174130 ⎘
Light guides; Coupling light guides; Optical coupling means having switching means; Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
DUAL LAYER OPTICAL SWITCH
#2PACKAGING FOR COMPACT OBJECT-SCANNING MODULES
#3OPTICAL DEVICE WITH CLOSED LOOP FEEDBACK
#4FIBER ASSEMBLY FOR COUPLING WITH PHOTONIC INTEGRATED CIRCUIT WITH LOW ALIGNMENT ERROR
#5Large-Scale, Fast Optical Circuit Switching System
#6TERAHERTZ WAVEGUIDE SWITCHES
#7DISPERSION ENGINEERED EVANESCENT MEMS OPTICAL MODULATORS
#8TUNABLE SILICON NITRIDE WAVEGUIDE STRUCTURE
#9MULTICAST SWITCH ARRAY AND BEAM STEERING DEVICE USING SAME
#10MICROMECHANICALLY-TUNABLE POLARIZATION ROTATOR FOR PHOTONIC INTEGRATED CIRCUITS
#11ROTATIONAL AND TRANSLATIONAL MICROPOSITIONERS USING DEFORMABLE MICROELECTROMECHANICAL SYSTEMS
#12High voltage monitoring for optical switching applications
#13Method and apparatus for controlling power delivered to an SMA actuator
#14System and method of continuous, vibration-less, and bi-directional MEMS mirror motion via periodic driving force for rapid data acquisition
#15Adiabatic optical switch using a waveguide on a MEMS cantilever
#16Shape memory alloy actuator
#17Glass fiber hole plates for 2D fiber collimators and methods for alignment and fabrication for optical switching applications
#18Monitoring of MEMS mirror properties
#19Methods and systems relating to optical networks
#20Multi-axis MEMS mirror parking
#21Monitoring of MEMS mirror properties
#22Antireflective surface structures for active and passive optical fiber
#23Monitoring of MEMS mirror properties
#24MEMS element and optical apparatus using the same
#25Methods and systems relating to optical networks
#26Methods and systems relating to optical networks
#27Methods and systems relating to optical networks
#28Light module
#29Capacitive position sensing for capacitive drive MEMS devices
#30Optical cross connects including mirror monitoring
#31Hybrid optical transmitter and/or receiver structure
#32Optical switch and optical switching system
#33Foveal patterned optical switches for MEMS LiDAR beam steering unit
#34Antireflective surface structures for active and passive optical fiber
#35Partitioned optical switch
#36Large-capacity optical fiber switch device and the program-controlled exchange method
#37Electrothermally actuated microelectromechanical and/or nanoelectromechanical structure providing increased efficiency
#38Tunable microring resonator
#39Optically-secured adaptive software-defined optical sensor network architecture
#40Reconfigurable optical space switch
#41Transmitter/receiver with orbital angular momentum based optical encryption
#42MEMS devices for smart lighting applications
#43Large scale optical switch using asymmetric 1X2 elements
#44Hybrid optical transmitter and/or receiver structure
#45Deformable mirror and capacitive actuator array controller
#46Large scale optical switch using asymmetric 1x2 elements
#47Large scale optical switch using asymmetric 1×2 elements
#48Methods and systems relating to optical networks
#49Silicon-photonics-based optical switch
#50Optical interface with traffic protection using multi-optical path photonic switch
#51Linearly deployed actuators
#52Optical circuit switch with integral circulators
#53Hybrid optical transmitter and/or receiver structure
#54Optical input/output device
#55Reconfigurable diffractive optical switch
#56Optical switching device
#57Device and method for micro-electro-mechanical-system photonic switch
#58Method and apparatus for beam control with optical MEMS beam waveguide
#59Integration of a MEMS beam with optical waveguide and deflection in two dimensions
#60Optical circuit switch with integral circulators
#61Electrostatically steerable actuator
#62Integrated apertured micromirror and applications thereof
#63Sealing component, optical device sealing structure, method for producing sealing component, and method for producing optical device sealing structure
#64Via structure and method thereof
#65Optical switch and optical switch array
#66Display device
#67Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
#68Photonic MEMS and structures
#69Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#70Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#71Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#72Linearly deployed actuators
#73Via structure and method thereof
#74Micromirror arrays having self aligned features
#75Optical fiber switch with movable lens
#76Optical routing device comprising hollow waveguides and MEMS reflective elements
#77Controller and driver features for bi-stable display
#78MEMS device and a MEMS device array
#79Optical switch controller and movable body controller
#80Micro movable device and optical switching apparatus
#81Fiber based MEMS
#82Low-cost multimode optical fiber switch
#83Photonic MEMS and structures
#84Light deflecting method and apparatus efficiently using a floating mirror
#85Optical device with non-equally spaced output ports
#86Fiber based MEMS
#87Controller and driver features for bi-stable display
#88Method of manufacturing micro-optic device
#89Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained
#90Beam position sensor for optical switch modules
#91Optical switch with co-axial alignment beam
#92Optical switch module
#93APPARATUS FOR DRIVING MICROMECHANICAL DEVICES
#94Electrostatic actuator with interdigitated electrode structure
#95Light deflecting method and apparatus efficiently using a floating mirror
#96Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#97Light deflecting method and apparatus efficiently using a floating mirror
#98Optical switch controller and movable body controller
#99Beam switch structures and methods
#100MEMS based retroreflector
#101Optical switch
#102Magnetically actuated microelectromechanical systems actuator
#103Light deflecting method and apparatus efficiently using a floating mirror
#104Systems and methods of controlling micro-electromechanical devices
#105SWITCH USING MICRO ELECTRO MECHANICAL SYSTEM
#106Process for fabricating a micro-electro-mechanical system with movable components
#107Optical deflection array
#108Switch
#109Spatial optical modulator with passivation layer
#110MEMS module package
#111Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
#112Planar array optical switch and method
#113Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein
#114Support structure for MEMS device and methods therefor
#115Optical switch
#116Waveguide shuttle MEMS variable optical attenuator
