176915 ⎘
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
INFLATION HOLDER FOR PHOTOMASK CARRIER
#2RETICLE POD HAVING TRANSPARENT WINDOW AND MANUFACTURING METHOD THEREOF
#3LATCH MECHANISM AND NON-EQUILATERAL RECTANGULAR RETICLE CONTAINER HAVING THE SAME
#4RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
#5RETICLE CONTAINER WITH SENSOR DEVICE
#6RETICLE POD INNER POD HAVING DISSIMILAR MATERIAL AT CONTACT SURFACE INTERFACES
#7PHOTOMASK BOX CARRYING DEVICE
#8RETICLE CONTAINER
#9METHOD FOR STORING ORGANOTIN COMPOUNDS AND ARTICLE
#10MULTI-DEVICE CONTAINERS USEFUL WITH SEMICONDUCTOR PROCESSING DEVICES OF DIFFERENT DIMENSIONS, AND RELATED METHODS
#11RETICLE POD
#12CONTAINER POD AND RELATED SYSTEMS AND METHODS
#13HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSPECTION OF MASK PODS
#14RETICLE CONTAINER FOR NON-EQUILATERAL RECTANGLE RETICLE
#15APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
#16METHOD AND SYSTEM FOR PHOTOMASK DELIVERY
#17STOCKER POD, METHOD AND STOCKER FOR STORING A SEMICONDUCTOR FABRICATION ARTICLE
#18SWITCHABLE SUPPORTING MECHANISM AND RETICLE CONTAINER APPLYING THE SAME
#19RETICLE SUPPORTS FOR REDUCING WEAR IN A RETICLE CONTAINER
#20RETICLE CONSTRAINT FOR A RETICLE CONTAINER
#21EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
#22RETICLE CLAMPING MODULE
#23SOLUTION, SOLUTION STORAGE BODY, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, PATTERN FORMING METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#24STRUCTURE AND METHOD OF RETICLE POD HAVING INSPECTION WINDOW
#25CLEANING METHOD FOR PHOTO MASKS AND APPARATUS THEREFOR
#26RETICLE CONTAINER HAVING ROTATING CONNECTOR WITH SPRING FORCE LATCHING
#27RETICLE POD WITH AIR FLOW MANAGEMENT FEATURE
#28CONTACTS FOR REDUCING WEAR IN A RETICLE CONTAINER
#29RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PRESSURE
#30BASEPLATE FOR SUPPORTING A RETICLE AND RELATED SYSTEMS AND METHODS
#31DUAL POD WITH GUIDE MECHANISM
#32PELLICLE ASSEMBLY, RETICLE ASSEMBLY, RETICLE CASE, PELLICLE MEASUREMENT METHOD, AND RETICLE MEASUREMENT METHOD
#33RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
#34STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
#35RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
#36EXTREME ULTRAVIOLET PELLICLE STORAGE AND METHOD OF PRESERVING EXTREME ULTRAVIOLET PELLICLE PROPERTIES THEREOF
#37Inner pod holding device conducive to reducing dust contamination and optical inspection apparatus for inner pod
#38RETICLE POD WITH BACKSIDE STATIC DISSIPATION
#39Reticle pod including motion limiting features and method of assembling same
#40APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
#41OPTICAL INSPECTION DEVICE FOR SURFACE OF RETICLE POD AND OPTICAL INSPECTION METHOD FOR SURFACE OF RETICLE POD
#42HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSPECTION OF MASK PODS
#43MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD THEREOF
#44Photomask handling assembly for atmospheric pressure plasma chamber
#45Method of manufacturing semiconductor device
#46GRIPPING MECHANISM FOR INSPECTION OF RETICLE INNER POD
#47Pellicle Frame Laminate and Method for Manufacturing Pellicle Using Said Laminate
#48RETICLE COMPACT BOX OPENER
#49Advanced load port for photolithography mask inspection tool
#50RETICLE CONTAINER WITH DIRECTED PURGE FLOW
#51Cleaning method for photo masks and apparatus therefor
#52RETICLE CONTAINER HAVING PLATING WITH REDUCED EDGE BUILD
#53MASK POD BOX AND MASK TRANSFER DEVICE
#54METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF AN EUV POD
#55EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
#56INSERTS FOR SPACING IN RETICLE CONTAINERS
#57RETICLE CONTAINER HAVING MAGNETIC PARTICLE CAPTURE
#58INTEGRAL SEAL FOR CONTAINER
#59Structure and method of reticle pod having inspection window
#60Reticle container having rotating connector with spring force latching
#61RETICLE CONTAINER HAVING MAGNETIC LATCHING
#62POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE
#63Method of lithography process and transferring a reticle
#64High throughput and high position accurate method for particle inspection of mask pods
