ClassID:

173977

G02B2006/12176 - CPC Classification

Classification description:

Light guides of the optical waveguide type of the integrated circuit kind; Manufacturing methods Etching

Recent Application in this class:
#1
20260153677
2026-06-04

STRUCTURES AND METHODS FOR STRESS AND GAP MITIGATION IN INTEGRATED OPTICS MICROELECTROMECHANICAL SYSTEMS

#2
20260147157
2026-05-28

PHOTONIC STRUCTURE AND METHOD FOR FORMING THE SAME

#3
20260140310
2026-05-21

FLEXIBLE PHOTONIC CRYSTAL PANEL

#4
20260118577
2026-04-30

WAVEGUIDES WITH META-OPTICAL STRUCTURES FOR ROUTING LIGHT BETWEEN LAYERS

#5
20260099007
2026-04-09

UNDERCUT-ASSISTED LONG RANGE EVANESCENT COUPLING BETWEEN WAVEGUIDES

#6
20260099001
2026-04-09

PHOTONIC INTEGRATED CIRCUIT PACKAGING ARCHITECTURE

#7
20260086284
2026-03-26

CHEMICAL BLOCKS FOR SILICON PHOTONIC WAVEGUIDES

#8
20260079303
2026-03-19

PATTERNING METHOD FOR PHOTONIC DEVICES

#9
20260072209
2026-03-12

INTEGRATION OF AN UNPROCESSED, DIRECT-BANDGAP CHIP INTO A SILICON PHOTONIC DEVICE

#10
20260003123
2026-01-01

STABLE OPTICAL WAVEGUIDE AND METHOD OF MANUFACTURING THE SAME

#11
20250334743
2025-10-30

STRUCTURES AND METHODS FOR STRESS AND GAP MITIGATION IN INTEGRATED OPTICS MICROELECTROMECHANICAL SYSTEMS

#12
20250314829
2025-10-09

FABRICATION METHOD FOR PHOTONIC DEVICES

#13
20250314819
2025-10-09

STRUCTURE AND PROCESS FOR PHOTONIC PACKAGES

#14
20250271614
2025-08-28

WAVEGUIDE WITH TRANSITIONAL PORTION AND METHOD OF FABRICATING SAME

#15
20250237811
2025-07-24

OPTOFLUIDIC DEVICES

#16
20250093560
2025-03-20

METHODS FOR FABRICATING SURFACE-RELIEF GRATING BASED ARCHITECTURES USING FUSION BONDING

#17
20250076551
2025-03-06

WAVEGUIDE INCLUDING AN OPTICAL GRATING WITH REDUCED CONTAMINATION AND METHODS OF PRODUCTION THEREOF

#18
20250060531
2025-02-20

PHOTONIC INTEGRATED CIRCUIT PACKAGING ARCHITECTURE

#19
20240429332
2024-12-26

Microstructure enhanced absorption photosensitive devices

#20
20240385369
2024-11-21

SEMICONDUCTOR DEVICES WITH EMBEDDED SILICON LENS

#21
20240345322
2024-10-17

PHOTONIC STRUCTURE AND METHOD FOR FORMING THE SAME

#22
20240329298
2024-10-03

MULTI-TIERED SEMICONDUCTOR WAVEGUIDE AND MULTI-TIERED WAVEGUIDE HEATER

#23
20240248256
2024-07-25

PHOTONIC SYSTEM INCLUDING MICRO RING MODULATOR AND METHOD OF USING

#24
20240230991
2024-07-11

Nanoparticle fluoropolymer electrode

#25
20240173930
2024-05-30

METHOD OF FABRICATING MOLDS FOR FORMING EYEPIECES WITH INTEGRATED SPACERS

#26
20240168229
2024-05-23

PHOTONIC DEVICE WITH FIDUCIAL MARKS FOR ALIGNMENT OF AN OPTICAL COMPONENT

#27
20240159961
2024-05-16

METHOD FOR MANUFACTURING A PHOTONIC DEVICE PROVIDED WITH AT LEAST TWO PHOTONIC CHIPS, AND PHOTONIC DEVICE

#28
20240118490
2024-04-11

Optofluidic devices

#29
20240118489
2024-04-11

TRANSFER-PRINTED MICRO-OPTICAL COMPONENTS

#30
20240111089
2024-04-04

NANOROD COATING BETWEEN TWO OPTICAL MEDIUMS

#31
20240105875
2024-03-28

SILICON NITRIDE WAVEGUIDE COUPLED PHOTODIODE

#32
20240063317
2024-02-22

Microstructure enhanced absorption photosensitive devices

#33
20240027687
2024-01-25

Nanoimprinted photonic integrated circuits

#34
20230408762
2023-12-21

Photonic system including micro ring modulator and method of using

#35
