Patents-Review.com
ClassID:

176003 ⎘

G03B27/42 - CPC Classification

Classification description:

Photographic printing apparatus; Projection printing apparatus, e.g. enlarger, copying camera for automatic sequential copying of the same original

Sub-classes:
Recent Application in this class:
#1
20240337613
2024-10-10

Reticle Thermal Expansion Calibration Method Capable of Improving Sub-Recipe

 #2
20230127070
2023-04-27

Lithographic apparatus and device manufacturing method

 #3
20230030500
2023-02-02

Reticle thermal expansion calibration method capable of improving sub-recipe

 #4
20210173294
2021-06-10

Lithographic apparatus and device manufacturing method

 #5
20190390270
2019-12-26

Biological analysis systems, devices, and methods

 #6
20190137886
2019-05-09

EXPOSURE METHOD AND APPARATUS, AND METHOD FOR FABRICATING DEVICE WITH LIGHT AMOUNT DISTRIBUTION HAVING LIGHT LARGER IN FOUR AREAS

 #7
20190094708
2019-03-28

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #8
20190079402
2019-03-14

Exposure apparatus, surface position control method, exposure method, and semiconductor device manufacturing method

 #9
20190064678
2019-02-28

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

 #10
20180173107
2018-06-21

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE

 #11
20180107107
2018-04-19

Support apparatus, lithographic apparatus and device manufacturing method

 #12
20160327874
2016-11-10

Exposure apparatus and device fabrication method

 #13
20160246181
2016-08-25

Exposure method, exposure apparatus, and method for producing device

 #14
20160238949
2016-08-18

Exposure method, exposure apparatus, and method for producing device

 #15
20160221262
2016-08-04

Systems and methods for fabricating three-dimensional objects

 #16
20160130651
2016-05-12

Biological analysis systems, devices, and methods

 #17
20160124316
2016-05-05

Optical projection array exposure system

 #18
20160091801
2016-03-31

Exposure apparatus and device manufacturing method

 #19
20150242563
2015-08-27

Enhanced stitching by overlap dose and feature reduction

 #20
20150234293
2015-08-20

Exposure apparatus and device manufacturing method

 #21
20150234292
2015-08-20

Exposure apparatus and device fabrication method

 #22
20140248554
2014-09-04

Sub-resolution assist devices and methods

 #23
20140186754
2014-07-03

Method for manufacturing reflective mask and apparatus for manufacturing reflective mask

 #24
20140103581
2014-04-17

Systems and methods for fabricating three-dimensional objects

 #25
20140092374
2014-04-03

Exposure apparatus, exposure method, and method of manufacturing device

 #26
20140022526
2014-01-23

Lithographic apparatus, and patterning device for use in a lithographic process

 #27
20130335717
2013-12-19

Immersion exposure apparatus and device manufacturing method with measuring device to measure specific resistance of liquid

 #28
20130321786
2013-12-05

Optical projection array exposure system

 #29
20130308114
2013-11-21

Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator

 #30
20130308113
2013-11-21

Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction

 #31
20130293855
2013-11-07

Immersion exposure apparatus and method that detects liquid adhered to rear surface of substrate

 #32
20130286374
2013-10-31

Exposure apparatus

 #33
20130250258
2013-09-26

Exposure method, exposure apparatus, and method for producing device

 #34
20130208251
2013-08-15

Large area nanopatterning method and apparatus

 #35
20130182233
2013-07-18

Exposure apparatus and device fabrication method

 #36
20130094006
2013-04-18

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #37
20130077075
2013-03-28

Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film

 #38
20120282554
2012-11-08

LARGE AREA NANOPATTERNING METHOD AND APPARATUS

 #39
20120274916
2012-11-01

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #40
20120236285
2012-09-20

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

 #41
20120200838
2012-08-09

Method for a lithographic apparatus

 #42
20120170010
2012-07-05

Exposure apparatus and method of manufacturing device

 #43
20120162629
2012-06-28

Large area nanopatterning method and apparatus

 #44
20120162622
2012-06-28

FIELD EXTENSION TO REDUCE NON-YIELDING EXPOSURES OF WAFER

 #45
20120129083
2012-05-24

Method for manufacturing reflective mask and apparatus for manufacturing reflective mask

