ClassID:

177125

G03F7/426 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Processing photosensitive materials; Apparatus therefor; Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides

Recent Application in this class:
#1
20260071151
2026-03-12

THINNER COMPOSITION, METHOD FOR SUBSTRATE PROCESSING AND MODIFIED PHOTORESIST

#2
20260010077
2026-01-08

METHOD OF DEVELOPING PHOTORESIST

#3
20250328080
2025-10-23

ELECTRONIC DEVICE MANUFACTURING AQUEOUS SOLUTION, METHOD FOR MANUFACTURING RESIST PATTERN AND METHOD FOR MANUFACTURING DEVICE

#4
20250298320
2025-09-25

Interconnectable Tiling System

#5
20250298319
2025-09-25

PHOTORESIST PATTERNING USING PLANAR TRIM LAYER

#6
20250224682
2025-07-10

COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS, DEVELOPER COMPOSITION OF METAL CONTAINING RESISTS AND METHOD OF FORMING PATTERNS USING THE COMPOSITION

#7
20250060676
2025-02-20

METHOD FOR REMOVING RESISTOR LAYER, AND METHOD OF MANUFACTURING SEMICONDUCTOR

#8
20250053093
2025-02-13

ECO-FRIENDLY PHOTORESIST STRIPPER COMPOSITION

#9
20250043217
2025-02-06

STRIPPER COMPOSITION AND METHOD FOR STRIPPING PHOTORESIST

#10
20240231237
2024-07-11

TREATMENT LIQUID, METHOD FOR WASHING SUBSTRATE, AND METHOD FOR REMOVING RESIST

#11
20240134285
2024-04-25

Interconnectable Tiling System

#12
20240134284
2024-04-25

TREATMENT LIQUID, METHOD FOR WASHING SUBSTRATE, AND METHOD FOR REMOVING RESIST

#13
20240103377
2024-03-28

Etching Composition And Method For EUV Mask Protective Structure

#14
20240027900
2024-01-25

Acid for Reactive Development of Metal Oxide Resists

#15
20240004303
2024-01-04

PHOTORESIST REMOVER COMPOSITIONS

#16
20230384684
2023-11-30

Method for removing resistor layer, and method of manufacturing semiconductor

#17
20230266672
2023-08-24

PROCESS SOLUTION COMPOSITION FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY AND PATTERN FORMING METHOD USING SAME

#18
20230236505
2023-07-27

NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, PATTERN FORMATION METHOD, AND LAMINATED FILM

#19
20230194993
2023-06-22

Interconnectable tiling system

#20
20230185199
2023-06-15

Nozzle, substrate processing apparatus, and substrate processing method

#21
20230028942
2023-01-26

Rinsing Composition and Method for Treating Surface of Photoresist Material Using Same

#22
20220380705
2022-12-01

Composition comprising three alkanolamines and a hydroxylamine for removing etch residues

#23
20220342313
2022-10-27

PROCESS LIQUID COMPOSITION FOR PHOTOLITHOGRAPHY AND PATTERN FORMING METHOD USING SAME

#24
20220308455
2022-09-29

Rinse and method of use thereof for removing edge protection layers and residual metal hardmask components

#25
20220299880
2022-09-22

Method for removing resist layer, and method of manufacturing semiconductor

#26
20220276562
2022-09-01

Photoresist remover compositions

#27
20220260919
2022-08-18

Treatment liquid, method for washing substrate, and method for removing resist

#28
20220251480
2022-08-11

COMPOSITIONS FOR REMOVING ETCH RESIDUES, METHODS OF USING AND USE THEREOF

#29
20220100097
2022-03-31

Method for removing resist layer, and method of manufacturing semiconductor

#30
20210284930
2021-09-16

Cleaning composition, cleaning method, and method for manufacturing semiconductor

#31
20210200090
2021-07-01

Patterning method and method for manufacturing array substrate

#32
20210189298
2021-06-24

Imidazolidinethione-containing compositions for post-ash residue removal and/or for oxidative etching of a layer or mask comprising TiN

#33
20210115362
2021-04-22

Photoresist remover compositions

#34
20210080833
2021-03-18

Photoresist remover compositions

#35
20200340253
2020-10-29

Interconnectable tiling system

#36
20200285149
2020-09-10

Resist composition and patterning process

#37
20200216670
2020-07-09

Thermosetting silicon-containing compound, composition for forming a silicon-containing film, and patterning process

