Optical system having an improved aberration behavior, and LIDAR device including a system of this type

Light source module of photo printer

ILLUMINATING DEVICE, IMAGE READING APPARATUS AND IMAGE FORMING APPARATUS

Illumination device and image reading device

Reading module having reflection mirror array, image reading device comprising same, and image forming apparatus therewith

THERMAL REGULATION OF VIBRATION-SENSITIVE OBJECTS WITH CONDUIT CIRCUIT HAVING LIQUID METAL, PUMP, AND HEAT EXCHANGER

Graphene spectral purity filter

Illuminating device, image reading apparatus and image forming apparatus

Lighting apparatus and image reading apparatus

Pellicle for reticle and multilayer mirror

Illuminating device, image reading apparatus and image forming apparatus

Image read-in device with fastener to fasten transparent member retaining lens array assembly and light shield to board

Image sensor device

Reading device

Multi-prism mechanism for laser exposure system of 3D images and method thereof

Actuation system and lithographic apparatus

Apparatus, system, and method for flash printing

Reading device

Image sensor unit and image reading apparatus using the image sensor unit

Lighting unit and image scanner using same

Illuminating device, image reading apparatus and image forming apparatus

Pellicle for reticle and multilayer mirror

Exposure apparatus and device fabrication method for reducing a change in aberration due to driving error

Exposing device, method of manufacturing the same, and image forming apparatus

Apparatus and method for printing a periodic pattern with a large depth of focus

Reading device

Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same

Cross quadrupole double lithography method using two complementary apertures

Lithographic apparatus and method

Clamping device, assembly and lithographic projection apparatus

Light source drive device, optical scanning device and image forming apparatus

Photolithography system using a solid state light source

Illumination system for a lithographic apparatus

Lithographic apparatus and method

Actuation system and lithographic apparatus

Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus

Method and apparatus for printing a periodic pattern with a large depth of focus

Lithographic fabrication of general periodic structures by exposing a photosensitive layer to a range of lateral intensity distributions

Chamber apparatus and extreme ultraviolet light generation system

EXPOSURE SYSTEM AND ADJUSTMENT METHOD THEREOF

Reading device

Illumination system for a microlithographic projection exposure apparatus

Illuminating apparatus, image reading apparatus, and image forming apparatus

PRODUCTION OF AN ALIGNMENT MARK

Optical module with an adjustable optical element

Image reader apparatus and method of driving the same

1.5D SLM for lithography

LITHOGRAPHIC APPARATUS AND SCANNING METHOD

Lithographic apparatus and method

Hologram with cells to control phase in two polarization directions and exposure apparatus

METHOD AND APPARATUS FOR ENHANCED DIPOLE LITHOGRAPHY

Lithographic apparatus and method

Lithographic apparatus, device manufacturing method and computer readable medium

Methods of optical proximity correction in manufacturing semiconductor devices

Illuminating device, image reading apparatus and image forming apparatus

Apparatus, system, and method for flash printing

Homogenizer

Constrained optimization of lithographic source intensities under contingent requirements

Lens barrel support device and maskless exposure apparatus having the same

Recording medium imaging apparatus for determining a type of a recording medium based on a surface image of a reference plate and a surface image of the recording medium

Light source device and image forming apparatus

ILLUMINATION OPTICAL SYSTEM, EXPOSURE METHOD AND DESIGNING METHOD

Measuring apparatus, optical system manufacturing method, exposure apparatus, device manufacturing method, and processing apparatus

PELLICLE INSPECTION DEVICE, EXPOSURE APPARATUS USING SAME, AND DEVICE MANUFACTURING METHOD

Exposure apparatus, exposing method and device fabricating method

Method and apparatus for reducing down time of a lithography system

Radiation beam modification apparatus and method

PERFORMING DOUBLE EXPOSURE PHOTOLITHOGRAPHY USING A SINGLE RETICLE

Method and apparatus for photoimaging a substrate

Exposure apparatus and device manufacturing method

High contrast lithographic masks

LITHOGRAPHIC RADIATION SOURCE, COLLECTOR, APPARATUS AND METHOD

Mark position detection device and mark position detection method, exposure apparatus using same, and device manufacturing method

Resist applying and developing method, resist film processing unit, and resist applying and developing apparatus comprising the unit

