174729 ⎘
Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
DEFORMABLE MIRROR ACTUATORS AND USES THEREOF
#2ON-BOARD RADIATION SENSING APPARATUS
#3Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt, and Piston Beamsteering
#4On-board radiation sensing apparatus
#5Sequential beam splitting in a radiation sensing apparatus
#6Optical switch and optical routing method and system
#7Lamp and display device
#8MICROACTUATOR APPARATUS AND SYSTEM
#9On-board radiation sensing apparatus
#10OPTICAL DEVICE
#11Sequential beam splitting in a radiation sensing apparatus
#12ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS
#13MEMS Device for Large Angle Beamsteering
#14On-board radiation sensing apparatus
#15Sequential beam splitting in a radiation sensing apparatus
#16MEMS chip structure
#17Semiconductor device
#18Post-processing techniques on mems foundry fabricated devices for large angle beamsteering
#19MICROMIRROR STRUCTURE AND MICROMIRROR ARRAY CHIP
#20Micro laser diode projector and electronics apparatus
#21Sequential beam splitting in a radiation sensing apparatus
#22On-board radiation sensing apparatus
#23Opto-electro-mechanical beam manipulation system
#24MEMS electrothermal actuator for large angle beamsteering
#25Optical structure with ridges arranged at the same and method for producing the same
#26Image generating unit, image projecting apparatus, and heat sink
#27Packaging for compact object-scanning modules
#28MEMS device for large angle beamsteering
#29High power adaptive mirror
#30Movable diffraction element and spectroscope
#31Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another
#32Eye-tracking system and method therefor
#33Optical structure with ridges arranged at the same and method for producing the same
#34Eye-tracking system and method therefor
#35Adaptive thermal micro lens
#36Digital exposure device
#37Arrangement for thermal actuation of a mirror in a microlithographic projection exposure apparatus
#38Environmentally responsive optical microstructured hybrid actuator assemblies and applications thereof
#39Optical switch and optical switch array
#40Method for projecting an image
#41MEMS actuator and MEMS actuated shutter mechanism
#42METHOD AND APPARATUS FOR IMPROVING SHOCK RESISTANCE OF MEMS STRUCTURES
#43Microelectromechanical system (MEMS) device, method of operating the same, and method of forming the same
#44MEMS switch with latch mechanism
#45Optical element, optical element array, and method of manufacturing optical element
#46Method and apparatus for providing high-fill-factor micromirror/micromirror arrays with surface mounting capability
#47Thermally activated micromirror and fabrication method
#48MEMS-BASED FTIR SPECTROMETER
#49Micromechanical component, device for beam deflection of monochromatic light, and spectrometer
#50Optical switch and optical switch device having the same
#51MEMS device with integrated via and spacer
#52Optical device with means of actuating a compact deformable membrane
#53FRUSTRATED INTERNAL REFLECTION UNCOOLED INFRARED CAMERA
#54Microactuator having multiple degrees of freedom
#55Hinge memory mitigation system and method
#56Solid tunable micro optical device and method
#57Swing member device, and optical deflector and image-forming apparatus employing the swing member device
#58Contoured thermomechanical actuators and pulsing for enhanced dynamic performance
#59Micromechanical device with tilted electrodes
#60Discretely controlled micromirror device having multiple motions
#61Micromirror systems with concealed multi-piece hinge structures
#62Spot array generation using a MEMS light modulator
#63TEMPERATURE ADAPTIVE OPTICAL MODULATOR USING HEATER
#64Micromirror system with electrothermal actuator mechanism
#65Variable focal length lens and lens array comprising discretely controlled micromirrors
#66Bimorph element, bimorph switch, mirror element, and method for manufacturing these
#67Microoptic reflecting component
#68Oscillating device, optical deflector and optical instrument using the same
#69Laser beam scanner
#70Thermo-mechanically actuated reflective structure
#71Single-crystal-silicon 3D micromirror
#72Structure and method for reducing thermal stresses on a torsional hinged device
#73Micro-mirror and a method for fabricating the same
#74Device and method for manipulation of thermal response in a modulator
#75Variable focal length lens and lens array comprising discretely controlled micromirrors
#76Method and apparatus for scanning a beam of light
#77Variable focal length lens comprising micromirrors with two degrees of freedom rotation
#78High performance MEMS scanner
#79Method and apparatus for making a MEMS scanner
#80Vertical displacement device
#81Method of making a single-crystal-silicon 3D micromirror
#82AlOatomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechanical devices