 #46
20120108072
2012-05-03

SHOWERHEAD CONFIGURATIONS FOR PLASMA REACTORS

 #47
20120064439
2012-03-15

Optical compensation devices, systems, and methods

 #48
20120040292
2012-02-16

TRANSFER METHOD, TRANSFER APPARATUS, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING ELEMENT

 #49
20120026478
2012-02-02

System and method for manufacturing three dimensional integrated circuits

 #50
20110273687
2011-11-10

Lithographic apparatus and device manufacturing method

 #51
20110273686
2011-11-10

Exposure apparatus, exposure method, and method of manufacturing device

 #52
20110273685
2011-11-10

PRODUCTION OF AN ALIGNMENT MARK

 #53
20110273678
2011-11-10

Lithographic apparatus and device manufacturing method

 #54
20110261345
2011-10-27

Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table after exposure

 #55
20110261331
2011-10-27

Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table on way from exposure position to unload position

 #56
20110261330
2011-10-27

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #57
20110242512
2011-10-06

Lithographic apparatus and device manufacturing method

 #58
20110235009
2011-09-29

Sub-resolution assist devices and methods

 #59
20110228240
2011-09-22

Stage apparatus and exposure apparatus

 #60
20110212394
2011-09-01

Exposure apparatus, measurement method, stabilization method, and device fabrication method

 #61
20110189614
2011-08-04

Lithographic apparatus and device manufacturing method with double exposure overlay control

 #62
20110164239
2011-07-07

Apparatus and method for recovering liquid droplets in immersion lithography

 #63
20110102755
2011-05-05

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND EXPOSURE APPARATUS

 #64
20110102754
2011-05-05

Exposure apparatus and device manufacturing method

 #65
20110081617
2011-04-07

INTEGRATED LITHOGRAPHY EQUIPMENT AND LITHOGRAPHY PROCESS THEREOF

 #66
20110063593
2011-03-17

Management apparatus, exposure method, and method of manufacturing device

 #67
20110058150
2011-03-10

Molecular transfer lithography apparatus and method for transferring patterned materials to a substrate

 #68
20110053060
2011-03-03

Exposure device, exposure method, and method for manufacturing semiconductor device

 #69
20110033790
2011-02-10

Detection apparatus, exposure apparatus, and device fabrication method

 #70
20110032499
2011-02-10

Generating method, creating method, exposure method, and storage medium

 #71
20110026005
2011-02-03

Exposure apparatus, exposure method, and method for producing device

 #72
20110023740
2011-02-03

Offset printing process using light controlled wettability

 #73
20110014573
2011-01-20

SYSTEM FOR ENGRAVING FLEXOGRAPHIC PLATES

 #74
20110013163
2011-01-20

Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements

 #75
20110013160
2011-01-20

Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice

 #76
20100323283
2010-12-23

Optical compensation devices, systems, and methods

 #77
20100321655
2010-12-23

EXPOSURE SYSTEM, CONTROL APPARATUS OF EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

 #78
20100311242
2010-12-09

Methods for fabricating semiconductor devices

 #79
20100309448
2010-12-09

Wavefront aberration measurement apparatus, exposure apparatus, and method of manufacturing device

 #80
20100266968
2010-10-21

EXPOSURE APPARATUS, DEVICE MANUFACTURING SYSTEM, AND METHOD OF MANUFACTURING DEVICE

 #81
20100266960
2010-10-21

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND EXPOSURE DEVICE

 #82
20100261118
2010-10-14

Intensity selective exposure method and apparatus

 #83
20100258758
2010-10-14

HDD pattern apparatus using laser, E-beam, or focused ion beam

 #84
20100245792
2010-09-30

Alignment Measurement Arrangement, Alignment Measurement Method, Device Manufacturing Method and Lithographic Apparatus