20230384517
2023-11-30

STRUCTURE AND PROCESS FOR PHOTONIC PACKAGES

#36
20230288633
2023-09-14

ISOLATOR AND ISOLATOR MANUFACTURING METHOD

#37
20230266535
2023-08-24

STRUCTURES FOR INTEGRATED SILICON PHOTONICS OPTICAL GYROSCOPES

#38
20230229031
2023-07-20

OPTICAL PHASE SHIFTER USING KTN (KTaNbO3) AND MANUFACTURING METHOD THEREOF

#39
20230194785
2023-06-22

ACTIVE MODULATION OF THE REFRACTIVE INDEX IN PHOTONIC INTEGRATED CIRCUITS VIA CHARGE INJECTION

#40
20230185024
2023-06-15

Photonic structure and method for forming the same

#41
20230152520
2023-05-18

PATTERNING METHOD FOR PHOTONIC DEVICES

#42
20230128056
2023-04-27

Nanoimprinted photonic integrated circuits

#43
20230125733
2023-04-27

PHOTONIC MODULE AND METHOD OF MANUFACTURE

#44
20230119823
2023-04-20

Optical assembly

#45
20230010459
2023-01-12

METHOD FOR FABRICATING KTP NONLINEAR RACETRACK MICRO-RING RESONATORS

#46
20220397721
2022-12-15

Photonic chip and method of manufacture

#47
20220381974
2022-12-01

Wafer scale bonded active photonics interposer

#48
20220357514
2022-11-10

Fabrication method for photonic devices

#49
20220342150
2022-10-27

Photonic integrated circuit packaging architecture

#50
20220334310
2022-10-20

Structure and process for photonic packages

#51
20220276512
2022-09-01

Optical modulator and method of fabricating an optical modulator

#52
20220252913
2022-08-11

Hybrid CMOS compatible electro-optic device

#53
20220246775
2022-08-04

Microstructure enhanced absorption photosensitive devices

#54
20220244458
2022-08-04

Chip-to-chip optical interconnection using high refractive index couplers

#55
20220231483
2022-07-21

GERMANIUM-ON-SILICON LASER IN CMOS TECHNOLOGY

#56
20220229231
2022-07-21

Integrated environmentally insensitive modulator for interferometric gyroscopes

#57
20220214498
2022-07-07

PHOTONIC CHIP AND METHOD OF MANUFACTURE

#58
20220171125
2022-06-02

Integration of an unprocessed, direct-bandgap chip into a silicon photonic device

#59
20220155522
2022-05-19

Optical mode-size converter

#60
20220102563
2022-03-31

Microstructure enhanced absorption photosensitive devices

#61
20220099892
2022-03-31

Structures for integrated silicon photonics optical gyroscopes with structural modifications at waveguide crossing

#62
20220057577
2022-02-24

Photonic structure and method for forming the same

#63
20220043207
2022-02-10

Edge couplers with a partially-etched inverse taper

#64
20210389532
2021-12-16

Method of forming an hermetic seal on electronic and optoelectronic packages

#65
20210373227
2021-12-02

REACTIVITY ENHANCEMENT IN ION BEAM ETCHER

#66
20210354982
2021-11-18

Method for Fabrication of a Suspended Elongated Structure by Etching or Dissolution Through Openings in a Layer

#67
20210349262
2021-11-11

Integrated environmentally insensitive modulator for interferometric gyroscopes

#68
20210335677
2021-10-28

Integrated structure and manufacturing method thereof

#69
20210311255
2021-10-07

Silicon photonics platform with integrated oxide trench edge coupler structure

#70
20210278595
2021-09-09

Fabrication method for photonic devices

#71
20210278592
2021-09-09

Single-layer and multi-layer structures for integrated silicon photonics optical gyroscopes

