IMAGING EUV OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD

EUV COLLECTOR

Printer provided with condenser lens that focuses light emitted for curing ink deposited on printing object

LUMINAIRE FOR IRRADIATING A TARGET

EUV collector mirror

High resolution, high throughput additive manufacturing

Multilayer optical films and articles comprising the same

Reducing speckle in an excimer light source

Extreme ultraviolet light condensation mirror, extreme ultraviolet light condensation mirror manufacturing method, and electronic device manufacturing method

Apparatus and methods to prevent biofouling

Optical element for light concentration and production method for an optical element for light concentration

STEREOLITHOGRAPHY APPARATUS AND METHOD FOR PRODUCING SHAPED ARTICLE

Projection objective

Reflective image-forming optical system, exposure apparatus, and device manufacturing method

Light source module

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

Reducing speckle in an excimer light source

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

EUV Collector

Apparatus and methods to prevent biofouling

Systems and methods for filtering and presenting optical beacons or signals

LIGHT EMITTING DIODE DIGITAL MICROMIRROR DEVICE ILLUMINATOR

Skin detection device

Ultraviolet Curing Device

Reflective image-forming optical system, exposure apparatus, and device manufacturing method

Device including a radiation emitter for applying radiation to a target, and related methods

Optical system, in particular for a microlithographic projection exposure apparatus

Hollow light integrator for light emitting diode digital micromirror device illuminator

Extreme ultraviolet mirrors and masks with improved reflectivity

Light illuminating apparatus

Reducing speckle in an excimer light source

Integrated rotary structure and fabrication method thereof

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

ULTRAVIOLET DEVICES AND METHODS FOR THE INACTIVATION OF A PATHOGEN IN A FLOWING WATER SAMPLE

ENHANCED LED POLYMERIZATION DEVICE

Illumination optic for EUV projection lithography

Device for swiveling a mirror element with two degrees of swiveling freedom

Processing chamber with irradiance curing lens

Adjusting a beam diameter and an aperture angle of a laser beam

Receivers for optical narrowcasting

Adjustment and Design Method of Illumination System Matched with Multiple Objective Lenses in Extreme Ultraviolet Lithography Machine

Ultraviolet surface illumination system

Light illuminating apparatus

Mask inspection apparatus and mask inspection method

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

EUV element having barrier to hydrogen transport

Integrating cone for an illumination device

UV LIGHT SOURCES, AND GASKETS FOR UV LIGHT SOURCES

Light emitting diode digital micromirror device illuminator

Light source apparatus, illumination device, exposure apparatus, and device manufacturing method

Reflective image-forming optical system, exposure apparatus, and device manufacturing method

Faceted EUV optical element

Optical system of a microlithographic projection exposure apparatus

Extreme ultraviolet generation device and exposure system including the same

EUV light generator including collecting mirror having drip hole

EUV light generator apparatus having a droplet generator configured to control a droplet position using a magnetic field

APPARATUS GENERATING EXTREME ULTRAVIOLET LIGHT AND EXPOSURE SYSTEM INCLUDING THE SAME

Solution for EUV power increment at wafer level

Extreme ultraviolet light source, exposure apparatus, and integrated rotary structure fabricating method

Method for illuminating an object field of a projection exposure system

Laser apparatus

Method for printing a three-dimensional light guiding structure by curing droplets of a printing material by light irradiation

Measuring arrangement for measuring optical properties of a reflective optical element, in particular for microlithography

UV light curing systems, and methods of designing and operating the same

Illumination optical unit for EUV projection lithography

Illumination optical unit and illumination system for EUV projection lithography

Collector

Optical Communication Systems and Methods

DEFORMABLE OPTICAL SYSTEM AND METHOD FOR CONTROLLING THE SAME AS WELL AS A LITHOGRAPHIC SYSTEM COMPRISING THE DEFORMABLE OPTICAL SYSTEM

Radiation collector, radiation source and lithographic apparatus

Optical module

Illumination optical unit for projection lithography

LIGHT EMITTING DIODE DIGITAL MICROMIRROR DEVICE ILLUMINATOR

Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices

EUV collector

Illumination optical unit for EUV projection lithography

Method for operating a microlithographic projection exposure apparatus

Imaging apparatus and imaging method

Light emitting apparatus

Reflective image-forming optical system, exposure apparatus, and device manufacturing method

Facet mirror

Method and apparatus for femtosecond laser pulse measurement based on transient-grating effect

Illumination optical unit for a projection exposure apparatus

Device and method for expanding a laser beam

Pattern-independent and hybrid matching/tuning including light manipulation by projection optics

Ambient light sensing method and an ambient light sensing device

Lens assembly for remote phosphor LED device

Field facet mirror for an illumination optics of a projection exposure apparatus for EUV microlithography

Reflective optical element and optical system for EUV lithography

Collector

Device and method for detecting optical performance of beam shaping element

Aspherical LED lens and light emitting device including the same

Multispectral illumination device

Reflecting member and flame sensor

Source-collector modules for EUV lithography employing a GIC mirror and a LPP source