 #85
20100225895
2010-09-09

Illumination optical system, exposure apparatus, and exposure method

 #86
20100214550
2010-08-26

Alignment system and alignment marks for use therewith

 #87
20100214545
2010-08-26

Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences

 #88
20100208222
2010-08-19

Exposure apparatus and method to measure beam position and assign address using the same

 #89
20100173502
2010-07-08

LOW k1 HOLE PRINTING USING TWO INTERSECTING FEATURES

 #90
20100170951
2010-07-08

Image transformation device

 #91
20100165314
2010-07-01

MEMS device with controlled gas space chemistry

 #92
20100165312
2010-07-01

Method of determining a characteristic

 #93
20100165310
2010-07-01

EUV Mask Inspection

 #94
20100161099
2010-06-24

Optimization method and a lithographic cell

 #95
20100159399
2010-06-24

Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless

 #96
20100157263
2010-06-24

Lithographic apparatus, and patterning device for use in a lithographic process

 #97
20100149535
2010-06-17

Method of measuring numerical aperture of exposure machine, control wafer, photomask, and method of monitoring numerical aperture of exposure machine

 #98
20100149511
2010-06-17

Illumination optical system, exposure apparatus, and exposure method

 #99
20100149502
2010-06-17

Method of detecting reticle errors

 #100
20100147693
2010-06-17

Device and method for manufacturing a particulate filter with regularly spaced micropores

 #101
20100141916
2010-06-10

Lithographic apparatus and device manufacturing method with double exposure overlay control

 #102
20100129742
2010-05-27

Method for a lithographic apparatus

 #103
20100123885
2010-05-20

Large area nanopatterning method and apparatus

 #104
20100118285
2010-05-13

EXPOSURE APPARATUS, SUBSTRATE PROCESSING APPARATUS, LITHOGRAPHY SYSTEM, AND DEVICE MANUFACTURING METHOD

 #105
20100110400
2010-05-06

SCANNING EXPOSURE APPARATUS, CONTROL METHOD THEREFOR, AND DEVICE MANUFACTURING METHOD

 #106
20100110399
2010-05-06

Reverse flow gas gauge proximity sensor

 #107
20100104962
2010-04-29

PATTERNING METHOD, EXPOSURE SYSTEM, COMPUTER READABLE STORAGE MEDIUM, AND METHOD OF MANUFACTURING DEVICE

 #108
20100104960
2010-04-29

Exposure apparatus

 #109
20100097589
2010-04-22

LITHOGRAPHIC APPARATUS COMPRISING AN ASSEMBLY OF A LINE CARRIER WITH LOW-FRICTION CABLES, HOSES OR THE LIKE AND SUCH AN ASSEMBLY IN GENERAL

 #110
20100096512
2010-04-22

Guiding device and guiding assembly for guiding cables and/or hoses, and a lithographic apparatus

 #111
20100092882
2010-04-15

Exposure apparatus and device fabrication method

 #112
20100092880
2010-04-15

Method and apparatus for using a synchrotron as a source in extreme ultraviolet lithography

 #113
20100089712
2010-04-15

PROJECTION ASSEMBLY AND LITHOGRAPHIC APPARATUS

 #114
20100066989
2010-03-18

Spectral purity filters and methods therefor

 #115
20100060869
2010-03-11

LITHOGRAPHIC APPARATUS AND ALIGNMENT METHOD

 #116
20100055619
2010-03-04

Method and system for manufacturing a reticle using character projection lithography

 #117
20100053582
2010-03-04

Device manufacturing method, control system, computer program and computer-readable medium

 #118
20100053579
2010-03-04

Method and system for manufacturing a reticle using character projection particle beam lithography

