EFFICIENT, DYNAMIC, HIGH CONTRAST LENSING WITH APPLICATIONS TO IMAGING, ILLUMINATION AND PROJECTION

Efficient, dynamic, high contrast lensing with applications to imaging, illumination and projection

Efficient, dynamic, high contrast lensing with applications to imaging, illumination and projection

Measurement of a change in a geometrical characteristic and/or position of a workpiece

High speed random access variable focusing and steering of a patterned line

Efficient, dynamic, high contrast lensing with applications to imaging, illumination and projection

Method and device for measuring wavefront using diffraction grating, and exposure method and device

System and method for interferometric based spectrometry and compact spectrometer using same

Synthesis of superpostion shape images by light interacting with superposed layers of lenslet gratings

Efficient, dynamic, high contrast lensing with applications to imaging, illumination and projection

Phase object visualization apparatus and phase object visualization method

Synthesis of superposition shape images by light interacting with layers of lenslets

Radiation source and lithographic apparatus

Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction

Beam steering device

Single shot full-field reflection phase microscopy

Optical device and exposure apparatus including the same

INSPECTION DEVICE FOR DEFECT INSPECTION

Observation device

Lighting unit and method for the generation of an irregular pattern

Lens system and scanner device equipped therewith

Figuring of optical device for compensation of load-induced distortion

Phase-diversity wavefront sensor

Methods and systems for reducing depth of field of hybrid imaging systems

Flexible nanophotonic meta-optics