#117Photonic MEMS and structures
#118Display device having a movable structure for modulating light and method thereof
#119Optical switch using frequency-based addressing in a microelectromechanical systems array
#120Transparent thin films
#121Electrostatically driven latchable actuator system
#122Photonic MEMS and structures
#123Monolithic waveguide/MEMS switch
#124Micro movable element and optical switching device
#125Articulated MEMs structures
#126MEMS device with failure diagnosis function
#127Optical switch and optical switch array
#128Optical routing device comprising hollow waveguides and mems reflective elements
#129Sunken electrode configuration for MEMs micromirror
#130Electrical x-talk shield for MEMs micromirrors
#131Light deflecting method and apparatus efficiently using a floating mirror
#132Light deflecting method and apparatus efficiently using a floating mirror
#133Micromechanical optical switch
#134Micromechanical and related lidar apparatus and method, and fast light-routing components
#135Micro-mirror with rotor structure
#136Microfabrication process for control of waveguide gap size
#137Mirror, mirror unit, and optical switch
#138Optical switches with uniaxial mirrors
#139Magnetically actuated microelectromechanical systems actuator
#140Buckling actuator
#141Microelectrical mechanical structure (MEMS) optical modulator and optical display system
#142Monolithic MEMS device having a balanced cantilever plate
#143Method and apparatus for assembling an array of micro-devices
#144Optical cross-connect system
#145Apparatus for free-space switching between planar lightwave circuits
#146Beam switch structures and methods
#147Photonic MEMS and structures
#148Dual comb electrode structure with spacing for increasing a driving angle of a microscanner, and the microscanner adopting the same
#149Planar array optical switch and method
#150Electrode configuration for piano MEMs micromirror
#151Fiber based MEMS
#152Optical shuttle system and method used in an optical switch
#153Photonic MEMS and structures
#154MEMS optical switch with self-assembly structure
#155Method and system for processing photonic systems using semiconductor devices
#156Hitless switch for high-density integrated optics
#157System and method for providing fast, low voltage integrated optical elements
#158Systems and methods for overcoming stiction
#159Porous silicon filter for wavelength multiplexing or de-multiplexing
#160Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device
#161Self-aligned microlens array for transmissive MEMS image arrray
#162Optical multilayer structure, optical switching device, and image display
#163Optical multilayer structure, optical switching device, and image display
#164Electrostatic actuator
#165Microactuator device and optical switching system using the same
#166Optical device
#167Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same
#168MEMS-based actuator devices using electrets
#169Optical switch
#170Single-level no-crossing microelectromechanical hitless switch for high density integrated optics
#171Interlaced array of piano MEMs micromirrors
#172Light deflecting method and apparatus efficiently using a floating mirror
#173Microelectrical mechanical structure (MEMS) optical modulator and optical display system
#174Light deflecting method and apparatus efficiently using a floating mirror
#175Microengineered optical scanner
#176Optical device
#177Single-level no-crossing microelectromechanical hitless switch for high density integrated optics
#178Optical switch with a micro-mirror and method for production thereof
#179Comb-shaped actuator with off centered electrodes
#180Actuator structure and optical device
#181Optical switch and fabrication method thereof
#182Optical cross connect switch with axial alignment beam
#183Optical device with a mobile optical element capable of interacting with an optical guide structure
#184Vertical displacement device
#185Microelectromechanical system comb actuator and manufacturing method thereof
#186Photonic switch
#187Optical device
#188Multi-channel optical attenuator and manufacturing method thereof
#189Method of manufacturing multi-channel optical attenuator
#190Optical assembly with variable optical attenuator
#191Two-dimensional stepwise-controlled microstructure
#192Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
#193Micro actuator and optical switch using the actuator
#194Insulating layer having decreased dielectric constant and increased hardness
#195Two-step electrode for MEMs micromirrors
#196Sunken electrode configuration for MEMs Micromirror
#197Multi-channel variable optical attenuator and fabrication method thereof
#198Miniature movable device
#199Miniature movable device
#200Micromechanical optical switch
#201Micro-optic device and method of manufacturing same
#202Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
#203Multi-wavelength cross-connect optical switch
#204Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor
#205Electrostatically operated micro-optical devices and method for manufacturing thereof
#206Optical switch controller and movable body controller
#207Electrical x-talk shield for MEMS micromirrors
#208Thermal actuator and an optical waveguide switch including the same
#209Microelectromechanical optical switch using bendable fibers to direct light signals
#210Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same
#211Thermal actuator and an optical waveguide switch including the same
#212Beam-steering optical switching apparatus
#213Micro-electrical-mechanical system (MEMS) device having a plurality of pairs of reflective element actuators located on opposing sides of a reflective element and a method of manufacture therefor
#214Movable mirror device, dispersion compensator, gain equalizer, and optical ADM apparatus
#215Optical switch
#216Micromechanical optical switch
#217Integrated continuous spectrum spatial light modulator
#218Light-beam switching/adjusting apparatus and manufacturing method thereof
#219Systems and methods for routing optical beams along optical paths using steerable mirrors
#220Beam direction module and optical switch using the same
#221Method and apparatus for assembling an array of micro-devices
#222Microelectrical mechanical structure (MEMS) optical modulator and optical display system
#223Damping mechanism for micro-electro-mechanical systems (MEMS) structures, including tilting mirror devices used in optical components
#224MEMS mirror arrays having multiple mirror units