177125 ⎘
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Processing photosensitive materials; Apparatus therefor; Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
THINNER COMPOSITION, METHOD FOR SUBSTRATE PROCESSING AND MODIFIED PHOTORESIST
#2METHOD OF DEVELOPING PHOTORESIST
#3ELECTRONIC DEVICE MANUFACTURING AQUEOUS SOLUTION, METHOD FOR MANUFACTURING RESIST PATTERN AND METHOD FOR MANUFACTURING DEVICE
#4Interconnectable Tiling System
#5PHOTORESIST PATTERNING USING PLANAR TRIM LAYER
#6COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS, DEVELOPER COMPOSITION OF METAL CONTAINING RESISTS AND METHOD OF FORMING PATTERNS USING THE COMPOSITION
#7METHOD FOR REMOVING RESISTOR LAYER, AND METHOD OF MANUFACTURING SEMICONDUCTOR
#8ECO-FRIENDLY PHOTORESIST STRIPPER COMPOSITION
#9STRIPPER COMPOSITION AND METHOD FOR STRIPPING PHOTORESIST
#10TREATMENT LIQUID, METHOD FOR WASHING SUBSTRATE, AND METHOD FOR REMOVING RESIST
#11Interconnectable Tiling System
#12TREATMENT LIQUID, METHOD FOR WASHING SUBSTRATE, AND METHOD FOR REMOVING RESIST
#13Etching Composition And Method For EUV Mask Protective Structure
#14Acid for Reactive Development of Metal Oxide Resists
#15PHOTORESIST REMOVER COMPOSITIONS
#16Method for removing resistor layer, and method of manufacturing semiconductor
#17PROCESS SOLUTION COMPOSITION FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY AND PATTERN FORMING METHOD USING SAME
#18NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, PATTERN FORMATION METHOD, AND LAMINATED FILM
#19Interconnectable tiling system
#20Nozzle, substrate processing apparatus, and substrate processing method
#21Rinsing Composition and Method for Treating Surface of Photoresist Material Using Same
#22Composition comprising three alkanolamines and a hydroxylamine for removing etch residues
#23PROCESS LIQUID COMPOSITION FOR PHOTOLITHOGRAPHY AND PATTERN FORMING METHOD USING SAME
#24Rinse and method of use thereof for removing edge protection layers and residual metal hardmask components
#25Method for removing resist layer, and method of manufacturing semiconductor
#26Photoresist remover compositions
#27Treatment liquid, method for washing substrate, and method for removing resist
#28COMPOSITIONS FOR REMOVING ETCH RESIDUES, METHODS OF USING AND USE THEREOF
#29Method for removing resist layer, and method of manufacturing semiconductor
#30Cleaning composition, cleaning method, and method for manufacturing semiconductor
#31Patterning method and method for manufacturing array substrate
#32Imidazolidinethione-containing compositions for post-ash residue removal and/or for oxidative etching of a layer or mask comprising TiN
#33Photoresist remover compositions
#34Photoresist remover compositions
#35Interconnectable tiling system
#36Resist composition and patterning process
#37Thermosetting silicon-containing compound, composition for forming a silicon-containing film, and patterning process
#38Photoresist stripping composition and method
#39Stripping compositions for removing photoresists from semiconductor substrates
#40Solvents for use in the electronics industry
#41Sulfoxide/glycol ether based solvents for use in the electronics industry
#42Photoresist stripper
#43Stripper solutions and methods of using stripper solutions
#44Treatment liquid, method for washing substrate, and method for removing resist
#45Monomer, polymer, resist composition, and patterning process
#46Treatment liquid, method for washing substrate, and method for removing resist
#47Treatment liquid, method of manufacturing treatment liquid, pattern forming method, and method of manufacturing electronic device
#48Cleaning composition
#49Salt and photoresist composition containing the same
#50COMPOSITIONS CONTAINING CHLOROFLUOROOLEFINS OR FLUOROOLEFINS
#51Thermosetting coloring composition and method of producing color filter for solid-state imaging element
#52Compositions for removing photoresist
#53Photoresist stripper composition for manufacturing liquid crystal display
#54Defect reduction rinse solution containing ammonium salts of sulfoesters
#55Composition for removing resist
#56Cleaning compositions for removing post etch residue
#57Chemically amplified resist composition and patterning process
#58Resist stripper and resist stripping method
#59Cleaning formulations
#60Compositions and methods that promote charge complexing copper protection during low pKa driven polymer stripping
#61Metal-compound-removing solvent and method in lithography
#62Stripping compositions for removing photoresists from semiconductor substrates
#63COMPOSITION FOR REMOVING PHOTORESIST AND METHOD FOR REMOVING PHOTORESIST USING THE SAME
#64Process for producing structured coatings
#65Photolithographic patterning of organic electronic devices
#66Composition for resist patterning and method for forming pattern using same
#67Stripper composition for removing photoresists and method for stripping photoresists using the same
#68Surfactants and methods of making and using same
#69Compositions containing chlorofluoroolefins or fluoroolefins
#70Photoresist cleaning composition used in photolithography and a method for treating substrate therewith
#71Surfactants and methods of making and using same
#72Apparatus for advanced packaging applications
#73Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate
