G03F7/70391 - CPC Classification Index

ClassID:

177175 ⎘

G03F7/70391 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure apparatus for microlithography; Imaging systems not otherwise provided for, e.g. multiphoton lithography; Imaging systems comprising means for converting one type of radiation into another type of radiation, systems comprising mask with photo-cathode; Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams Addressable array sources specially adapted to produce patterns, e.g. addressable LED arrays

Recent Application in this class:

20250028251

2025-01-23

LITHOGRAPHY SYSTEM AND RELATED METHODS FOR FORMING STRUCTURES OF DIFFERENT DEPTHS AND SHAPES

20240329541

2024-10-03

CYCLIC EXPOSURE SCANNING SYSTEM HAVING DISTRIBUTED MULTI-LENS AND METHOD THEREOF

20240242994

2024-07-18

CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

20240184217

2024-06-06

METHOD AND APPARATUS FOR CORRECTING PROXIMITY EFFECT OF ELECTRON BEAM

20240176244

2024-05-30

Method and apparatus for direct writing photoetching by parallel interpenetrating super-resolution high-speed laser

20210325787

2021-10-21

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE USING THE SAME

20210157245

2021-05-27

Optical maskless

20210011390

2021-01-14

Dynamic cooling control for thermal stabilization for lithography system

20200301288

2020-09-24

Reserving spatial light modulator sections to address field non-uniformities

#10

20200272063

2020-08-27

Dynamic cooling control for thermal stabilization for lithography system

#11

20200201188

2020-06-25

Image exposure device

#12

20190384161

2019-12-19

Liquid masks for microfabrication processes

#13

20190332017

2019-10-31

Systems and methods of using solid state emitter arrays

#14

20190294051

2019-09-26

Spatial light modulator with variable intensity diodes

#15

20190227442

2019-07-25

Apparatus for direct write maskless lithography

#16

20190011841

2019-01-10

Method and apparatus for direct write maskless lithography

#17

20190004435

2019-01-03

Method and apparatus for direct write maskless lithography

#18

20180373159

2018-12-27

Method and apparatus for direct write maskless lithography

#19

20180188655

2018-07-05

Micro LED array illumination source

#20

20180017877

2018-01-18

Light source arrangement for a photolithography exposure system and photolithography exposure system

#21

20170261862

2017-09-14

Maskless lithographic apparatus measuring accumulated amount of light

#22

20170038690

2017-02-09

Exposure head, exposure apparatus and method of operating an exposure head

#23

20170017163

2017-01-19

Beam exposure device

#24

20160291480

2016-10-06

Method for regulating a light source of a photolithography exposure system and exposure assembly for a photolithography device

#25

20160077449

2016-03-17

Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure device and the maskless exposure method

#26

20160048081

2016-02-18

Maskless exposure method and a maskless exposure device for performing the exposure method

#27

20150370177

2015-12-24

Lithographic apparatus and device manufacturing method

#28

20150227036

2015-08-13

Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program

#29

20150168840

2015-06-18

Method for optical transmission of a structure into a recording medium

#30

20150062547

2015-03-05

Lithography apparatus, a device manufacturing method, a method of manufacturing an attenuator

#31

20140354970

2014-12-04

Lithographic apparatus and device manufacturing method

#32

20140347641

2014-11-27

Device, lithographic apparatus, method for guiding radiation and device manufacturing method

#33

20140340666

2014-11-20

Lithographic apparatus and device manufacturing method

#34

20140285786

2014-09-25

Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method of calculating setpoint data and a computer program

#35

20140285785

2014-09-25

Lithographic apparatus, device manufacturing method and computer program

#36

20140285782

2014-09-25

Lithographic apparatus and device manufacturing method

#37

20140076105

2014-03-20

Gantry apparatus

#38

20140055764

2014-02-27

Lithographic apparatus, programmable patterning device and lithographic method

#39

20140049978

2014-02-20

LED-based photolithographic illuminator with high collection efficiency

#40

20140009746

2014-01-09

Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method

#41

20130335721

2013-12-19

Measurement of the position of a radiation beam spot in lithography

#42

20130250267

2013-09-26

Lithographic apparatus and device manufacturing method

#43

20130107238

2013-05-02

Lithographic apparatus and device manufacturing method

#44

20130021593

2013-01-24

Substrate handling apparatus and lithographic apparatus

#45

20120320359

2012-12-20

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

#46

20120314194

2012-12-13

Lithographic apparatus and device manufacturing method

#47

20120307223

2012-12-06

Lithographic apparatus and device manufacturing method

#48

20120307222

2012-12-06

Lithographic apparatus and device manufacturing method

#49

20120140194

2012-06-07

Maskless Exposure Apparatus

#50

20120099101

2012-04-26

Gantry apparatus

#51

20120063131

2012-03-15

Illumination system for use in a stereolithography apparatus

#52

20120057143

2012-03-08

Illumination system for use in a stereolithography apparatus

#53

20120050702

2012-03-01

Mask-less method and structure for patterning photosensitive material using optical fibers

#54

20120026478

2012-02-02

System and method for manufacturing three dimensional integrated circuits

#55

20110304683

2011-12-15

Laser driving device, optical scanning device, and image forming apparatus

#56

20110294074

2011-12-01

EXPOSURE APPARATUS AND EXPOSING METHOD USING THE APPARATUS

#57

20110188016

2011-08-04

Lithographic apparatus, programmable patterning device and lithographic method

#58

20100320400

2010-12-23

EXPOSURE DEVICE

#59

20100308024

2010-12-09

Writing apparatuses and methods

#60

20100279231

2010-11-04

Method for marking objects

#61

20100249979

2010-09-30

Device and method for producing a three-dimensional object by means of mask exposure

#62

20100238260

2010-09-23

BIDIRECTIONAL IMAGING WITH VARYING INTENSITIES

#63

20100220306

2010-09-02

Solid-state array for lithography illumination

#64

20100183984

2010-07-22

MULTIPLEXING OF PULSED SOURCES

#65

20100142757

2010-06-10

Method and device using rotating printing arm to project or view image across a workpiece

#66

20100045954

2010-02-25

Controllable radiation lithographic apparatus and method

#67

20090309483

2009-12-17

Photocathode lighting device, method for manufacturing the same and exposure apparatus using photocathode lighting device

#68

20090257040

2009-10-15

Optical element with multiple primary light sources

#69

20090244510

2009-10-01

PROCESS AND APPARATUS FOR THE PRODUCTION OF COLLIMATED UV RAYS FOR PHOTOLITHOGRAPHIC TRANSFER

#70

20090244254

2009-10-01

Image recording apparatus and image recording method

#71

20090168035

2009-07-02

Exposure method and exposure apparatus for photosensitive film

#72

20090002669

2009-01-01

ULTRAVIOLET LIGHT-EMITTING DIODE EXPOSURE APPARATUS FOR MICROFABRICATION

#73

20080298542

2008-12-04

Image Producing Methods and Image Producing Devices

#74

20080254371

2008-10-16

Method For Producing an Image on a Material Sensitive to a Used Radiation, Method For Obtaining a Binary Hologram (Variants) and Methods For Producing an Image by Using Said Hologram

#75