174918 ⎘
Optical systems or apparatus not provided for by any of the groups -; Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application for alignment or positioning purposes
Systems and methods for alignment of wavelength beam combining resonators
#2STANDARD-LIGHT GENERATOR FOR STRAIGHTNESS MEASUREMENT, METHOD OF PROVIDING A STANDARD FOR STRAIGHTNESS MEASUREMENT, AND STRAIGHTNESS MEASUREMENT APPARATUS
#3Systems and methods for alignment of wavelength beam combining resonators
#4Method and device for compensating beam angle variations of a beam bundle of laser beams generated by a diffractive optical element
#5Display device and method of manufacturing the same
#6Index grating of optical encoder
#7Ultralight very large aperture space telescope and methods using mode lenses and shims
#8Three dimensional depth mapping using dynamic structured light
#9Method and system for tunable gradient patterning using a shadow mask
#10Three dimensional depth mapping using dynamic structured light
#11Systems and methods for alignment of wavelength beam combining resonators
#12DIFFRACTIVE ILLUMINATION DEVICE WITH INCREASED DIFFRACTION ANGLE
#13Method and system for tunable gradient patterning using a shadow mask
#14Laser aiming system recycling stray light
#15Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method
#16Optical projector with off-axis diffractive element
#17Method and system for tunable gradient patterning using a shadow mask
#18Metrology method, target and substrate
#19Diffraction based overlay scatterometry
#20Three dimensional depth mapping using dynamic structured light
#21Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus
#22Optical structure
#23Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same
#24Device for machining material by means of laser radiation
#25Alignment method
#26Position detection apparatus, force sensor, and apparatus
#27High accuracy measurement system for focusing and leveling
#28Three dimensional depth mapping using dynamic structured light
#29Symmetric target design in scatterometry overlay metrology
#30Optical proxy for sensing and pointing of light sources
#31Ultra-miniature wide-angle lensless CMOS visual edge localizer
#32Planar beam forming and steering optical phased array chip and method of using same
#33Symmetric target design in scatterometry overlay metrology
#34Two-dimensional encoder system and method
#35Rules for reducing the sensitivity of fringe projection autofocus to air temperature changes
#36Diffractive optical element, distance measuring apparatus and distance measuring method
#37Two dimensional encoder system and method
#38Sub-wavelength grating integrated VCSEL
#39Sub-wavelength grating integrated VCSEL
#40Slit aperture for diffraction range finding system
#41DEVICE FOR SELECTION OF LIGHT IN A REFRACTION ARRANGEMENT
#42Optical element and system using the same
#43Light guide and optical sensing module input device and method for making same
#44ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#45Multi-Segmented Aiming Diffractive Optical Elements
#46High precision code plates and geophones
#47APPARATUS FOR POLARIZATION-SPECIFIC EXAMINATION, OPTICAL IMAGING SYSTEM, AND CALIBRATION METHOD
#48Phase shift grating for phase shift differential push-pull tracking
#49Optical element and system using the same
#50Optical element and system using the same
#51Sub-wavelength grating integrated VCSEL
#52Ultra broadband mirror using subwavelength grating
#53Retro-reflecting lens for external cavity optics
#54Light diffraction method and diffraction device, diffraction grating used for them, and position encoder device
#55Method for designing an overlay mark
#56Optical system having element for correcting aberration of mirror and optical pickup apparatus employing the same
#57Hologram laser unit and optical pickup apparatus
#58Diffractive optical system
#59Apparatus for polarization-specific examination, optical imaging system, and calibration method
#60Diffractive optical element, manufacturing method thereof, optical pickup apparatus and optical disk drive apparatus
#61Display alignment using diffraction