanning probe microscopy inspection and modification system

Method of calibrating a caliper AFM

Electron microscope and scanning probe microscope calibration device

REFERENCE SPECIMEN FOR MICROSCOPE AND MANUFACTURING METHOD THEREOF

Deconvolving tip artifacts using multiple scanning probes

Standard specimen for probe shape evaluation and method for evaluating probe shape

Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby

Characterizing dimensions of structures via scanning probe microscopy

Integrated measuring instrument

Method for producing at least one small opening in a layer on a substrate and components produced according ot said method

Magnetic field generator device for calibration of magnetic force microscope

Characterizing dimensions of structures via scanning probe microscopy

Caliper method, system, and apparatus

Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby

Reference sample suitable to calibrate magnetic microscope's probe tip and calibration method