G03B27/60 - CPC Classification Index

ClassID:

176036 ⎘

G03B27/60 - CPC Classification

Classification description:

Photographic printing apparatus; Projection printing apparatus, e.g. enlarger, copying camera; Details; Baseboards, masking frames, or other holders for the sensitive material using a vacuum or fluid pressure

Recent Application in this class:

20210190219

2021-06-24

Switching valve, valve apparatus, holding apparatus, lithography apparatus, and method of manufacturing article

20130258309

2013-10-03

Substrate holding device, lithography apparatus using same, and device manufacturing method

20130107241

2013-05-02

LITHOGRAPHIC APPARATUS AND SUBSTRATE HANDLING METHOD

20110086298

2011-04-14

Substrate holding device, lithography apparatus using same, and device manufacturing method

20110008718

2011-01-13

SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE, EXPOSURE APPARATUS USING SAME, AND DEVICE MANUFACTURING METHOD

20050012919

2005-01-20

Photosensitive tabular member suction mechanism and image recording device