#72
20210268756
2021-09-02

Method of fabricating molds for forming eyepieces with integrated spacers

#73
20210141151
2021-05-13

Optical waveguide having support member, optical waveguide mounting substrate and optical transceiver

#74
20210132461
2021-05-06

Silicon photonic components fabricated using a bulk substrate

#75
20210088726
2021-03-25

Photonic structure and method for forming the same

#76
20210066036
2021-03-04

Methods of optical device fabrication using an electron beam apparatus

#77
20210026071
2021-01-28

Integrated micro-lens waveguide and methods of making and using same

#78
20210003770
2021-01-07

Method for manufacturing an optical device

#79
20200386944
2020-12-10

Single-layer and multi-layer structures for integrated silicon photonics optical gyroscopes

#80
20200363693
2020-11-19

Silicon-based lithium niobate film electro-optic modulator array and integration method thereof

#81
20200326476
2020-10-15

Semiconductor integrated optical device, and method of fabricating semiconductor integrated optical device

#82
20200319403
2020-10-08

Wafer scale bonded active photonics interposer

#83
20200266609
2020-08-20

Germanium-on-silicon laser in CMOS technology

#84
20200264372
2020-08-20

Waveguide mirror and method of fabricating a waveguide mirror

#85
20200258791
2020-08-13

Mode converter and method of fabricating thereof

#86
20200243397
2020-07-30

MODE CONVERTER AND METHOD OF FABRICATING THEREOF

#87
20200241202
2020-07-30

Silicon photonics platform with integrated oxide trench edge coupler structure

#88
20200235038
2020-07-23

Through-silicon vias for heterogeneous integration of semiconductor device structures

#89
20200194218
2020-06-18

Methods of optical device fabrication using an electron beam apparatus

#90
20200194217
2020-06-18

Ion beam source for optical device fabrication using a segmented ion source having one or more angled surfaces

#91
20200192028
2020-06-18

Methods of optical device fabrication using an ion beam source

#92
20200192027
2020-06-18

Electron beam apparatus for optical device fabrication

#93
20200132932
2020-04-30

Semiconductor device and method of manufacturing

#94
20200088942
2020-03-19

Waveguide intersections incorporating a waveguide crossing

#95
20200088941
2020-03-19

Protection layers for polymer modulators/waveguides

#96
20200057197
2020-02-20

Waveguide for an integrated photonic device

#97
20200049883
2020-02-13

Method of making a metal grating in a waveguide and device formed

#98
20200033533
2020-01-30

ON-WAFER TESTING OF PHOTONIC CHIPS

#99
20200003951
2020-01-02

Method of fabrication polymer waveguide

#100
20190363509
2019-11-28

III-V photonic integrated circuits on silicon substrate

#101
20190361180
2019-11-28

Method of forming an hermetic seal on electronic and optoelectronic packages

#102
20190353847
2019-11-21

Enhanced coupling strength grating having a cover layer

#103
20190353846
2019-11-21

Method of making an enhanced coupling strength grating having a cover layer

#104
20190353845
2019-11-21

Reducing back reflection in a photodiode

#105
20190302366
2019-10-03

Waveguide mirror and method of fabricating a waveguide mirror

#106
20190293864
2019-09-26

FRONTEND INTEGRATION OF ELECTRONICS AND PHOTONICS

#107
20190285552
2019-09-19

Porous silicon sensor

#108
20190265407
2019-08-29

Optical device

#109
20190244866
2019-08-08

Integrated structure and manufacturing method thereof

#110
20190243070
2019-08-08

Mode converter and method of fabricating thereof

#111
20190235166
2019-08-01

Junction region between two waveguides and associated method of production

#112
20190212498
2019-07-11

Reducing back reflection in a photodiode

#113
20190196102
2019-06-27

Techniques for fabricating waveguide facets and die separation

#114
20190196099
2019-06-27

Semiconductor device

#115
20190179136
2019-06-13

Micro-motor based swept wavelength optical components

#116
20190129089
2019-05-02

Reactivity enhancement in ion beam etcher

#117
20190025504
2019-01-24

Optical waveguide

#118
20190018189
2019-01-17

Method for creating a high refractive index wave guide

#119
20190011635
2019-01-10

Method of making a metal grating in a waveguide and device formed

#120
20190003884
2019-01-03

Light receiving device, method for fabricating light receiving device

#121
20180372953
2018-12-27

Optical waveguide, fabrication methods, and applications

#122
20180348429
2018-12-06

Waveguide fabrication with sacrificial sidewall spacers

#123
20180252867
2018-09-06

Semi-finished product, method for the production thereof and component produced therewith

