METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER

Mirror

METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER

SELF-DEFORMABLE MIRRORS AND THE SUPPORT THEREOF

Fast steering, deformable mirror system and method for manufacturing the same

Self-powered microelectromechanical oscillator

Actuator motion control mechanism for a concave mirror

System for discretely actuated solar mirrors

Elastomeric device for tunable imaging

MICROSCOPE, MORE PARTICULARLY FLUORESCENCE MICROSCOPE, DICHROIC BEAM SPLITTER AND USE THEREOF

Method and device for packaging a substrate

Bonding technique to minimize distortion on a deformable mirror

Intentionally Buckled Columns and Columns with Displacement Controls that Form Optical Shapes

METHOD FOR FABRICATING THE HOLOGRAPHIC GRATING

High speed piezoelectric optical system with tunable focal length

Deformable mirror having force actuators and distributed stiffness

Parabolic reflector

ELECTROSTATIC DEFORMABLE MIRROR USING UNITARY MEMBRANE

METHOD FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES

Device for modulating light with multiple electrodes

Microlithographic imaging optical system including multiple mirrors

Method of constructing a thin film mirror

LIGHTWEIGHT LOW-COST SOLAR CONCENTRATOR

Membrane suspended optical elements, and associated methods

Method and apparatus for correcting optical aberrations using a deformable mirror

Imaging device and imaging method

Laser beam control system and method

Optical system and method

DEFORMABLE MIRROR DEVICE AND SIGNAL PROCESSING APPARATUS

ELECTROMECHANICAL DYNAMIC FORCE PROFILE ARTICULATING MECHANISM

Solid-state laser

Microvalve system

Membrane, especially for an optical device having a deformable membrane

LASER DISPLAYS

Deformable mirror with distributed stiffness, tool and method for producing such a mirror

MEMS hierarchically-dimensioned deformable mirror

Apparatus and method for reducing pixel operational voltage in MEMS-based optical displays

PERIODIC DIMPLE ARRAY

Lighting device with reflective electroactive polymer actuator

Optical component bowing device, optical device, optical scanning device, and image forming apparatus

Optical component bowing device, optical device, optical scanning device, and image forming apparatus

Method for improving the imaging properties of a projection objective, and such a projection objective

NOVEL METHOD OF DESIGNING AND PRODUCING REFLECTORS FOR RECEIVING/TRANSMITTING ENERGY AND REFLECTORS PRODUCED BY THIS METHOD

VARIABLE SHAPE MIRROR SYSTEM

Lens assembly apparatus and method

Deformable mirror

Optical device with membrane that can be deformed by electrostatic actuation

Optical device with means of actuating a compact deformable membrane

Device for correcting optical defects of a telescope mirror

Interference systems for microlithgraphic projection exposure systems

Membrane deformable optical device having improved actuation

Apparatus for fabricating and optically detecting biochip

Deforming method for deformable mirror, aberration compensation method for optical apparatus, aberration compensation method of ocular fundus observation apparatus, aberration compensation apparatus, optical apparatus and ocular fundus observation apparatus

Compact high-speed thin micromachined membrane deformable mirror

Imaging Device for Influencing Incident Light

Optical module, optical control method by optical module, optical switch, and optical switching method

DEFORMABLE MIRROR, MIRROR APPARATUS, AND EXPOSURE APPARATUS

Magnetic membrane mirror

Scalable size deformable pocket mirror with on-pocket bimorph actuator

Hydrostatic liquid-metal deformable optical elements

Optical element

Adaptive X-ray optics

Dynamic variable shape optical element

Adjustable table for shaping a mirror

Image Projection Display System

Optical package having deformable mirrors for focus compensation

Optical scanning and imaging applications using deformable mirrors

Correction and focusing device for a beam

Deformable mirror system and deformable mirror drive device

Method for optimizing and/or manufacturing eyeglass lenses

Vibration device, antidust device, camera, vibration device inspection method, method for manufacturing vibration device and vibration method

Moveable micro-electromechanical device

FOCUS CONTROL APPARATUS AND FOCUS CONTROL METHOD

POLYIMIDE DEFORMABLE MIRROR

Adaptive optics based system and method to generate and control multiple optical beams for trapping and manipulating small particles

Holographic projection method and holographic projection device

Periodic dimple array

Method and device for packaging a substrate

Deformable mirror

Imaging Apparatus for Influencing Impinging Light

Deformable mirror device and apparatus for observing retina of eye using the same