#38
20190361352
2019-11-28

Photoresist stripping composition and method

#39
20190233771
2019-08-01

Stripping compositions for removing photoresists from semiconductor substrates

#40
20190219925
2019-07-18

Solvents for use in the electronics industry

#41
20190211286
2019-07-11

Sulfoxide/glycol ether based solvents for use in the electronics industry

#42
20190196337
2019-06-27

Photoresist stripper

#43
20190101830
2019-04-04

Stripper solutions and methods of using stripper solutions

#44
20190079409
2019-03-14

Treatment liquid, method for washing substrate, and method for removing resist

#45
20190079399
2019-03-14

Monomer, polymer, resist composition, and patterning process

#46
20190071623
2019-03-07

Treatment liquid, method for washing substrate, and method for removing resist

#47
20190033718
2019-01-31

Treatment liquid, method of manufacturing treatment liquid, pattern forming method, and method of manufacturing electronic device

#48
20190016999
2019-01-17

Cleaning composition

#49
20190011837
2019-01-10

Salt and photoresist composition containing the same

#50
20180346781
2018-12-06

COMPOSITIONS CONTAINING CHLOROFLUOROOLEFINS OR FLUOROOLEFINS

#51
20180321591
2018-11-08

Thermosetting coloring composition and method of producing color filter for solid-state imaging element

#52
20180267409
2018-09-20

Compositions for removing photoresist

#53
20180239256
2018-08-23

Photoresist stripper composition for manufacturing liquid crystal display

#54
20180201885
2018-07-19

Defect reduction rinse solution containing ammonium salts of sulfoesters

#55
20180195030
2018-07-12

Composition for removing resist

#56
20180148669
2018-05-31

Cleaning compositions for removing post etch residue

#57
20180143532
2018-05-24

Chemically amplified resist composition and patterning process

#58
20180143531
2018-05-24

Resist stripper and resist stripping method

#59
20180105774
2018-04-19

Cleaning formulations

#60
20180074408
2018-03-15

Compositions and methods that promote charge complexing copper protection during low pKa driven polymer stripping

#61
20180040474
2018-02-08

Metal-compound-removing solvent and method in lithography

#62
20170335252
2017-11-23

Stripping compositions for removing photoresists from semiconductor substrates

#63
20170322495
2017-11-09

COMPOSITION FOR REMOVING PHOTORESIST AND METHOD FOR REMOVING PHOTORESIST USING THE SAME

#64
20170305784
2017-10-26

Process for producing structured coatings

#65
20170222147
2017-08-03

Photolithographic patterning of organic electronic devices

#66
20170219927
2017-08-03

Composition for resist patterning and method for forming pattern using same

#67
20170115573
2017-04-27

Stripper composition for removing photoresists and method for stripping photoresists using the same

#68
20170114308
2017-04-27

Surfactants and methods of making and using same

#69
20170073558
2017-03-16

Compositions containing chlorofluoroolefins or fluoroolefins

#70
20170037344
2017-02-09

Photoresist cleaning composition used in photolithography and a method for treating substrate therewith

#71
20160376533
2016-12-29

Surfactants and methods of making and using same

#72
20160343582
2016-11-24

Apparatus for advanced packaging applications

#73
20160315019
2016-10-27

Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate

#74
20160312162
2016-10-27

Removal composition for selectively removing hard mask and methods thereof

#75
20160284535
2016-09-29

METHOD FOR WET STRIPPING SILICON-CONTAINING ORGANIC LAYERS

#76
20160254182
2016-09-01

Removal composition for selectively removing hard mask and methods thereof

#77
20160238945
2016-08-18

NOVEL PHOTORESIST STRIPPER AND APPLICATION PROCESS THEREOF

#78
20160186106
2016-06-30

Stripping compositions for removing photoresists from semiconductor substrates

#79
20160186105
2016-06-30

Stripping compositions having high WN/W etching selectivity

#80
20160179011
2016-06-23

Semi-aqueous photoresist or semiconductor manufacturing residue stripping and cleaning composition with improved silicon passivation

#81
20160077440
2016-03-17

PATTERN PEELING METHOD, ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME

#82
20150331325
2015-11-19

Method of patterning a device

#83
20150329806
2015-11-19

Compositions of methyl perfluoroheptene ethers, 1,1,1,2,2,3,4,5,5,5-decafluoropentane and trans-1,2-dichloroethylene and uses thereof

#84
20150175867
2015-06-25

Compositions containing chlorofluoroolefins or fluoroolefins

#85
20150111804
2015-04-23

Cleaning formulations for removing residues on surfaces

#86
20150044839
2015-02-12

Photoresist stripping and cleaning composition, method of its preparation and its use

