G03D2203/0616 - CPC Classification

Liquid processing apparatus involving immersion; washing apparatus involving immersion; Details of liquid circulation; Liquid supply; Replenishment or recovery apparatus Determining the need of replenishment

• G03D2203/0625 » by measuring the optical density of the film 0
• G03D2203/0641 » by measuring the electrical conductivity of the processing solution 0
• G03D2203/065 » by measuring the electrical resistance of the film 0
• G03D2203/0658 » by sensing the level of the processing liquid 0
• G03D2203/0666 » by measuring the oxidation/reduction potential of the processing liquid, i.e. degree of aging 0