#124
20180239085
2018-08-23

Method for the formation of nano-scale on-chip optical waveguide structures

#125
20180217329
2018-08-02

Integration of bonded optoelectronics, photonics waveguide and VLSI SOI

#126
20180188451
2018-07-05

Method of fabrication polymer waveguide

#127
20180136391
2018-05-17

Semiconductor device and manufacturing method thereof

#128
20180106954
2018-04-19

Method for manufacturing an optical device

#129
20180081206
2018-03-22

Optical waveguide having a wide brillouin bandwidth

#130
20180074259
2018-03-15

Optical coupler with a waveguide and waveguide index matched materials at an edge of a substrate

#131
20180048123
2018-02-15

Germanium-on-silicon laser in CMOS technology

#132
20180041008
2018-02-08

Method for manufacturing optical device

#133
20180040654
2018-02-08

Fabrication method for digital etching of nanometer-scale level structures

#134
20180011246
2018-01-11

Optical component with angled-facet waveguide

#135
20180003895
2018-01-04

Junction region between two waveguides and associated method of production

#136
20170351026
2017-12-07

Integrated micro-lens waveguide and methods of making and using same

#137
20170293073
2017-10-12

Filling a cavity through a reservoir and a feed-channel and related apparatus and methods

#138
20170269300
2017-09-21

Single photon source

#139
20170227456
2017-08-10

Optical waveguide structure and optical gas sensor, and methods of fabrication thereof

#140
20170153390
2017-06-01

Semiconductor device and manufacturing method thereof

#141
20170139135
2017-05-18

Optical component with angled-facet waveguide

#142
20170125970
2017-05-04

III-V photonic integrated circuits on silicon substrate

#143
20170123168
2017-05-04

Integration of bonded optoelectronics, photonics waveguide and VLSI SOI

#144
20170123153
2017-05-04

Integration of bonded optoelectronics, photonics waveguide and VLSI SOI

#145
20170123152
2017-05-04

Integration of bonded optoelectronics, photonics waveguide and VLSI SOI

#146
20170123151
2017-05-04

Integration of bonded optoelectronics, photonics waveguide and VLSI SOI

#147
20170123150
2017-05-04

Integration of bonded optoelectronics, photonics waveguide and VLSI SOI

#148
20170108643
2017-04-20

Optical component with angled-facet waveguide

#149
20170102509
2017-04-13

Carrier having ablation-susceptible and ablation-insusceptible materials

#150
20170082798
2017-03-23

Optical component with angled-facet waveguide

#151
20160320563
2016-11-03

Multi-axis graded-index photonic coupling

#152
20160274319
2016-09-22

Integration of an unprocessed, direct-bandgap chip into a silicon photonic device

#153
20160274302
2016-09-22

Semiconductor device and method of manufacturing

#154
20160254407
2016-09-01

Microstructure enhanced absorption photosensitive devices

#155
20160246003
2016-08-25

Layer having a non-linear taper and method of fabrication

#156
20160153888
2016-06-02

Waveguide structure

#157
20160118772
2016-04-28

Tunable laser with high thermal wavelength tuning efficiency

#158
20160116672
2016-04-28

Electrical and optical through-silicon-via (TSV)

#159
20160070060
2016-03-10

Method for the formation of nano-scale on-chip optical waveguide structures

#160
20160062154
2016-03-03

Method for making electro-optical device

#161
20160047983
2016-02-18

Method for producing an integrated optical circuit

#162
20160047979
2016-02-18

Method for processing silicon-based wire optical waveguide

#163
20160018677
2016-01-21

Integrated LDMOS devices for silicon photonics

#164
20160018597
2016-01-21

Optical waveguide directional coupler and method for making same

#165
20160018595
2016-01-21

Optical device using echelle grating that provides total internal reflection of light