#87
20150000697
2015-01-01

Oxidizing aqueous cleaner for the removal of post-etch residues

#88
20140357089
2014-12-04

Apparatus for advanced packaging applications

#89
20140356788
2014-12-04

Fluorinated photoresist with integrated sensitizer

#90
20140284510
2014-09-25

Compositions containing chlorfluoroolefins or fluoroolefins

#91
20140248565
2014-09-04

Method of patterning a device

#92
20140234772
2014-08-21

Photo resist (PR) profile control

#93
20140155310
2014-06-05

Dynamic multi-purpose composition for the removal of photoresists and method for its use

#94
20140109931
2014-04-24

Cleaning formulations

#95
20140045335
2014-02-13

Photo lithographic rinse solution and method of manufacturing a semiconductor device using the same

#96
20140017902
2014-01-16

Nonaqueous cleaning liquid and method for etching processing of silicon substrate

#97
20140011359
2014-01-09

Aqueous, nitrogen-free cleaning composition and its use for removing residues and contaminants from semiconductor substrates suitable for manufacturing microelectronic devices

#98
20130334679
2013-12-19

Metal conservation with stripper solutions containing resorcinol

#99
20130296215
2013-11-07

Water-rich stripping and cleaning formulation and method for using same

#100
20130273479
2013-10-17

PROCESSESS AND COMPOSITIONS FOR REMOVING SUBSTANCES FROM SUBSTRATES

#101
20130228714
2013-09-05

Compositions containing chlorofluoroolefins or fluoroolefins

#102
20130172225
2013-07-04

Dynamic multi-purpose compositions for the removal of photoresists and method for its use

#103
20130123159
2013-05-16

Aqueous cerium-containing solution having an extended bath lifetime for removing mask material

#104
20130116159
2013-05-09

Photoresist and post etch residue cleaning solution

#105
20120172274
2012-07-05

Resist remover composition and method for removing resist using the composition

#106
20120157368
2012-06-21

Processing agent composition for semiconductor surface and method for processing semiconductor surface using same

#107
20120145202
2012-06-14

Cleaning Compound and Method and System for Using the Cleaning Compound

#108
20120108486
2012-05-03

Compositions and methods for removing organic substances

#109
20120083436
2012-04-05

Composition and method for treating semiconductor substrate surface

#110
20120077132
2012-03-29

Processess and compositions for removing substances from substrates

#111
20120067379
2012-03-22

Method for washing device substrate

#112
20120048295
2012-03-01

CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES

#113
20120028871
2012-02-02

Stripping compositions for cleaning ion implanted photoresist from semiconductor device wafers

#114
20110269861
2011-11-03

Solvent compositions containing chlorofluoroolefins or fluoroolefins

#115
20110253171
2011-10-20

Chemical Composition and Methods for Removing Epoxy-Based Photoimageable Coatings Utilized In Microelectronic Fabrication

#116
20110247660
2011-10-13

PHOTORESIST STRIPPING SOLUTION

#117
20110212866
2011-09-01

Water-rich stripping and cleaning formulation and method for using same

#118
20110212865
2011-09-01

Gluconic acid containing photoresist cleaning composition for multi-metal device processing

#119
20110207645
2011-08-25

Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors

#120
20110195573
2011-08-11

Cleaning liquid for lithography and method for forming wiring

#121
20110186086
2011-08-04

Oxidizing aqueous cleaner for the removal of post-etch residues

#122
20110165523
2011-07-07

SUBSTRATE TREATING SOLUTION AND METHOD EMPLOYING THE SAME FOR TREATING A RESIST SUBSTRATE

#123
20110146724
2011-06-23

PHOTORESIST STRIPPING SOLUTIONS

#124
20110136717
2011-06-09

Formulations and method for post-CMP cleaning

#125
20110118165
2011-05-19

Composition and method for treating semiconductor substrate surface

#126
20110034362
2011-02-10

Semi-aqueous stripping and cleaning formulation for metal substrate and methods for using same

#127
20110021400
2011-01-27

Semiconductor surface treating agent composition and method for treating semiconductor surface using the semiconductor surface treating agent composition

#128
20100304312
2010-12-02

Cleaning liquid used in photolithography and a method for treating substrate therewith

#129
20100279910
2010-11-04

Method for making a photoresist stripping solution comprising an organic sulfonic acid and an organic hydrocarbon solvent