#74Removal composition for selectively removing hard mask and methods thereof
#75METHOD FOR WET STRIPPING SILICON-CONTAINING ORGANIC LAYERS
#76Removal composition for selectively removing hard mask and methods thereof
#77NOVEL PHOTORESIST STRIPPER AND APPLICATION PROCESS THEREOF
#78Stripping compositions for removing photoresists from semiconductor substrates
#79Stripping compositions having high WN/W etching selectivity
#80Semi-aqueous photoresist or semiconductor manufacturing residue stripping and cleaning composition with improved silicon passivation
#81PATTERN PEELING METHOD, ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
#82Method of patterning a device
#83Compositions of methyl perfluoroheptene ethers, 1,1,1,2,2,3,4,5,5,5-decafluoropentane and trans-1,2-dichloroethylene and uses thereof
#84Compositions containing chlorofluoroolefins or fluoroolefins
#85Cleaning formulations for removing residues on surfaces
#86Photoresist stripping and cleaning composition, method of its preparation and its use
#87Oxidizing aqueous cleaner for the removal of post-etch residues
#88Apparatus for advanced packaging applications
#89Fluorinated photoresist with integrated sensitizer
#90Compositions containing chlorfluoroolefins or fluoroolefins
#91Method of patterning a device
#92Photo resist (PR) profile control
#93Dynamic multi-purpose composition for the removal of photoresists and method for its use
#94Cleaning formulations
#95Photo lithographic rinse solution and method of manufacturing a semiconductor device using the same
#96Nonaqueous cleaning liquid and method for etching processing of silicon substrate
#97Aqueous, nitrogen-free cleaning composition and its use for removing residues and contaminants from semiconductor substrates suitable for manufacturing microelectronic devices
#98Metal conservation with stripper solutions containing resorcinol
#99Water-rich stripping and cleaning formulation and method for using same
#100PROCESSESS AND COMPOSITIONS FOR REMOVING SUBSTANCES FROM SUBSTRATES
#101Compositions containing chlorofluoroolefins or fluoroolefins
#102Dynamic multi-purpose compositions for the removal of photoresists and method for its use
#103Aqueous cerium-containing solution having an extended bath lifetime for removing mask material
#104Photoresist and post etch residue cleaning solution
#105Resist remover composition and method for removing resist using the composition
#106Processing agent composition for semiconductor surface and method for processing semiconductor surface using same
#107Cleaning Compound and Method and System for Using the Cleaning Compound
#108Compositions and methods for removing organic substances
#109Composition and method for treating semiconductor substrate surface
#110Processess and compositions for removing substances from substrates
#111Method for washing device substrate
#112CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES
#113Stripping compositions for cleaning ion implanted photoresist from semiconductor device wafers
#114Solvent compositions containing chlorofluoroolefins or fluoroolefins
#115Chemical Composition and Methods for Removing Epoxy-Based Photoimageable Coatings Utilized In Microelectronic Fabrication
#116PHOTORESIST STRIPPING SOLUTION
#117Water-rich stripping and cleaning formulation and method for using same
#118Gluconic acid containing photoresist cleaning composition for multi-metal device processing
#119Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors
#120Cleaning liquid for lithography and method for forming wiring
#121Oxidizing aqueous cleaner for the removal of post-etch residues
#122SUBSTRATE TREATING SOLUTION AND METHOD EMPLOYING THE SAME FOR TREATING A RESIST SUBSTRATE
#123PHOTORESIST STRIPPING SOLUTIONS
#124Formulations and method for post-CMP cleaning
#125Composition and method for treating semiconductor substrate surface
#126Semi-aqueous stripping and cleaning formulation for metal substrate and methods for using same
#127Semiconductor surface treating agent composition and method for treating semiconductor surface using the semiconductor surface treating agent composition
#128Cleaning liquid used in photolithography and a method for treating substrate therewith
#129Method for making a photoresist stripping solution comprising an organic sulfonic acid and an organic hydrocarbon solvent
#130Solution for removing residue after semiconductor dry process and method of removing the residue using the same
#131Compositions and methods for removing organic substances
#132Compositions and methods for removing organic substances
#133Photoresist stripping solution and a method of stripping photoresists using the same
#134STRIPPING AGENT FOR RESIST FILM ON/ABOVE CONDUCTIVE POLYMER, METHOD FOR STRIPPING RESIST FILM, AND SUBSTRATE HAVING PATTERNED CONDUCTIVE POLYMER
#135Cleaning compound and method and system for using the cleaning compound
#136Compositions for reducing metal etch rates using stripper solutions containing copper salts
#137DYNAMIC MULTI-PURPOSE COMPOSITION FOR THE REMOVAL OF PHOTORESISTS
#138Liquid composition for removing photoresist residue and polymer residue
#139Solvent compositions containing chlorofloroolefins or fluoroolefins
#140Photoresist stripper composition for semiconductor manufacturing
#141Semi-aqueous stripping and cleaning composition containing aminobenzenesulfonic acid
