G03B27/53 - CPC Classification Index

ClassID:

176022 ⎘

G03B27/53 - CPC Classification

Classification description:

Photographic printing apparatus; Projection printing apparatus, e.g. enlarger, copying camera; Details Automatic registration or positioning of originals with respect to each other or the photosensitive layer

Recent Application in this class:

20190324354

2019-10-24

Automatic microform carrier systems and methods

20180335688

2018-11-22

Exposure method

20160077450

2016-03-17

Positioning system, a lithographic apparatus and a method for positional control

20150009317

2015-01-08

Digital microform imaging apparatus

20140218712

2014-08-07

Exposure apparatus and device fabrication method

20140092374

2014-04-03

Exposure apparatus, exposure method, and method of manufacturing device

20140015958

2014-01-16

Digital microform imaging apparatus

20130201466

2013-08-08

Lithographic apparatus and device manufacturing method

20120293845

2012-11-22

Digital microform imaging apparatus

#10

20120127451

2012-05-24

Positioning system, a lithographic apparatus and a method for positional control

#11

20120092638

2012-04-19

Method of aligning a wafer stage and apparatus for performing the same

#12

20120081682

2012-04-05

Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography

#13

20120050710

2012-03-01

Method of measuring mark position and measuring apparatus

#14

20120013881

2012-01-19

Method and apparatus for determining an overlay error

#15

20120008122

2012-01-12

Exposure apparatus and device fabrication method

#16

20110285975

2011-11-24

METHOD OF MANAGING EUV EXPOSURE MASK AND EXPOSURE METHOD

#17

20110273686

2011-11-10

Exposure apparatus, exposure method, and method of manufacturing device

#18

20110205515

2011-08-25

Calibration of lithographic apparatus by exposing patterns on substrate positioned at different orientations

#19

20100134775

2010-06-03

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

#20

20090290137

2009-11-26

Support structure, lithographic apparatus and method

#21

20090284720

2009-11-19

Lithographic apparatus and device manufacturing method

#22

20080284847

2008-11-20

Digital microform imaging apparatus

#23

20080218718

2008-09-11

Lithographic apparatus and device manufacturing method

#24

20080088812

2008-04-17

Method for performing a focus test and a device manufacturing method

#25

20080068603

2008-03-20

ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

#26

20070296938

2007-12-27

Method of reducing a wave front aberration, and computer program product

#27

20070263197

2007-11-15

Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method

#28

20070077059

2007-04-05

Multi-function image device

#29

20070029718

2007-02-08

Imaging apparatus with media supply system employing vibration for media separation

#30

20050063584

2005-03-24

Method and apparatus for automatic film recognition

#31

20050007572

2005-01-13

Lithographic apparatus and device manufacturing method