#130
20100248486
2010-09-30

Solution for removing residue after semiconductor dry process and method of removing the residue using the same

#131
20100242999
2010-09-30

Compositions and methods for removing organic substances

#132
20100242998
2010-09-30

Compositions and methods for removing organic substances

#133
20100190112
2010-07-29

Photoresist stripping solution and a method of stripping photoresists using the same

#134
20100183853
2010-07-22

STRIPPING AGENT FOR RESIST FILM ON/ABOVE CONDUCTIVE POLYMER, METHOD FOR STRIPPING RESIST FILM, AND SUBSTRATE HAVING PATTERNED CONDUCTIVE POLYMER

#135
20100139694
2010-06-10

Cleaning compound and method and system for using the cleaning compound

#136
20100137181
2010-06-03

Compositions for reducing metal etch rates using stripper solutions containing copper salts

#137
20100104824
2010-04-29

DYNAMIC MULTI-PURPOSE COMPOSITION FOR THE REMOVAL OF PHOTORESISTS

#138
20100048443
2010-02-25

Liquid composition for removing photoresist residue and polymer residue

#139
20090318323
2009-12-24

Solvent compositions containing chlorofloroolefins or fluoroolefins

#140
20090312216
2009-12-17

Photoresist stripper composition for semiconductor manufacturing

#141
20090233827
2009-09-17

Semi-aqueous stripping and cleaning composition containing aminobenzenesulfonic acid

#142
20090229629
2009-09-17

Stripper For Copper/Low k BEOL Clean

#143
20090227483
2009-09-10

Stripper for dry film removal

#144
20090224438
2009-09-10

Rapid prototyping method and radiation-curable composition for use therein

#145
20090215658
2009-08-27

Oxidizing aqueous cleaner for the removal of post-etch residues

#146
20090192065
2009-07-30

DENSE FLUID COMPOSITIONS FOR REMOVAL OF HARDENED PHOTORESIST, POST-ETCH RESIDUE AND/OR BOTTOM ANTI-REFLECTIVE COATING

#147
20090186793
2009-07-23

DYNAMIC MULTI-PURPOSE COMPOSITION FOR THE REMOVAL OF PHOTORESISTS AND METHOD FOR ITS USE

#148
20090163396
2009-06-25

Nanoelectronic and microelectronic cleaning compositions

#149
20090156453
2009-06-18

Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors

#150
20090118153
2009-05-07

Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant

#151
20090117500
2009-05-07

PHOTORESIST STRIP WITH OZONATED ACETIC ACID SOLUTION

#152
20090111726
2009-04-30

Compounds for Photoresist Stripping

#153
20090111277
2009-04-30

WET PHOTORESIST STRIP FOR WAFER BUMPING WITH OZONATED ACETIC ANHYDRIDE

#154
20090047609
2009-02-19

Metal conservation with stripper solutions containing resorcinol

#155
20090036344
2009-02-05

Reduced metal etch rates using stripper solutions containing a copper salt

#156
20090029894
2009-01-29

Method for washing device substrate

#157
20090029274
2009-01-29

METHOD FOR REMOVING CONTAMINATION WITH FLUORINATED COMPOSITIONS

#158
20090005283
2009-01-01

Stabilized, non-aqueous cleaning compositions for microelectronics substrates

#159
20080287333
2008-11-20

Non-aqueous microelectronic cleaning compositions containing fructose

#160
20080280235
2008-11-13

Non-Aqueous Photoresist Stripper That Inhibits Galvanic Corrosion

#161
20080234162
2008-09-25

SEMICONDUCTOR ETCH RESIDUE REMOVER AND CLEANSING COMPOSITIONS

#162
20080214002
2008-09-04

Manufacturing method for semiconductor device

#163
20080171682
2008-07-17

Compositions for cleaning ion implanted photoresist in front end of line applications

#164
20080161217
2008-07-03

Stripper for coating layer

#165
20080149135
2008-06-26

WET PHOTORESIST STRIPPING PROCESS AND APPARATUS

#166
20080139436
2008-06-12

Two step cleaning process to remove resist, etch residue, and copper oxide from substrates having copper and low-K dielectric material

#167
20080103078
2008-05-01

Non-aqueous, non-corrosive microelectronic cleaning compositions

#168
20080085480
2008-04-10

Method to remove resist layers from a substrate

#169
20080058238
2008-03-06

SUPERCRITICAL FLUID CLEANING OF SEMICONDUCTOR SUBSTRATES

#170
20080026585
2008-01-31

Composition for removing a film, method of removing a film using the same, and method of forming a pattern using the same