Exposure method, exposure apparatus, and device manufacturing method

Cross quadrupole double lithography method and apparatus for semiconductor device fabrication using two apertures

INTERMEDIATE VACUUM SEAL ASSEMBLY FOR SEALING A CHAMBER HOUSING TO A WORKPIECE

Image forming apparatus

Systems and methods for manufacturing semiconductor device

METHOD FOR EVALUATING FLARE IN EXPOSURE TOOL

Illumination optical system, exposure apparatus, and device fabrication method

Thermal regulation of vibration-sensitive objects with conduit circuit having liquid metal, pump, and heat exchanger

PHOTOLITHOGRAPHY SYSTEMS WITH LOCAL EXPOSURE CORRECTION AND ASSOCIATED METHODS

Laser device

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Gas contamination sensor, lithographic apparatus, method of determining a level of contaminant gas and device manufacturing method

Exposure apparatus, light source apparatus and method of manufacturing device

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Method for a lithographic apparatus

EUV mask inspection system

Exposing apparatus for fabricating process of flat panel display device

Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same

Frequency selective iterative learning control system and method for controlling errors in stage movement

DRIVING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Exposure apparatus and device manufacturing method

Stop flow interference lithography system

Exposure apparatus and device fabrication method

EXPOSURE APPARATUS

Variable resist protecting groups

Measurement apparatus, exposure apparatus, and device manufacturing method to measure numerical aperture of the optical system using interference fringe

PROXIMITY CORRECTION METHOD AND SYSTEM

Optofluidic lithography system, method of manufacturing two-layered microfluidic channel, and method of manufacturing three-dimensional microstructures

Exposure apparatus and device fabrication method

EXPOSURE DEVICE AND EXPOSURE METHOD

Exposing device, method of manufacturing the same, and image forming apparatus

Exposure apparatus with an illumination system generating multiple illumination beams

MEASUREMENT APPARATUS AND METHOD

INSTRUMENTATION AND METHOD FOR MASKLESS PHOTOLITHOGRAPHY

LINEAR LIGHT SOURCE APPARATUS AND IMAGE READING APPARATUS PROVIDED WITH THE SAME

Optical printers

Object support positioning device and lithographic apparatus

Exposure apparatus that utilizes multiple masks

Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame

Sub-segmented alignment mark arrangement

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

APPARATUS FOR SCANNING SITES ON A WAFER ALONG A SHORT DIMENSION OF THE SITES

EXPOSURE APPARATUS WITH A SCANNING ILLUMINATION BEAM

METHOD OF MEASURING POSITION ERROR OF BEAM OF EXPOSURE APPARATUS AND EXPOSURE APPARATUS USING THE SAME

Measurement apparatus for measuring an aberration of an optical system, measurement method, exposure apparatus, and device fabrication method

Surface shape measurement apparatus and exposure apparatus

Optical element with multiple primary light sources

Image reading device and image forming apparatus

Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system

DEVICE AND METHOD FOR OBTAINING EXPOSURE CORRECTION INFORMATION, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

LED linear light source and devices using such source

Light guide having light scattering patterns with different light reflected directions

COHERENCE-REDUCTION DEVICES AND METHODS FOR PULSED LASERS

Evaluation method, adjustment method, exposure apparatus, and memory medium

Memory devices, stylus-shaped structures, electronic apparatuses, and methods for fabricating the same

Evaluation method, control method, exposure apparatus, and memory medium

Scanning exposure apparatus and device manufacturing method

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Light Emitting Unit, Lighting Apparatus and Image Reading Apparatus

EXPOSURE APPARATUS, DETECTION METHOD, AND METHOD OF MANUFACTURING DEVICE

Beam characterization monitor for sensing pointing or angle of an optical beam

Off-axis catadioptric projection optical system for lithography

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD

IMAGE READING APPARATUS

MULTIPLE CHUCK SCANNING STAGE

Illumination optical apparatus, exposure apparatus, and device manufacturing method

Thin film continuous spatially modulated grey attenuators and filters

Drive error compensation for projection optics

Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus

Controlling fluctuations in pointing, positioning, size or divergence errors of a beam of light for optical apparatus

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Exposure apparatus, exposure method, and device manufacturing method

Image scanning apparatus for light integrating and predicting signals

Method, computer program, apparatus and system providing printing for an illumination mask for three-dimensional images