 #119
20100035358
2010-02-11

Biological Analysis Systems, Devices, and Methods

 #120
20100020298
2010-01-28

Lithography apparatus with an optical fiber module

 #121
20100012352
2010-01-21

Photoimaging method and apparatus

 #122
20100007864
2010-01-14

SCANNING EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

 #123
20100003619
2010-01-07

Systems and methods for fabricating three-dimensional objects

 #124
20100002218
2010-01-07

EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE

 #125
20100002212
2010-01-07

SCANNING EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #126
20090323078
2009-12-31

Method and system for step-and-align interference lithography

 #127
20090316120
2009-12-24

Exposure apparatus, cleaning method, and device fabricating method

 #128
20090310110
2009-12-17

Exposure apparatus and device manufacturing method

 #129
20090310109
2009-12-17

Exposure apparatus and method of manufacturing device

 #130
20090310108
2009-12-17

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

 #131
20090310107
2009-12-17

Deforming mechanism, exposure apparatus, and device manufacturing method

 #132
20090305165
2009-12-10

WAFER EXPOSING METHOD, EUV EXPOSING APPARATUS, AND EB EXPOSING APPARATUS

 #133
20090303483
2009-12-10

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #134
20090268183
2009-10-29

CONDUCTIVE PATTERN FORMING APPARATUS

 #135
20090268182
2009-10-29

Method of measuring a lithographic projection apparatus

 #136
20090268179
2009-10-29

Method of aligning an exposure apparatus, method of exposing a photoresist film using the same and exposure apparatus for performing the method of exposing a photoresist film

 #137
20090263750
2009-10-22

Foreign particle inspection apparatus, exposure apparatus, and method of manufacturing device

 #138
20090263735
2009-10-22

EXPOSURE APPARATUS

 #139
20090262328
2009-10-22

ILLUMINATION SYSTEM AND LITHOGRAPHIC METHOD

 #140
20090257035
2009-10-15

Exposure apparatus, measurement method, stabilization method, and device fabrication method

 #141
20090244538
2009-10-01

Lithographic apparatus and device manufacturing method using overlay measurement

 #142
20090244504
2009-10-01

Projection exposure method

 #143
20090244292
2009-10-01

Digital camera with card reader for reading program script

 #144
20090231569
2009-09-17

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

 #145
20090225293
2009-09-10

Exposure apparatus and method of decreasing fluctuations in optical characteristics of projection system

 #146
20090225292
2009-09-10

Exposure apparatus and device manufacturing method

 #147
20090208884
2009-08-20

Exposure apparatus

 #148
20090208855
2009-08-20

Exposure apparatus and device manufacturing method

 #149
20090201474
2009-08-13

Semiconductor Devices and Methods of Manufacture Thereof

 #150
20090195763
2009-08-06

Lithographic apparatus with actuator to compensate acoustic vibration

 #151
20090190116
2009-07-30

Method of manufacturing a miniaturized device

 #152
20090190108
2009-07-30

METHOD AND SYSTEM FOR LEVELING TOPOGRAPHY OF SEMICONDUCTOR CHIP SURFACE

 #153
20090185254
2009-07-23

Optical scanning element, optical scanning device, optical scanning display device, and retinal scanning display

 #154
20090185156
2009-07-23

Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger and different linear polarization states in an on-axis area and a plurality of off-axis areas

 #155
20090180090
2009-07-16

Exposure apparatus and device fabrication method

 #156
20090176167
2009-07-09

Alignment system and alignment marks for use therewith

 #157
20090153824
2009-06-18

MULTIPLE CHUCK SCANNING STAGE

 #158
20090153818
2009-06-18

Method and apparatus for extracting dose and focus from critical dimension data

 #159
20090139311
2009-06-04

Biological Analysis Systems, Devices, and Methods

 #160
20090128789
2009-05-21

Compact projection exposure device and associated exposure process performed by the device for exposing film-shaped tape to form circuit patterns

 #161
20090103067
2009-04-23

Exposure apparatus and device manufacturing method

 #162
20090086179
2009-04-02

Radiometric Kirk test

 #163
20090073400
2009-03-19

Device and method for manufacturing a particulate filter with regularly spaced micropores

