TPU HIGH AND LOW TEMPERATURE FILM WITH OPTICAL COLOR EFFECT AND PREPARATION METHOD THEREOF

BLAZED GRATING BASED REFLECTIVE SPECTRAL PURITY FILTER FOR EUV IMAGING SYSTEMS

EUV COLLECTOR

DIFFRACTION GRATING FOR MEASUREMENTS IN EUV-EXPOSURE APPARATUSES

Aligned and stacked high-aspect ratio metallized structures

TRANSMISSIVE DIFFRACTION GRATING

EUV COLLECTOR

ULTRAVIOLET-C RADIATION-PROTECTIVE FILMS AND METHODS OF MAKING THE SAME

CURVED RETICLE BY MECHANICAL AND PHASE BENDING ALONG ORTHOGONAL AXES

System and method for fabricating photonic device elements

OPTICAL ELEMENT ARRAY STRUCTURE FOR BIRD COLLISION PREVENTION AND MANUFACTURING METHOD THEREOF

Optical diffraction component

Wavefront sensor and associated metrology apparatus

SWITCHABLE PHASE STEPPING

Structured grating component, imaging system and manufacturing method

SYSTEM AND METHOD FOR ENHANCED STEREOLITHOGRAPHY 3D PRINTING

Compact wideband VUV spectrometer

METHOD AND APPARATUS FOR IMMERSION GRATING LITHOGRAPHY

Diffractive optical element and method of manufacturing the same

Diffractive optical element, optical apparatus using the same, and method for manufacturing diffractive optical element

Movable diffraction grating, external-resonator laser module, and manufacturing method for movable diffraction grating

Method for producing a microstructure component, microstructure component and x-ray device

Source grating for X-ray imaging

System and method for enhanced treating of matter with engineered angular momentum UV photons

Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane

Optical grating and optical assembly for same

EUV Collector

X-ray imaging apparatus

EUV collector for use in an EUV projection exposure apparatus

Radiation beam apparatus

Beam splitting apparatus

Omnidirectional scattering- and bidirectional phase-sensitivity with single shot grating interferometry

Reflector

Dual energy differential phase contrast imaging

Grating and radiation imaging device

Diffractive optical element and method of manufacturing the same

Grating, method for manufacturing grating, and method for recycling grating

Mask inspection apparatus and mask inspection method

Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane

Lithographic apparatus, spectral purity filter and device manufacturing method

Method for producing a bird protection device and bird protection device

X-ray interferometer

Curved grating structure manufacturing method, curved grating structure, grating unit, and x-ray imaging device

Metal grating for X-rays, production method for metal grating for X-rays, metal grating unit for X-rays, and X-ray imaging device

Correction in slit-scanning phase contrast imaging

Lithography pupil shaping optical system and method for generating off-axis illumination mode

High aspect ratio dense pattern-programmable nanostructures utilizing metal assisted chemical etching

Position measurement system, grating for a position measurement system and method

X-ray computed tomography apparatus, medical image processing apparatus and medical image processing method

Interferometric dynamic-grating imaging method, diffraction grating and imaging apparatus

Reflective diffraction grating and fabrication method

EUV collector

X-ray talbot interferometer and X-ray imaging system including talbot interferometer

System and method for phase-contrast X-ray imaging

Sub-wavelength extreme ultraviolet metal transmission grating and manufacturing method thereof

Phase grating for mask inspection system

OPTICAL GRATING INCLUDING A SMOOTHING LAYER

Polarized light splitting element

Method for producing a reflective optical component for an EUV projection exposure apparatus and component of this type

X-RAY INTERFEROMETER

X-ray imaging apparatus

Non-uniform grating

Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device

Zone plate

Microstructure manufacturing method and microstructure

EUV projection lens and optic system having the same

Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system

Grating with a large aspect ratio, in particular to be used as an X-ray optical grating in a CT system, produced by a lithography method

Ultra-high density diffraction grating

DIFFRACTIVE OPTICAL ELEMENT, METHOD FOR MANUFACTURING DIFFRACTIVE OPTICAL ELEMENT, AND LASER BEAM MACHINING METHOD

Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device

Lithographic apparatus

Template having alignment marks formed of contrast material

Diffractive optical device, and aligner comprising that device

LINEWIDTH-NARROWED EXCIMER LASER CAVITY

Exposure Method and Apparatus, and Electronic Device Manufacturing Method

Optical system of an illumination device of a projection exposure apparatus

Method of Forming a Diffractive Optical Element

Methods for measuring a wavefront of an optical system

Optical element for use in lithography apparatus and method of conditioning radiation beam

Speckle reduction method and system for EUV interferometry

Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus

Extended-lifetime elements for excimer lasers

Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus

Laser gas replenishment method

Two-dimensional diffraction grating with alternate multilayered stacks and its process of manufacture, and spectroscopic devices including these gratings

Diffuser plate and method of making same

Light diffraction optical method, with corresponding optical system and device

Grating element for filtering wavelengths < 100 nm

Diffractive optical element

Grating for EUV lithographic system aberration measurement

Method for producing an optical element from a quartz substrate

Hybrid optical component for x ray applications and method associated therewith

Differactive micro-structure color wavelength division device

Diffractive optical element and method of making same

EUV light source with spectral purity filter and power recycling