#142Stripper For Copper/Low k BEOL Clean
#143Stripper for dry film removal
#144Rapid prototyping method and radiation-curable composition for use therein
#145Oxidizing aqueous cleaner for the removal of post-etch residues
#146DENSE FLUID COMPOSITIONS FOR REMOVAL OF HARDENED PHOTORESIST, POST-ETCH RESIDUE AND/OR BOTTOM ANTI-REFLECTIVE COATING
#147DYNAMIC MULTI-PURPOSE COMPOSITION FOR THE REMOVAL OF PHOTORESISTS AND METHOD FOR ITS USE
#148Nanoelectronic and microelectronic cleaning compositions
#149Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors
#150Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant
#151PHOTORESIST STRIP WITH OZONATED ACETIC ACID SOLUTION
#152Compounds for Photoresist Stripping
#153WET PHOTORESIST STRIP FOR WAFER BUMPING WITH OZONATED ACETIC ANHYDRIDE
#154Metal conservation with stripper solutions containing resorcinol
#155Reduced metal etch rates using stripper solutions containing a copper salt
#156Method for washing device substrate
#157METHOD FOR REMOVING CONTAMINATION WITH FLUORINATED COMPOSITIONS
#158Stabilized, non-aqueous cleaning compositions for microelectronics substrates
#159Non-aqueous microelectronic cleaning compositions containing fructose
#160Non-Aqueous Photoresist Stripper That Inhibits Galvanic Corrosion
#161SEMICONDUCTOR ETCH RESIDUE REMOVER AND CLEANSING COMPOSITIONS
#162Manufacturing method for semiconductor device
#163Compositions for cleaning ion implanted photoresist in front end of line applications
#164Stripper for coating layer
#165WET PHOTORESIST STRIPPING PROCESS AND APPARATUS
#166Two step cleaning process to remove resist, etch residue, and copper oxide from substrates having copper and low-K dielectric material
#167Non-aqueous, non-corrosive microelectronic cleaning compositions
#168Method to remove resist layers from a substrate
#169SUPERCRITICAL FLUID CLEANING OF SEMICONDUCTOR SUBSTRATES
#170Composition for removing a film, method of removing a film using the same, and method of forming a pattern using the same
#171Photoresist stripping solution and a method of stripping photoresists using the same
#172Composition and method for photoresist removal
#173DYNAMIC MULTI-PURPOSE COMPOSITION FOR THE REMOVAL OF PHOTORESISTS AND METHOD FOR ITS USE
#174Cleaning compositions and methods of use thereof
#175REMOVAL OF SILICA BASED ETCH RESIDUE USING AQUEOUS CHEMISTRY
#176pH buffered aqueous cleaning composition and method for removing photoresist residue
#177Dynamic multi-purpose composition for the removal of photoresists and methods for its use
#178SOLVENT REMOVAL OF PHOTORESIST MASK AND GOLD IMPREGNATED RESIDUE AND PROCESS
#179Aqueous cleaning composition for removing residues and method using same
#180Stripper for electronics
#181Photoresist stripping solution and a method of stripping photoresists using the same
#182Cleaning liquid used in photolithography and a method for treating substrate therewith
#183Photoresist stripping solution and a method of stripping photoresists using the same
#184Removal of residues for low-k dielectric materials in wafer processing
#185Photoresist stripping agent
#186Selective removal chemistries for semiconductor applications, methods of production and uses thereof
#187Polymer remover
#188Composition for photoresist stripping solution and process of photoresist stripping
#189Aqueous based residue removers comprising fluoride
#190Stripping and cleaning compositions for microelectronics
#191Solvent compositions containing chlorofluoroolefins or fluoroolefins
#192Removing solution
#193Cleaning compound and method and system for using the cleaning compound
#194System and method for reducing metal oxides with hydrogen radicals
#195Etching composition and use thereof with feedback control of HF in BEOL clean
#196Post etch cleaning composition for use with substrates having aluminum
#197Composition for removing a photoresist residue and polymer residue, and residue removal process using same
#198High temperature functioning stripper for cured difficult to remove photoresist coatings
#199Photoresist stripping solution and a method of stripping photoresists using the same
#200Composition and method comprising same for removing residue from a substrate
#201Compositions and processes for photoresist stripping and residue removal in wafer level packaging
#202Cleaning solution and manufacturing method for semiconductor device
#203Aqueous stripping and cleaning composition
#204Compositions for cleaning organic and plasma etched residues for semiconductor devices
#205Cleaning solution, method for cleaning semiconductor substrate using the same, and method for forming metal wiring
#206Microelectronic cleaning composition containing halogen oxygen acids, salts and derivatives thereof
#207Method of integrating post-etching cleaning process with deposition for semiconductor device
#208Stripper for cured negative-tone isoprene-based photoresist and bisbenzocyclobutene coatings
#209Compositions for the removal of organic and inorganic residues
#210Resist remover composition
#211Solvent compositions containing chlorofluoroolefins
#212Photoresist stripping solution and a method of stripping photoresists using the same
#213Stripping agent composition for a resist
#214Stripping and cleaning compositions for microelectronics
#215Photoresist stripping solution and a method of stripping photoresists using the same