#166
20160011375
2016-01-14

Multi-axis graded-index photonic coupling

#167
20150362673
2015-12-17

Surface-normal coupler for silicon-on-insulator platforms

#168
20150338577
2015-11-26

Polarization rotator-splitter/combiner based on silicon rib-type waveguides

#169
20150316718
2015-11-05

Optical coupling system and method for fabricating the same

#170
20150285996
2015-10-08

Integrated photonic coupler

#171
20150277037
2015-10-01

OPTICAL WAVEGUIDE, PHOTOELECTRIC HYBRID BOARD AND METHOD OF MANUFACTURING OPTICAL WAVEGUIDE

#172
20150260915
2015-09-17

Method for manufacturing semiconductor optical waveguide device, and semiconductor optical waveguide device

#173
20150253500
2015-09-10

Method of fabrication polymer waveguide

#174
20150247971
2015-09-03

METHODS OF MANUFACTURE OF CONTINUOUS RESONANT TRAP STRUCTURES, SUPPORTING STRUCTURES THEREOF, AND DEVICES USING SAME

#175
20150226918
2015-08-13

Integrated dielectric waveguide and semiconductor layer and method therefor

#176
20150219989
2015-08-06

SUPERLENS AND METHOD FOR MAKING THE SAME

#177
20150185582
2015-07-02

MASK DESIGN AND METHOD OF FABRICATING A MODE CONVERTER OPTICAL SEMICONDUCTOR DEVICE

#178
20150160413
2015-06-11

Semiconductor device and method of manufacturing

#179
20150147038
2015-05-28

Optical waveguide devices

#180
20150125111
2015-05-07

Waveguide formation using CMOS fabrication techniques

#181
20150125110
2015-05-07

Passively Placed Vertical Optical Connector

#182
20150098676
2015-04-09

Integration of an unprocessed, direct-bandgap chip into a silicon photonic device

#183
20150086153
2015-03-26

Method of manufacturing an optical device having a stepwise or tapered light input/output part

#184
20150063753
2015-03-05

Enhanced coupling strength grating having a cover layer

#185
20150055912
2015-02-26

Coupling light from an external source to a waveguide using a multi-step converter

#186
20150036991
2015-02-05

Method of making a metal grating in a waveguide and device formed

#187
20150036975
2015-02-05

Device support structures from bulk substrates

#188
20150030298
2015-01-29

Photonic via waveguide for pixel arrays

#189
20150030283
2015-01-29

Concentrating Thin Film Absorber Device and Method of Manufacture

#190
20150016793
2015-01-15

Waveguide structure

#191
20150010270
2015-01-08

Arrangement of a substrate with at least one optical waveguide and with an optical coupling location and of an optoelectronic component, and method for manufacturing such an arrangement

#192
20140376854
2014-12-25

Device for non-linear signal conversion by four-wave mixing

#193
20140363122
2014-12-11

Optical interposer for waveguides

#194
20140348463
2014-11-27

OPTICAL DEVICE AND METHOD FOR MANUFACUTURING THE OPTICAL DEVICE

#195
20140348461
2014-11-27

Optical component with angled-facet waveguide

#196
20140345517
2014-11-27

Method for the formation of nano-scale on-chip optical waveguide structures

#197
20140341500
2014-11-20

Polarizing splitter and method for manufacturing same

#198
20140321823
2014-10-30

Multi-mode interference device

#199
20140321806
2014-10-30

Optical waveguide and method for manufacturing same

#200
20140321488
2014-10-30

Tunable laser with high thermal wavelength tuning efficiency

#201
20140305902
2014-10-16

Polarization rotator for thermally assisted magnetic recording

#202
20140302623
2014-10-09

Optical devices and methods of fabricating the same

#203
20140286616
2014-09-25

Layer having a non-linear taper and method of fabrication

#204
20140270635
2014-09-18

Multi-mode interference device

#205
20140254984
2014-09-11

Optical coupling system having an optical coupler and a light-transmissive external medium and also production and use of such a system