#171
20080011714
2008-01-17

Photoresist stripping solution and a method of stripping photoresists using the same

#172
20070272275
2007-11-29

Composition and method for photoresist removal

#173
20070243773
2007-10-18

DYNAMIC MULTI-PURPOSE COMPOSITION FOR THE REMOVAL OF PHOTORESISTS AND METHOD FOR ITS USE

#174
20070207938
2007-09-06

Cleaning compositions and methods of use thereof

#175
20070191243
2007-08-16

REMOVAL OF SILICA BASED ETCH RESIDUE USING AQUEOUS CHEMISTRY

#176
20070161528
2007-07-12

pH buffered aqueous cleaning composition and method for removing photoresist residue

#177
20070111912
2007-05-17

Dynamic multi-purpose composition for the removal of photoresists and methods for its use

#178
20070093061
2007-04-26

SOLVENT REMOVAL OF PHOTORESIST MASK AND GOLD IMPREGNATED RESIDUE AND PROCESS

#179
20070087949
2007-04-19

Aqueous cleaning composition for removing residues and method using same

#180
20070066502
2007-03-22

Stripper for electronics

#181
20070037087
2007-02-15

Photoresist stripping solution and a method of stripping photoresists using the same

#182
20070027052
2007-02-01

Cleaning liquid used in photolithography and a method for treating substrate therewith

#183
20070004933
2007-01-04

Photoresist stripping solution and a method of stripping photoresists using the same

#184
20070000519
2007-01-04

Removal of residues for low-k dielectric materials in wafer processing

#185
20060270574
2006-11-30

Photoresist stripping agent

#186
20060255315
2006-11-16

Selective removal chemistries for semiconductor applications, methods of production and uses thereof

#187
20060237392
2006-10-26

Polymer remover

#188
20060205623
2006-09-14

Composition for photoresist stripping solution and process of photoresist stripping

#189
20060172906
2006-08-03

Aqueous based residue removers comprising fluoride

#190
20060154839
2006-07-13

Stripping and cleaning compositions for microelectronics

#191
20060142173
2006-06-29

Solvent compositions containing chlorofluoroolefins or fluoroolefins

#192
20060138399
2006-06-29

Removing solution

#193
20060128600
2006-06-15

Cleaning compound and method and system for using the cleaning compound

#194
20060124588
2006-06-15

System and method for reducing metal oxides with hydrogen radicals

#195
20060118522
2006-06-08

Etching composition and use thereof with feedback control of HF in BEOL clean

#196
20060094612
2006-05-04

Post etch cleaning composition for use with substrates having aluminum

#197
20060046944
2006-03-02

Composition for removing a photoresist residue and polymer residue, and residue removal process using same

#198
20060043070
2006-03-02

High temperature functioning stripper for cured difficult to remove photoresist coatings

#199
20060014110
2006-01-19

Photoresist stripping solution and a method of stripping photoresists using the same

#200
20060003910
2006-01-05

Composition and method comprising same for removing residue from a substrate

#201
20050263743
2005-12-01

Compositions and processes for photoresist stripping and residue removal in wafer level packaging

#202
20050236362
2005-10-27

Cleaning solution and manufacturing method for semiconductor device

#203
20050217697
2005-10-06

Aqueous stripping and cleaning composition

#204
20050202987
2005-09-15

Compositions for cleaning organic and plasma etched residues for semiconductor devices

#205
20050187118
2005-08-25

Cleaning solution, method for cleaning semiconductor substrate using the same, and method for forming metal wiring

#206
20050176603
2005-08-11

Microelectronic cleaning composition containing halogen oxygen acids, salts and derivatives thereof

#207
20050158664
2005-07-21

Method of integrating post-etching cleaning process with deposition for semiconductor device

#208
20050137103
2005-06-23

Stripper for cured negative-tone isoprene-based photoresist and bisbenzocyclobutene coatings

#209
20050119143
2005-06-02

Compositions for the removal of organic and inorganic residues

#210
20050101500
2005-05-12

Resist remover composition

#211
20050096246
2005-05-05

Solvent compositions containing chlorofluoroolefins

#212
20050084792
2005-04-21

Photoresist stripping solution and a method of stripping photoresists using the same

#213
20050032659
2005-02-10

Stripping agent composition for a resist

#214
20050032657
2005-02-10

Stripping and cleaning compositions for microelectronics

#215
20050019688
2005-01-27

Photoresist stripping solution and a method of stripping photoresists using the same