174548 ⎘
Systems with reflecting surfaces, with or without refracting elements; Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
Sub-classes:PANEL INSPECTION DEVICE AND METHOD FOR INSPECTING A PANEL
#2System and method for femtotesla direct magnetic gradiometer using a multipass cell
#3Illumination system with flat 1D-patterned mask for use in EUV-exposure tool
#4Freeform surface off-axial three-mirror imaging system
#5Mounting optical elements in optical systems
#6Method for designing off-axis aspheric optical system
#7Off-axis aspheric three-mirror optical system
#8Off-axis three-mirror optical system with freeform surfaces
#9Korsch-type compact three-mirror anastigmat telescope
#10Off-axis three-mirror optical system with freeform surfaces
#11Off-axial three-mirror optical system with freeform surfaces
#12Illumination optics for a metrology system for examining an object using EUV illumination light and metrology system comprising an illumination optics of this type
#13Thermal wake control
#14Method for producing an optical assembly having at least two optical functional surfaces, an optical device and unit for carrying out the method
#15Pointable optical system with coude optics having a short on-gimbal path length
#16Imaging optical system
#17Pointable optical system with coude optics having a short on-gimbal path length
#18Method and apparatus for detecting defects using focus compensation