#65PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEVICE COMPRISING SAME, AND PELLICLE THERMAL DURABILITY EVALUATION METHOD
#66Reticle enclosure for lithography systems
#67Method for manufacturing a membrane assembly
#68RETICLE POD INNER POD HAVING DISSIMILAR MATERIAL AT CONTACT SURFACE INTERFACES
#69Advanced load port for photolithography mask inspection tool
#70METHOD FOR INSPECTING A PHOTOMASK CONTAINED IN A TRANSPARENT POD
#71POD FOR CONTAINING A PHOTOMASK
#72LITHOGRAPHIC METHOD BY USING A PHOTOMASK CONTAINED IN A TRANSPARENT POD
#73Reticle pod including motion limiting features and method of assembling same
#74EXTREME ULTRAVIOLET INNER POD SEAL GAP
#75Reticle pod having latch including ramped surface
#76Operating method for preventing photomask particulate contamination
#77APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
#78Reticle enclosure for lithography systems
#79Quick-detachable valve, substrate container provided with the same, and method of loading and unloading the same
#80RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
#81APPARATUS AND METHODS FOR AUTOMATICALLY HANDLING DIE CARRIERS
#82METHOD OF MANUFACTURING DEPOSITION MASK FRAME ASSEMBLY FOR DISPLAY PANEL
#83High throughput and high position accurate method for particle inspection of mask pods
#84RETICLE POD HAVING RETENTION THROUGH RETICLE COMPARTMENT WALL
#85RETICLE POD HAVING RETENTION THROUGH BASEPLATE
#86BONDED LAYER ON EXTREME ULTRAVIOLET PLATE
#87Particle prevention method in reticle pod
#88Reticle enclosure for lithography systems
#89METAL PLATING WITH LUBRICANT
#90RETICLE RETAINING SYSTEM
#91Advanced load port for photolithography mask inspection tool
#92PHOTOMASK CLAMPING DEVICE
#93Mask protective module, pellicle having the same, and lithography apparatus having the same
#94Storage environment monitoring system and methods of operation
#95Structure and method of reticle pod having inspection window
#96Method of lithography process using reticle container with discharging device
#97Agglutinant for pellicle, pellicle, exposure original plate with pellicle, method for producing semiconductor device, method for producing liquid crystal display board, method for regenerating exposure original plate, and peeling residue reduction method
#98Agglutinant for Pellicle, Pellicle, Exposure Original Plate with Pellicle, Method for Producing Semiconductor Device, Method for Producing Liquid Crystal Display Board, Method for Regenerating Exposure Original Plate, and Peeling Residue Reduction Method
#99RETICLE CONTAINER
#100Lid opening-and-closing device
#101Workpiece container system
#102PROTECTIVE FILM WITH HIGH HARDNESS AND LOW FRICTION COEFFICIENT
#103Apparatus and methods for automatically handling die carriers
#104Reticle retaining system
#105RETICLE POD PROVIDED WITH HOLDING PINS AND METHOD FOR HOLDING RETICLE
#106Reticle pod provided with optically identifiable marks and method for identifying the same
#107CONTAINER FOR ACCOMMODATING SUBSTRATE WITH EFFECTIVE HERMETIC SEALING
#108Particle prevention method in reticle pod
#109Method for containing a reticle in a pod
#110RETICLE POD SEALING
#111Mask assembly and associated methods
#112Apparatus for fabricating a semiconductor device and method for fabricating semiconductor device
#113RETICLE POD HAVING COATED SENSOR ZONES
#114Method for manufacturing a membrane assembly
#115Reticle pod
#116Reticle pod and wear parts thereof
#117Pellicle transfer apparatus and method
#118Apparatus for positioning and clamped curing
#119Reticle transportation container
#120Structure and method of reticle pod having inspection window
#121Reticle pod for preventing haze contamination and reticle stocker having the same
#122Reticle pod with window
#123Non-sealed reticle storage device
#124Quick-release valve module, reticle pod provided with quick-release valve module, and method for quickly providing quick-release valve module on a reticle pod
#125Sealed reticle storage device with soft contact
#126Apparatus for storing mask
#127Reticle with conductive material structure
#128Image pickup apparatus and focus adjustment method using bending correction to adjust focusing