BEAM LINE FOR A SOURCE OF EXTREME ULTRAVIOLET (EUV) RADIATION

Illumination optics for a metrology system for examining an object using EUV illumination light and metrology system comprising an illumination optics of this type

Optoelectronic semiconductor part containing alkali-free and halogen-free metal phosphate

Radiation Source, Lithographic Apparatus and Device Manufacturing Method

Lighting device, display device, and television receiver

Illumination system and projection apparatus comprising the same

OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE

Pattern-independent and hybrid matching/tuning including light manipulation by projection optics

Longitudinally graded index lens

Multispectral illumination device

Collection optics

Light-spreading device

Source-collector module with GIC mirror and tin rod EUV LPP target system

Source-collector module with GIC mirror and tin wire EUV LPP target system

Aspherical LED lens and light emitting device including the same

SYSTEM, METHOD AND APPARATUS FOR ULTRAVIOLET CURING OF ADHESIVES WITH LIGHT BEAM SHAPING IN DISK DRIVE MANUFACTURING

WAVELENGTH BEAM COMBINING BASED LASER PUMPS

WAVELENGTH BEAM COMBINING BASED PULSED LASERS

Illumination optical system for projection lithography

UV LAMP

Method of manufacturing optical part and optical part, and method of manufacturing display and display

Cooled spider and method for grazing-incidence collectors

Illumination system, luminaire and display device

Field facet mirror for an illumination optics of a projection exposure apparatus for EUV microlithography

Lighting module with diffractive optical element

Cooling systems and methods for grazing incidence EUV lightography collectors

LED DEVICE WITH RE-EMITTING SEMICONDUCTOR CONSTRUCTION AND CONVERGING OPTICAL ELEMENT

Light emitting apparatus

Illuminating optical lens for light emitting diode (LED)

Radiation Collector

Method and system for homogenizing diode laser pump arrays

Spread reflector for a lamp structure

Device for beam shaping

Inspection apparatus for lithography

Beam homogenizer, laser irradiation apparatus, and method of manufacturing a semiconductor device

Illumination apparatus

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND CLEANING METHOD

Liquid crystal display

Collector optical system

Converging element for LED

Method and apparatus for producing a uniform irradiance distribution from an array of light emitting diodes

High refractive index materials and composites

LASER OPTICAL SYSTEM

REFLECTIVE OPTICAL SYSTEM

LED Device with Re-Emitting Semiconductor Construction and Coverging Optical Element

System, method and apparatus for ultraviolet curing of adhesives with light beam shaping in disk drive manufacturing

Multispectral illuminaton device

Method for homogenizing light

Lighting apparatus, exposure apparatus and microdevice manufacturing method

Optical Device for the Collection of Optical Signals

Image Locking System for Dna Micro-Array Synthesis

Light concentrator for an optical code reader

Laser optical system

Device for beam shaping

Reflective optical illumination collector

Optical scanning device and image forming apparatus

Collector with fastening devices for fastening mirror shells

Compact mixing cavity for multiple colors of LEDs

Collector configured of mirror shells

Two-stage laser-beam homogenizer

LED device with re-emitting semiconductor construction and converging optical element

LED device with re-emitting semiconductor construction and converging optical element

Device and method to stabilize beam shape and symmetry for high energy pulsed laser applications

Optical system and method for use in projection systems

Reflective optical system

Illumination system

Optical integrator, illumination optical device, exposure device, and exposure method

Method of manufacturing high sag lens and high sag lens manufactured thereby

Illuminating and imaging system comprising a diffractive beam splitter

Systems and methods for achieving a required spot says for nanoscale surface analysis using soft x-rays

Planar laser illumination and imaging (PLIIM) systems with integrated despeckling mechanisms provided therein

Collector with fastening devices for fastening mirror shells

Apparatus and method for laser radiation

Illuminators using reflective optics with recycling and color mixing

Method and apparatus for coupling laser beams

Generation method of light intensity distribution, generation apparatus of light intensity distribution, and light modulation element assembly

Collector having unused region for illumination systems using a wavelength ≦193 nm

X-radiation scanning system having an automatic object identification and attribute information acquisition and linking mechanism integrated therein

Liquid crystal display

Radiation-emitting semiconductor chip with a beam shaping element and beam shaping element

Reflective optical system

Attenuator for attenuating wavelengths unequal to a used wavelength

Image locking system for DNA micro-array synthesis

Apparatus and method for providing substantially uniform radiation of a three-dimensional object with at least one curved surface

Optical element for forming an arc-shaped illumination field

Grazing incidence relays

Method of crystallizing a semiconductor film using laser irradiation

Beam shaping element for use in a lithographic system

Illumination system having a nested collector for annular illumination of an exit pupil

Multi mirror system for an illumination system

Ultraviolet disinfection system

EUV light source with spectral purity filter and power recycling