G03D3/00 - CPC Classification Index

ClassID:

176780 ⎘

G03D3/00 - CPC Classification

Classification description:

Liquid processing apparatus involving immersion; Washing apparatus involving immersion

Sub-classes:

G03D3/02 » Details of liquid circulation 10
G03D3/08 » having progressive mechanical movement of exposed material 12
G03D3/16 » Treating exposed material in original holder 0

Recent Application in this class:

20180196334

2018-07-12

Method for controlling infrared illuminator and related image-recording device

20150023657

2015-01-22

Instant photography with ordinary shell film

20130094006

2013-04-18

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

20110261330

2011-10-27

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

20110249249

2011-10-13

Digital stereo imaging photosensitive device for a grating and a photosensitive material and its method

20110013160

2011-01-20

Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice

20070296940

2007-12-27

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

20070229787

2007-10-04

Exposure apparatus

20070201011

2007-08-30

Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice

#10

20070182948

2007-08-09

SEMICONDUCTOR EXPOSURE METHOD AND METHOD OF CONTROLLING SEMICONDUCTOR EXPOSURE APPARATUS

#11

20070177119

2007-08-02

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

#12

20070172234

2007-07-26

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

#13

20070172233

2007-07-26

Substrate processing apparatus

#14

20070110916

2007-05-17

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

#15

20070104482

2007-05-10

Recording medium drying apparatus

#16

20060257553

2006-11-16

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

#17

20060140624

2006-06-29

Method of developing a resist film and a resist development processor

#18

20060024051

2006-02-02

Method and system for managing photosensitive material processor