#129Processing liquid supply system, processing liquid supply apparatus, and carrier storage apparatus
#130Semiconductor apparatus and method of operating the same for preventing photomask particulate contamination
#131Reticle pod and gripping unit thereof
#132Method for manufacturing a membrane assembly
#133Reticle transportation container
#134Article storage facility
#135EUV reticle pod
#136Composite material and a semiconductor container made of the same
#137Pod and method for containing a reticle using the same
#138Apparatus for fabricating a semiconductor device and method for fabricating semiconductor device
#139Mask frame assembly including both frame and mask plate fixed on frame, and evaporation apparatus
#140Mask assembly and associated methods
#141Reticle container
#142Method and apparatus for high throughput photomask curing
#143Container for holding and transporting reticles having a transparent window assembly
#144Mask assembly and associated methods
#145Mask box
#146Optical reticle load port
#147Pellicle adhesive residue removal system and methods
#148Holder for holding and for protecting a side of a photomask or a photomask or a photomask having pellicle from a cleaning medium, method for cleaning a photomask or a photomask with pellicle and device for opening and closing a holder
#149APPARATUS AND METHOD FOR OPENING SNAP-SHOT CASES
#150Reticle pressing unit and EUV reticle pod using same
#151Mask protective module, pellicle having the same, and lithography apparatus having the same
#152Solution, solution storage body, actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and manufacturing method of semiconductor device
#153Mask for generating features in a microwell plate
#154Method for discharging static charges on reticle
#155Reticle transportation container
#156Reticle container
#157Method and system of measuring air-tightness and container measured thereby
#158Optical reticle load port
#159Membrane assembly
#160Mask assembly and associated methods
#161EUV reticle pod
#162Reticle pod
#163Method for manufacturing a membrane assembly
#164MASK MANAGEMENT SYSTEM AND METHOD FOR USING MASK
#165Mask frame assembly with alignment marks in both frame and mask plate, and evaporation apparatus
#166Substrate storage container
#167Photomask blank substrate container, method for storing photomask blank substrate and method for transporting photomask blank substrate
#168Mask protection device, exposure apparatus, and method for manufacturing device
#169Pellicle film, pellicle frame, pellicle, and method for producing same
#170Support frame for pellicles
#171Apparatus and method for manufacturing a pellicle, and a pellicle
#172CONTAINER FOR STORING PHOTOMASK BLANKS
#173Storage container
#174Container for storing a pellicle for lithography
#175Gas purge device and gas purge method
#176Extreme ultraviolet (EUV) pod having marks
#177Apparatus for protecting extreme ultra violet mask and extreme ultra violet exposure apparatus including the same
#178Reticle pod with cover to baseplate alignment system
#179Substrate case cleaning apparatus
#180Mask protection device, exposure apparatus, and method for manufacturing device
#181Reticle pod
#182Lithographic apparatus and device manufacturing method
#183Mask box having a buckling structure
#184Reticle operation system
#185Vacuum chamber assembly for supporting a workpiece
#186Lithographic apparatus and device manufacturing method
#187OPENER FOR EXTREME ULTRA VIOLET LITHOGRAPHY RETICLE PODS
#188RETICLE REMOVING APPARATUS AND RETICLE REMOVING METHOD USING THE SAME
#189Reticle pod
#190System and Method for Using a Two Part Cover and a Box for Protecting a Reticle
#191Apparatus with surface protector to inhibit contamination
#192Transmission box for reticle POD
#193METHOD FOR STORING A PELLICLE
#194Reticle protection member, reticle carrying device, exposure device and method for carrying reticle
#195EUV pod with fastening structure
#196SUBSTRATE-STORING CONTAINER
#197Method and storage system for reducing contamination of a photomask
#198Method for hermetically closing an air-tight bag for pellicle