Light guiding member and linear light source apparatus using same

EXPOSURE APPARATUS, METHOD FOR SELECTING OPTICAL ELEMENT, AND DEVICE MANUFACTURING METHOD

Linear lighting apparatus and image reader using the same

Light guide having reflective protruding portion, and lighting devices including such light guide

Line lighting device and image reading device

Exposure apparatus and device manufacturing method

Exposure apparatus and method of manufacturing device

Exposure apparatus and device manufacturing method

Image scanning device and illuminating device that divide a light beam from a light source into multiple light beams and direct the multiple light beams to a target

Lens structure, optical system having the same, and lithography method using the optical system

Optical System, Exposing Apparatus and Exposing Method

Exposure apparatus and device manufacturing method

EUV illumination system having a folding geometry

Illumination unit, image read apparatus, image formation apparatus

Optical module with minimized overrun of the optical element

Divided sub-image array scanning and exposing system

Light source apparatus with reflector gas-blasting structure

Wavelength selective element, manufacturing apparatus for manufacturing wavelength selective element, manufacturing method for manufacturing wavelength selective element, light source device, image display device, and monitor

Photo-masks and methods of fabricating periodic optical structures

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

Optical element, exposure apparatus using the same, and device manufacturing method

Polarized light conversion apparatus

ILLUMINATION DEVICE AND MASK FOR MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEM, AND RELATED METHODS

Projection exposure apparatus, optical member, and device manufacturing method

Light tunnel apparatus of an optical engine and projection system comprising the light tunnel apparatus

Methods, systems, and computer program products for printing patterns on photosensitive surfaces

LIGHT INTEGRATING SYSTEM

Radiant-temperature measurement device, light-source temperature control device, image projection apparatus and radiant-temperature measurement method

Subsystem of an illumination system of a microlithographic projection exposure apparatus

ILLUMINATION APPARATUS AND IMAGE PROJECTOR USING THE SAME

Original-document illumination apparatus, image reading apparatus, color-original-document reading apparatus, and image forming apparatus

LIGHT SOURCE SYSTEM

Illumination optical system, exposure method and designing method

Optical system with non-circular aperture

Exposure apparatus and image plane detecting method

Patterning device

Apparatus for exposing an edge portion of a wafer

Lithographic apparatus and device manufacturing method

Projection-optical systems and exposure apparatus comprising same

ILLUMINATION APPARATUS, EXPOSURE APPARATUS HAVING THE SAME, AND DEVICE MANUFACTURING METHOD

BULB SORTING DEVICE AND SORTING METHOD THEREOF

Illumination system for a microlithographic projection exposure apparatus

Projection system for EUV lithography

Interferometric lithography system and method used to generate equal path lengths of interfering beams

Exposure apparatus

Illumination apparatus and image projection apparatus

Modular illuminator for a scanning printer

Method and apparatus for providing uniform illumination of a mask in laser projection systems

Illumination apparatus and image projection apparatus

Projection light source having multiple light emitting diodes

Projection system and light uniforming device thereof

Exposure apparatus and exposure method, and method of manufacturing electrical wiring board

Variable illumination source

Projection display and optical integrator

PROJECTOR AND COLOR FILTERING DEVICE THEREOF

Zoomable projection apparatus

System and method utilizing an illumination beam adjusting system

Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap without an explicit attenuation

Illumination apparatus and image projection apparatus

Systems and methods for displaying simulated images

Exposure apparatus and method thereof

Exposure device

Line illuminating device and image-scanning device incorporating line-illuminating device

Illumination apparatus and image projection apparatus

Exposure method

Optical radiation generation apparatus and method

Imaging device

Projection optical system, exposure apparatus and method using the same

Light modulator, and optical apparatus using the same

Projection system for EUV lithography

Exposure device

Lithographic apparatus and device manufacturing method

Off-axis catadioptric projection optical system for lithography

Image drawing apparatus and image drawing method

Systems and methods for displaying simulated images

Image exposure device

Illumination apparatus and exposure apparatus

Projecting exposure method

Illumination system and exposure apparatus

Automatic momentary secondary light source assembly

Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap without an explicit attenuation

Illumination optical system in exposure apparatus

EUV illumination system having a folding geometry

Projection optical system and projection and light exposure apparatus using it

Simultaneous single obverse and reverse imaging of collectible items