Method of Constructing a Thin Film Mirror

Thin nearly wireless adaptive optical device

Fabrication method for variable-shape mirror using thermo-compression bonding

Compliant Border for Thin Film Reflectors

Curvature correction device, optical scanning unit, and image forming apparatus

Micro-electro-mechanical systems and photonic interconnects employing the same

Electrostatic snap-down prevention for membrane deformable mirrors

DEFORMABLE MIRROR APPARATUS, OPTICAL PICKUP AND OPTICAL DRIVE APPARATUS

Method for improving the imaging properties of a projection objective, and such a projection objective

Manufacturing method for variable shape mirror

VARIABLE SHAPE MIRROR AND OPTICAL PICKUP DEVICE

Facet mirror comprising a multiplicity of mirror segments

OPTICAL APPARATUS

DEFORMABLE MIRROR

Deformable mirror apparatus

VARIFOCAL MIRROR AND CAMERA MODULE COMPRISING THE SAME

High speed piezoelectric optical system with tunable focal length

Low-cost continuous phase sheet deformable mirror

Wavefront aberration compensating apparatus and ophthalmologic unit having the same

Wavefront aberration compensating apparatus and opthalmologic unit having the same

Head-Up Display Comprising a Deformable Mirror

Actuating device having a flexible diaphragm controlled by electrowetting

Electromechanical dynamic force profile articulating mechanism

Optical scanning device and image forming apparatus using the same

Deformable mirror device and apparatus for observing retina of eye

Electromechanical dynamic force profile articulating mechanism

Adaptive mirror assembly

Stretched membrane device

Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit

Deformable mirror

Apparatus for moving curved-surface mirror, exposure apparatus and device manufacturing method

Reflective Electrowetting Lens

Variable shape mirror and optical pickup device having the same

Light reflecting device, light reflecting apparatus, wave front curvature modulator, and optical scanning type display device

CATADIOPTRIC PROJECTION OBJECTIVE WITH ADAPTIVE MIRROR AND PROJECTION EXPOSURE METHOD

Liquid mirror

Optical component bowing device, optical device, optical scanning device, and image forming apparatus

Beam director and control system for a high energy laser within a conformal window

Variable shape mirror

Heat dissipating layers in deformable mirrors

OPTICAL APPARATUS

Deformable mirrors

Enhanced resolution automatic data collection apparatus and method using an afocal optical element

Thin, nearly wireless adaptive optical device

Projection Device

Reflecting apparatus

MIRROR

Shape-variable optical element, optical device and image pickup apparatus

Method and system for correcting optical aberrations, including widefield imaging applications

Surface deformation actuation structure

Imaging system improving image resolution of the system with low resolution image sensor

Deformable mirror device

Edge constrained optical membrane deformable mirror and method of fabricating

Optical actuation system with deformable polymer film

COMPENSATING FOR A TELESCOPE'S OPTICAL ABERRATIONS USING A DEFORMABLE MIRROR

Mirror with local deformation by thickness variation of an electro-active material controlled by electrical effect

Variable focal length lens and lens array comprising discretely controlled micromirrors

Deformable mirror

Distance measuring device and laser beam projector therefor

Variable shape mirror and optical pickup device having the same

Deformable mirror

Method and device for modulating light with multiple electrodes

Method and apparatus for controlling a deformable mirror

Light valve

Optical unit, image capturing device, and reflective device

Deformable mirror device, deformable mirror plate

Microoptic reflecting component

Moveable micro-electromechanical device

Variable mirror

Optical focus system and zoom system including at least one deformable mirror therein

Deformable mirror, optical head, and optical recording and playback device

Variable-shape mirror and optical pickup apparatus therewith

Variable-shape mirror and optical pickup apparatus therewith

Method and apparatus for controlling curvatures of microlenses and micromirrors

Electrostatic actuator, liquid discharge head, liquid cartridge, imaging apparatus, micro pump, and optical device

Electromechanical dynamic force profile articulating mechanism

Variable-shape mirror, optical pickup therewith, and method for fabricating a variable-shape mirror

Cellular phone camera with three-dimensional imaging function

Miniature confocal optical device, system, and method

Deforming method for deformable mirror, aberration compensation method for optical apparatus, aberration compensation method of ocular fundus observation apparatus, aberration compensation apparatus, optical apparatus and ocular funds observation apparatus

Microlithography projection objective including deformable mirror with adjusting elements and systems and methods using the same

Image system and miniature deformable mirror thereof

Moveable micro-electromechanical device

Variable-shape mirror and optical pickup device therewith

Variable-shape mirror and optical pickup device therewith

High authority deformable optical system

Mirror assemblies incorporating variable index of refraction materials

MEMS devices with stiction bumps

Variable-shape mirror and optical pickup device therewith

Variable-shape mirror and optical pickup device therewith

Actuator for deformable optical component

Variably focusing mirror driven by electromagnetic force and operating method thereof