 #164
20090040536
2009-02-12

Mark for alignment and overlay, mask having the same, and method of using the same

 #165
20090040483
2009-02-12

Multiple exposure technique using OPC to correct distortion

 #166
20090033898
2009-02-05

Developing apparatus, developing method and storage medium

 #167
20090033892
2009-02-05

DOUBLE EXPOSURE OF A PHOTORESIST LAYER USING A SINGLE RETICLE

 #168
20090027642
2009-01-29

Exposure apparatus

 #169
20090027641
2009-01-29

Illumination optical system and exposure apparatus including the same

 #170
20090021711
2009-01-22

METHOD OF INSPECTING EXPOSURE SYSTEM AND EXPOSURE SYSTEM

 #171
20090011368
2009-01-08

Exposure Method and Apparatus, and Electronic Device Manufacturing Method

 #172
20090009745
2009-01-08

Exposure method, exposure apparatus, and method for producing device

 #173
20090009739
2009-01-08

Exposure apparatus and method for manufacturing device

 #174
20090002659
2009-01-01

STAGE APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

 #175
20090002651
2009-01-01

Exposure apparatus and method

 #176
20090002650
2009-01-01

Exposure apparatus and device manufacturing method

 #177
20080316447
2008-12-25

Exposure apparatus and method of manufacturing device

 #178
20080309892
2008-12-18

In-line particle detection for immersion lithography

 #179
20080297746
2008-12-04

Exposure method, exposure apparatus, and method for producing device

 #180
20080297743
2008-12-04

Exposure apparatus and device manufacturing method

 #181
20080292994
2008-11-27

TRANSFER METHOD, TRANSFER APPARATUS, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING ELEMENT

 #182
20080291414
2008-11-27

Exposure apparatus and device manufacturing method

 #183
20080291410
2008-11-27

Exposure apparatus and method for manufacturing device

 #184
20080291406
2008-11-27

Assembly comprising a radiation source, a reflector and a contaminant barrier

 #185
20080284996
2008-11-20

Optical compensation devices, systems, and methods

 #186
20080278701
2008-11-13

Defocus determination method using sub-resolution feature (SRF) printing

 #187
20080278700
2008-11-13

Sub-resolution assist devices and methods

 #188
20080278106
2008-11-13

Apparatus, system, and method for simulating outputs of a resolver to test motor-resolver systems

 #189
20080266537
2008-10-30

Exposure apparatus and device manufacturing method

 #190
20080259302
2008-10-23

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

 #191
20080259301
2008-10-23

Exposure system with a plurality of laser sources located at dispersed sites

 #192
20080239274
2008-10-02

Illumination optical system, exposure apparatus, and exposure method

 #193
20080239260
2008-10-02

Immersion lithographic apparatus and method for rinsing immersion space before exposure

 #194
20080220345
2008-09-11

Device manufacturing method, computer program and lithographic apparatus

 #195
20080218719
2008-09-11

Exposure apparatus

 #196
20080174755
2008-07-24

Movable stage apparatus

 #197
20080170212
2008-07-17

Device manufacturing method, computer program product and lithographic apparatus

 #198
20080158531
2008-07-03

Exposure apparatus, exposure method, and method for producing device

 #199
20080117396
2008-05-22

Exposure apparatus

 #200
20080117395
2008-05-22

Stage apparatus and exposure apparatus

 #201
20080106708
2008-05-08

Method and apparatus to prevent contamination of optical element by resist processing

 #202
20080094602
2008-04-24

Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting device

 #203
20080094596
2008-04-24

Methods and systems to compensate for a stitching disturbance of a printed pattern

 #204
20080094595
2008-04-24

Methods and systems to compensate for a stitching disturbance of a printed pattern