#206
20140177996
2014-06-26

Waveguide lens including planar waveguide and media grating

#207
20140177995
2014-06-26

Optical photonic circuit coupling

#208
20140113397
2014-04-24

Enhancing planarization uniformity in optical devices

#209
20140035104
2014-02-06

Germanium on insulator apparatus

#210
20140010248
2014-01-09

Tunable Bragg grating and a tunable laser diode using same

#211
20130279845
2013-10-24

Fabrication of planar light-wave circuits (PLCS) for optical I/O

#212
20130252359
2013-09-26

Communication methods, methods of forming an interconnect, signal interconnects, integrated circuit structures, circuits, and data apparatuses

#213
20130251305
2013-09-26

Flexible fiber to wafer interface

#214
20130251304
2013-09-26

Flexible fiber to wafer interface

#215
20130216177
2013-08-22

Method of fabricating a polymer waveguide

#216
20130195398
2013-08-01

Optical component having reduced dependency on etch depth

#217
20130195397
2013-08-01

Optical component having reduced dependency on etch depth

#218
20130163628
2013-06-27

Process for forming microstructure of nitride semiconductor, surface emitting laser using two-dimensional photonic crystal and production process thereof

#219
20130140723
2013-06-06

Method of fabricating an optical grating

#220
20130020668
2013-01-24

Optical device having light sensor with doped regions

#221
20130020664
2013-01-24

Application of electrical field power to light-transmitting medium

#222
20120321244
2012-12-20

Optical semiconductor device, and manufacturing method thereof

#223
20120189245
2012-07-26

Process for preparing an optical interposer for waveguides

#224
20120149178
2012-06-14

Process for making a slot-type optical waveguide on silicon

#225
20120142170
2012-06-07

METHOD OF FORMING PHOTONIC CRYSTALS

#226
20110133187
2011-06-09

PHOTO DETECTOR AND METHOD OF MANUFACTURING THE SAME

#227
20110128537
2011-06-02

Methods and systems for Raman and optical cross-interrogation in flow-through silicon membranes

#228
20110085760
2011-04-14

Optical devices and methods of fabricating the same

#229
20100272387
2010-10-28

Photonic crystal circuit comprising a guided mode adapter and optical system including said circuit coupled with an optical fiber

#230
20100178018
2010-07-15

Photonic via waveguide for pixel arrays

#231
20100129038
2010-05-27

Optical transmission apparatus

#232
20090097812
2009-04-16

Optical waveguide device and fabricating method thereof

#233
20090090902
2009-04-09

Optical devices using a penternary III-V material system

#234
20090075150
2009-03-19

Material for solid polyelectrolyte suitable for use in fuel cell

#235
20080253728
2008-10-16

Microphotonic waveguide including core/cladding interface layer

#236
20080253713
2008-10-16

Optical crossover in thin silicon

#237
20070297720
2007-12-27

Optical waveguide, optical device, and manufacturing method of the optical waveguide

#238
20070258674
2007-11-08

Polymer based distributive waveguide sensor for pressure and shear measurement

#239
20070230873
2007-10-04

Broadband optical via

#240
20070183731
2007-08-09

Optical waveguide device and fabricating method thereof

#241
20070165987
2007-07-19

Multi-beam light source, method for manufacturing the same, light scanning unit using the same, and image forming apparatus using the same

#242
20070153276
2007-07-05

Accurate positioning of components of an optical assembly

#243
20070140636
2007-06-21

Multichannel optical path changing device and its production method

#244
20070130996
2007-06-14

Method of reducing stress-induced mechanical problems in optical components

#245
20070086701
2007-04-19

Particle concentration method

#246
20070053643
2007-03-08

Ridge technique for fabricating an optical detector and an optical waveguide

#247
20070041691
2007-02-22

Constructing well structures for hybrid optical waveguides

#248
20060274995
2006-12-07

Temperature-insensitive polymeric optical AWG device and manufacturing method therefor

#249
20060266081
2006-11-30

Method of forming a phosphorus doped optical core using a PECVD process

#250
20060245041
2006-11-02

Optical element assembly and method of making the same

#251
20060239618
2006-10-26

Broadband optical via

#252
20060207294
2006-09-21

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In-wafer testing of integrated optical components in photonic integrated circuits (PICs)

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Passive alignment of VCSELs to waveguides in opto-electronic cards and printed circuit boards

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Method for writing a planar waveguide having gratings of different center wavelengths

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Method for writing a planar waveguide having gratings of different center wavelengths

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