#199RETICLE CLEANING METHOD FOR A LITHOGRAPHY TOOL AND A RETICLE CLEANING SYSTEM THEREOF
#200Reticle POD and supporting components therebetween
#201System and method for using a two part cover and a box for protecting a reticle
#202Photomask case structure
#203System for purging reticle storage
#204Reticle pod
#205Container for housing a mask blank, method of housing a mask blank, and a mask blank package
#206Reticle pod
#207Support structure, lithographic apparatus and method
#208High cleanliness article transport system
#209Mask transport system configured to transport a mask into and out of a lithographic apparatus
#210Photomask storage apparatus
#211SUBSTRATE CONVEYOR APPARATUS, SUBSTRATE CONVEYANCE METHOD AND EXPOSURE APPARATUS
#212Shock absorbing substrate container
#213MASK AND CONTAINER AND MANUFACTURING
#214Reticle protection member, reticle carrying device, exposure device and method for carrying reticle
#215Container for housing a mask blank, method of housing a mask blank, and mask blank package
#216CONTAINER FOR HOUSING A MASK BLANK, METHOD OF HOUSING A MASK BLANK, AND MASK BLANK PACKAGE
#217Method of cleaning storage case
#218Apparatus and Method for Preventing Haze Growth on a Surface of a Substrate
#219Supporting Member For Thin-Film-Coated Boards, Storage Container For Thin-Film-Coated Boards, Mask-Blank-Storing Body, Transfer-Mask-Storing Body, and Method For Transporting Thin-Film-Coated Boards
#220In-tool and Out-of-Tool Protection of Extreme Ultraviolet (EUV) Reticles
#221Glass Substrate Storage Case, Glass Substrate Transfer Apparatus, Glass Substrate Management Apparatus, Glass Substrate Distribution Method , Sealing Member, And Sealing Structure
#222Clean container having elastic positioning structure
#223Fastening structure of clean container
#224Device container assembly with adjustable retainers for a reticle
#225PHOTOMASK CONTAINER
#226Mask carrier treatment to prevent haze and ESD damage
#227High cleanliness article transport system
#228Clean stocker and method of storing articles
#229Gas filling apparatus for photomask box
#230Air cabinet
#231System and method for using a two part cover and a box for protecting a reticle
#232Filtered device container assembly with shield for a reticle
#233Reticle protection member, reticle carrying device, exposure device and method for carrying reticle
#234Process for removing particles from reticle
#235Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation
#236System and method for storing and transporting photomasks in fluid
#237Reticle cassette and exposure apparatus using reticle cassette
#238Photo mask retainer for photo mask delivery box
#239Fully electric field shielding reticle pod
#240Container and method of transporting substrate using the same
#241Photochromic substrate container
#242Reticle pod with isolation system
#243Container box for framed pellicle
#244Precision substrate storage container
#245Mask container
#246Method for reducing mask precipitation defects
#247Airtight semiconductor transferring container
#248Reticle-carrying container
#249Reticle-processing system
#250[SEMICONDUCTOR CONTAINER THAT PREVENTS CRYSTALIZATION ON STORAGE WAFERS/MASKS]
#251Reticle-carrying container
#252Photomask container
#253Mask holder for irradiating UV-rays
#254System for using a two part cover for and a box for protecting a reticle
#255Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
#256System and method for reticle protection and transport
#257Reticle carrier
#258Photomask positioning apparatus
#259In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles
#260Photochromic substrate container
#261Reticle carrier including reticle positioning and location means
#262Hermetically sealed container for large-sized precision sheet (semi-) product
#263Device for cleaning reticle box
#264Mask and container and manufacturing apparatus
#265Thermophoretic protection of reticles
#266Holder of photomask
#267Container for housing a mask blank, method of housing a mask blank, and mask blank package
#268Cleaning method and cleaning system for reticle pod
#269Reticle pod
#270Pellicle assembly in photolithography process and method for using the same