 #205
20080088854
2008-04-17

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

 #206
20080079919
2008-04-03

Immersion lithography method

 #207
20080076045
2008-03-27

Methods and apparatus for changing the optical properties of resists

 #208
20080074632
2008-03-27

Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustment

 #209
20080068572
2008-03-20

Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in four areas

 #210
20080055579
2008-03-06

Optical power modulation at high frequency

 #211
20080055578
2008-03-06

Roll printer with decomposed raster scan and X-Y distortion correction

 #212
20080043211
2008-02-21

Apparatus and methods for recovering fluid in immersion lithography

 #213
20080036987
2008-02-14

Manufacturing method of display device and exposure system for that

 #214
20080036985
2008-02-14

Systems and methods for fluid flow control in an immersion lithography system

 #215
20080036984
2008-02-14

Method and apparatus for angular-resolved spectroscopic lithography characterization

 #216
20080030705
2008-02-07

Exposure apparatus

 #217
20080030697
2008-02-07

Exposure apparatus and device fabrication method

 #218
20080024747
2008-01-31

Exposure method and apparatus, and method for fabricating device with light amount distribution having light larger in first and second pairs of areas

 #219
20070296940
2007-12-27

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #220
20070296937
2007-12-27

ILLUMINATION LIGHT IN IMMERSION LITHOGRAPHY STEPPER FOR PARTICLE OR BUBBLE DETECTION

 #221
20070291247
2007-12-20

Apparatus for exposing an edge portion of a wafer

 #222
20070291246
2007-12-20

Scanning exposure apparatus and device manufacturing method

 #223
20070291242
2007-12-20

Exposure apparatus

 #224
20070291241
2007-12-20

Immersion exposure apparatus

 #225
20070291240
2007-12-20

Altering pattern data based on measured optical element characteristics

 #226
20070291239
2007-12-20

Immersion exposure apparatus and device manufacturing method with measuring device

 #227
20070285642
2007-12-13

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #228
20070285641
2007-12-13

Exposure apparatus, and device manufacturing method

 #229
20070285639
2007-12-13

Exposure scan and step direction optimization

 #230
20070285632
2007-12-13

EUVL reticle stage and reticle protection system and method

 #231
20070268472
2007-11-22

Exposure apparatus and method, and device manufacturing method

 #232
20070268469
2007-11-22

Apparatus and method for particle monitoring in immersion lithography

 #233
20070263194
2007-11-15

METHOD OF EXPOSING A WAFER TO A LIGHT, AND RETICLE, RETICLE ASSEMBLY AND EXPOSING APPARATUS FOR PERFORMING THE SAME

 #234
20070263188
2007-11-15

Exposure apparatus and device fabrication method

 #235
20070252964
2007-11-01

Exposure apparatus and method for producing device

 #236
20070252963
2007-11-01

Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby

 #237
20070247609
2007-10-25

Assembly of a reticle holder and a reticle

 #238
20070247608
2007-10-25

Tessellated patterns in imprint lithography

 #239
20070242247
2007-10-18

Lithographic apparatus with cleaning of substrate table

 #240
20070231709
2007-10-04

Lithographic apparatus and patterning device

 #241
20070229828
2007-10-04

Lithographic processing cell and device manufacturing method

 #242
20070229793
2007-10-04

Filtered device container assembly with shield for a reticle

 #243
20070229792
2007-10-04

Lithographic processing cell and device manufacturing method

 #244
20070229787
2007-10-04

Exposure apparatus

 #245
20070229786
2007-10-04

Lithographic apparatus and device manufacturing method

 #246
20070229785
2007-10-04

Lithographic apparatus and device manufacturing method using overlay measurement

 #247
20070229657
2007-10-04

Heat treatment apparatus of light emission type

 #248
20070224525
2007-09-27

Lithographic apparatus and device manufacturing method with double exposure overlay control

 #249
20070222959
2007-09-27

Exposure apparatus, exposure method, and method for producing device

 #250
20070222957
2007-09-27

Exposure apparatus, exposure method, and method for producing device

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20070222303
2007-09-27

Stage apparatus

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20070216884
2007-09-20

Exposure apparatus and device manufacturing method

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20070216881
2007-09-20

Lithographic apparatus and device manufacturing method

 #254
20070216880
2007-09-20

System for determining conducted radio frequency (RF) receiver sensitivity and related methods