Micro-optical arrangement

Reflecting mirror and exposure apparatus using the same

Optical unit and exposure apparatus having the same

Off-axis variable focus and aberration control mirrors and method

Method of displaying, selecting and magnifying multiple micro-images, and display device and portable terminal using the same

Colorless tunable dispersion compensator employing a planar lightwave circuit and a deformable mirror

Adaptive-optics actuator arrays and methods for using such arrays

Variable mirror, optical apparatus and decentered optical system which include variable mirror, variable-optical characteristic optical element or combination thereof

Sub-pixel resolution and wavefront analyzer system

Varifocal mirror and camera module comprising the same

Polyimide deformable mirror

Method and apparatus for controlling a deformable mirror

Electrostatic control of a membrane for adaptive optics and the like

Optical modulator with a traveling surface relief pattern

Bi-directionally actuated thin membrane mirror

Polarization light modulator

Deformable mirror apparatus

Deformable mirror

Optical scanning apparatus having scanning line curvature correcting mechanism with sliding pressure point along a longitudinal direction of the optical element

Deformable-mirror holder

Method and device for packaging a substrate

Luminaire having a deformable reflector well

Deformable system comprising a parallelepiped-shaped part and an actuator

Deformable mirror

Adaptive mirror system

Integrated wavefront correction module with reduced translation

Integrated wavefront correction module

Deformable mirror method including bimorph flexures

Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit

Variable focal length lens and lens array comprising discretely controlled micromirrors

Mirror actuator position sensor systems and methods

Variable high speed shutter for spectroradiometry

Method for the targeted deformation of an optical element

Variable focusing lens comprising micromirrors with one degree of freedom rotation

Apparatus and method for controlling polarization of an optical signal

Beam focusing and scanning system using micromirror array lens

Spatial phase filter for light beams, system and corresponding method

Optical system and optical apparatus provided with the same

Systems and methods for modifying wavefronts by amplifying stroke

Mirror structure having piezoelectric element bonded to a mirror substrate

Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit

Active/adaptive actuator design of an adaptive optic mirror

Active/adaptive actuator design of an adaptive optic mirror

Mars optical modulators

Deformable mirror control device and device for observing retina of eye

Small and fast zoom system

Active mirror assemblies

Mirror assemblies incorporating variable index of refraction materials

Electromagnetically driven membrane mirror assembly

Optical apparatus

Monolithic microelectromechanical system mirror

Deformable mirror and information device having the deformable mirror

Adaptive-optics actuator arrays and methods for using such arrays

Variable-optical-property element

Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation

Elastomer spatial light modulators for extreme ultraviolet lithography

Piezoelectric film device, and driving method of the same

Transverse electrodisplacive actuator array

Rheologic mirror

Variable-shape mirror adjusting method, adjusting apparatus, and processing program for performing the adjusting method

Inflatable multi-function parabolic reflector apparatus and methods of manufacture

Electromechanical display panel incorporating a porous movable film

Optical system, and optical apparatus

Apparatus and method for controlling polarization of an optical signal

Mirror with adjustable magnification and with a plurality of displays and devices

Active/adaptive actuator design of an adaptive optic mirror

Integrated actuator meniscus mirror without reaction mass

Optical apparatus

Optical system and optical apparatus using the same

Variable optical-property element

Non-uniform light valve

Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use

Thin, nearly wireless adaptive optical device

Pressure sensitive deformable mirror

System and method for automatic vision correction in near-to-eye displays

System and method for automatic vision correction in near-to-eye displays

Two degree-of freedom reactionless pointing and scanning system

System and method for automatic vision correction in near-to-eye displays

Amplified deformable mirror

System and method for automatic vision correction in near-to-eye displays

Electro-magnetic actuation rotational adaptive mirror

Stack actuators array and deformable mirrors by utilizing wafer dicing, conductor refilling, and hybrid integrating and assembly techniques

Magnetoelastically actuated MEMS device and methods for its manufacture

Wide field of view augmented reality see through head mountable display with distance accommodation

Actuatable modular structures

Jet engine gas lasers

Monolithic adaptive optical/RF reflector

Adjustable mirror system

Deformable mirror for efficient correction of large aberrations

Pretensioned backplane for tensioned membrane

Light steering device with an array of oscillating reflective slats

Molded optical element with parabolic mirror and integral plane turning mirror

Dynamic asymmetric solar concentrator