VI SENSOR AND METHOD FOR MONITORING OF PLASMA STATUS

AMPLIFIER DEVICE FOR AMPLIFYING SMALL CURRENTS

HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL

PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS

Circuit, Device and Method for Optical Characteristic Inspection

High bandwidth architecture for centralized coherent control at the edge of processing tool

Methods of evaluating performance of an atmospheric pressure ionization system

Arc detector for detecting arcs, plasma system and method of detecting arcs

Fast faraday cup for measuring the longitudinal distribution of particle charge density in non-relativistic beams

Device and method for detecting the mass center of a beam of electric charges

Angled slit design for computed tomographic imaging of electron beams

Fast Faraday cup for measuring the longitudinal distribution of particle charge density in non-relativistic beams

Pulse system verification

Measuring flux, current, or integrated charge of low energy particles

Methods of evaluating performance of an atmospheric pressure ionization system

Electronic amplification device, measurement apparatus and associated measurement method

RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support

Surface potential measurement of dielectric materials in plasma

Measuring flux, current, or integrated charge of low energy particles

VOLTAGE BUFFER FOR CURRENT SENSOR

Current measurement device

Process condition sensing device and method for plasma chamber

Beam current measuring device and charged particle beam irradiation apparatus

Dielectric barrier discharge ionization detector

Dielectric barrier discharge ionization detector

Dielectric barrier discharge ionization detector

Dielectric barrier discharge ionization detector

System and method for controlling plasma magnetic field

Current-measurement device

Using modeling to determine wafer bias associated with a plasma system

Measurement of electrical variables on a DC furnace

METHOD FOR ESTIMATING LIFETIME OF CATHODE IN ELECTRON BEAM LITHOGRAPHY APPARATUS

Monitoring a discharge in a plasma process

Monitoring device, ion implantation device, and monitoring method

Multi-beam current quantity measuring method, multi-charged particle drawing control device, and multi-charged particle beam drawing device

High thermal conductivity insulated metal substrates produced by plasma electrolytic oxidation

Assessment and calibration of a high energy beam

Voltage measuring device

Beam imaging sensor and method for using same

Method for determining beam parameters of a charge carrier beam, measuring device, and charge carrier beam device

Control module for an ion implanter

Ionization monitoring device

Radio-frequency ion channel antenna

Measurement of plural RF sensor devices in a pulsed RF plasma reactor

Using modeling to determine wafer bias associated with a plasma system

Discharge ionization current detector

SENSOR DEVICE, A DETECTOR ARRANGEMENT AND A METHOD FOR DETECTING ARCING

Methods and apparatus for detecting azimuthal non-uniformity in a plasma processing system

In-situ VHF current sensor for a plasma reactor

Self-heating electrometer for high pressure ion chamber for verification of temperature compensation

Method and apparatus for detecting arc in plasma chamber

Air ion measuring apparatus

Apparatus and method for measuring ion beam current

PLASMA PROBE AND METHOD FOR PLASMA DIAGNOSTICS

SENSOR FOR MEASURING PLASMA PARAMETERS

In-situ VHF voltage sensor for a plasma reactor

Wide-dynamic range electrometer with a fast response

Process condition sensing device and method for plasma chamber

Wide-dynamic range electrometer with a fast response

Current integrator with wide dynamic range

Plasma monitoring method

Arc detection

Integrated optical element and Faraday cup

Charged particle beam profile measurement

High dynamic range charge measurements

Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber

Method for the precise measurement of dependency on amplitude and phase of plurality of high frequency signals and device for carrying out said method

Current detection circuit, light receiving device using the same, and electronic device

Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events

Method and apparatus for a voltage/current probe test arrangements

Ion Control Sensor

Out-of-line measurement of a current flowing through a load

Magnetic monitoring of a Faraday cup for an ion implanter

Miniature modified Faraday cup for micro electron beams

Current-based method and apparatus for detecting and classifying arcs

MEASURING DEVICE OF AN HF PLASMA SYSTEM

Beam current sensor

Particle beam current measurement system

Method and device for detecting arcs

Ionization test for electrical verification

Multilayer detector and method for sensing an electron beam

Method and apparatus for measuring plasma density in processing reactors using a short dielectric cap

Device for measuring very short current pulses

Contactless area testing apparatus and method utilizing device switching

Beam current measuring instrument and beam current measuring method using same

Measuring electrical current flowing through a conductor

Shielding assembly for an RF sensor current transducer

DC bias voltage measurement circuit and plasma CVD apparatus comprising the same

Measurement method of electron beam current, electron beam writing system and electron beam detector

Electron beam diagnostic for profiling high power beams

Superconductor fabrication processes

Fast Faraday cup with high bandwidth

RF sensor clamp assembly

Signal processing apparatus, and voltage or current measurer utilizing the same

Plasma potential measuring method and apparatus, and plasma potential measuring probe

Radio frequency Langmuir probe

Systems and methods for screening particle source manufacturing and development test data