 #255
20070206170
2007-09-06

Exposure apparatus and making method thereof

 #256
20070201011
2007-08-30

Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice

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20070190430
2007-08-16

Photo-mask stage

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20070188733
2007-08-16

Manufacturing method of semiconductor device

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20070188727
2007-08-16

Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium

 #260
20070188726
2007-08-16

Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium

 #261
20070188723
2007-08-16

Lithographic apparatus and device manufacturing method

 #262
20070182948
2007-08-09

SEMICONDUCTOR EXPOSURE METHOD AND METHOD OF CONTROLLING SEMICONDUCTOR EXPOSURE APPARATUS

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20070182944
2007-08-09

Lithographic apparatus and device manufacturing method

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20070177123
2007-08-02

Lithographic projection apparatus and a device manufacturing method

 #265
20070160356
2007-07-12

Exposure apparatus and device manufacturing method

 #266
20070159609
2007-07-12

Immersion exposure apparatus and device manufacturing method with liquid detection apparatus

 #267
20070146672
2007-06-28

Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region

 #268
20070121089
2007-05-31

Exposure method, exposure apparatus, and method for producing device

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20070115446
2007-05-24

Load-lock apparatus, device manufacturing apparatus, and device manufacturing method

 #270
20070110916
2007-05-17

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #271
20070109517
2007-05-17

Immersion exposure apparatus and device manufacturing method with residual liquid detector

 #272
20070109516
2007-05-17

Exposure apparatus and device fabrication method

 #273
20070091289
2007-04-26

Apparatus and method for recovering liquid droplets in immersion lithography

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20070085989
2007-04-19

Exposure apparatus and exposure method, maintenance method, and device manufacturing method

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20070081136
2007-04-12

Exposure apparatus and device fabrication method

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20070070317
2007-03-29

Exposure apparatus

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20070064209
2007-03-22

Exposure apparatus and method for manufacturing device

 #278
20070058148
2007-03-15

Analysis method, exposure method, and device manufacturing method

 #279
20070053033
2007-03-08

Exposure apparatus

 #280
20070052939
2007-03-08

Exposure method, exposure system, and substrate processing apparatus

 #281
20070046916
2007-03-01

Containment system for immersion fluid in an immersion lithography apparatus

 #282
20060268249
2006-11-30

Exposure apparatus and device fabrication method

 #283
20060262413
2006-11-23

Exposure apparatus and device fabrication method

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20060257553
2006-11-16

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

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20060227313
2006-10-12

Exposure apparatus

 #286
20060209281
2006-09-21

Exposure apparatus, exposure method, and device manufacturing method

 #287
20060209277
2006-09-21

Roll printer with decomposed raster scan and X-Y distortion correction

 #288
20060203219
2006-09-14

Exposure method

 #289
20060152696
2006-07-13

Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby

 #290
20060146304
2006-07-06

Method of manufacturing a miniaturized device

 #291
20060146303
2006-07-06

Stage design for reflective optics

 #292
20060139584
2006-06-29

Holding mechanism in exposure apparatus, and device manufacturing method

 #293
20060126051
2006-06-15

Exposure apparatus

 #294
20060098177
2006-05-11

Exposure method, exposure apparatus, and method for producing device

 #295
20060087632
2006-04-27

Self-adapting feedforward control tuning for motion system, and lithographic apparatus provided with such a motion system

 #296
20060082748
2006-04-20

Exposure device for immersion lithography and method for monitoring parameters of an exposure device for immersion lithography

 #297
20060082747
2006-04-20

Exposure method, exposure tool and method of manufacturing a semiconductor device

 #298
20060082745
2006-04-20

System and method to block unwanted light reflecting from a pattern generating portion from reaching an object

 #299
20060077362
2006-04-13

Exposure apparatus and device manufacturing method

 #300
20060072095
2006-04-06

Exposure method and apparatus, and method for fabricating device