Patents-Review.com
ClassID:

177218 ⎘

G03F7/7075 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure apparatus for microlithography; Handling of masks or wafers; Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask Handling workpieces outside exposure position, e.g. SMIF box

Recent Application in this class:
#1
20260079409
2026-03-19

SUBSTRATE CONVEYANCE APPARATUS AND POSITION TEACHING METHOD

 #2
20260056481
2026-02-26

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING SAME

 #3
20260016759
2026-01-15

SEMICONDUCTOR PROCESS APPARATUS

 #4
20250390030
2025-12-25

TEMPERATURE CONTROLLING APPARATUS

 #5
20250355372
2025-11-20

APPARATUS FOR TREATING SUBSTRATE

 #6
20250236470
2025-07-24

TRANSFER APPARATUS AND WAFER STORAGE CONTAINER CLEANING APPARATUS

 #7
20250233009
2025-07-17

PLACEMENT MEMBER

 #8
20250201586
2025-06-19

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

 #9
20250130511
2025-04-24

COATING AND DEVELOPING DEVICE

 #10
20250044713
2025-02-06

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #11
20240404780
2024-12-05

SEMICONDUCTOR PROCESSING APPARATUS

 #12
20240393705
2024-11-28

SUBSTRATE PROCESSING APPARATUS

 #13
20240377763
2024-11-14

FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APPARATUS, TRANSPORT SYSTEM, EXPOSURE SYSTEM, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #14
20240355644
2024-10-24

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

 #15
20240310740
2024-09-19

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS

 #16
20240274313
2024-08-15

STRUCTURES FOR PATTERNING SUBSTRATES AND METHODS AND SYSTEMS FOR THEIR MANUFACTURE

 #17
20240272562
2024-08-15

SUBSTRATE TREATMENT APPARATUS

 #18
20240248417
2024-07-25

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #19
20240201602
2024-06-20

SUBSTRATE PROCESSING APPARATUS

 #20
20240186160
2024-06-06

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

 #21
20240118626
2024-04-11

DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSING METHOD, STORAGE MEDIUM, INFORMATION PROCESSING APPARATUS, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE

 #22
20240036482
2024-02-01

SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD

 #23
20240019790
2024-01-18

GRIPPER AND LITHOGRAPHIC APPARATUS COMPRISING THE GRIPPER

 #24
20230260815
2023-08-17

MULTIPLE SUBSTRATE HANDLING SYSTEM AND METHOD

 #25
20230100048
2023-03-30

Temperature control device and temperature control method

 #26
20230057774
2023-02-23

Wafer processing apparatus and wafer transfer method

 #27
20220390829
2022-12-08

Pellicle demounting method, and pellicle demounting device

 #28
20220328331
2022-10-13

System for a semiconductor fabrication facility and method for operating the same

 #29
20220301912
2022-09-22

SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE TRANSPORT METHOD

 #30
20220214626
2022-07-07

Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method

 #31
20220137516
2022-05-05

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

 #32
20210354309
2021-11-18

Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device

 #33
20210294221
2021-09-23

Apparatus for containing a substrate and method of manufacturing the apparatus

 #34
20210149308
2021-05-20

Method for fast loading substrates in a flat panel tool

 #35
20210118709
2021-04-22

System for a semiconductor fabrication facility and method for operating the same

 #36
20210116821
2021-04-22

Reticle retaining system

 #37
20210103224
2021-04-08

Coating and developing apparatus and coating and developing method

 #38
20210033989
2021-02-04

Apparatus for containing a substrate and method of manufacturing the apparatus

 #39
20200393770
2020-12-17

Lithographic apparatus and method

 #40
20200338747
2020-10-29

Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device

 #41
20200243365
2020-07-30

Substrate processing apparatus and substrate processing method

 #42
20200105556
2020-04-02

System for a semiconductor fabrication facility and method for operating the same

 #43
20200103760
2020-04-02

Method for fast loading substrates in a flat panel tool

 #44
20200041913
2020-02-06

Substrate processing apparatus, substrate processing method, and storage medium

 #45
20190391499
2019-12-26

Lithographic apparatus, method of transferring a substrate and device manufacturing method

 #46
20190355627
2019-11-21

Methods and apparatus for semiconductor sample workflow

 #47
20190329420
2019-10-31

Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device

 #48
20190109028
2019-04-11

Substrate transfer device, transfer method and photolithography apparatus

 #49
20190033733
2019-01-31

Substrate handling system and lithographic apparatus

 #50
20190006214
2019-01-03

System for a semiconductor fabrication facility and method for operating the same

 #51
20180364596
2018-12-20

Method for creating vacuum in load lock chamber

 #52
20180364581
2018-12-20

EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR PRODUCING DEVICE, AND OPTICAL PART

 #53
20180350652
2018-12-06

Conveyance hand, conveyance apparatus, lithography apparatus, manufacturing method of article, and holding mechanism

 #54
20180348653
2018-12-06

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

 #55
20180257237
2018-09-13

Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device

 #56
20180247840
2018-08-30

Apparatus and method for transferring a substrate

 #57
20180215048
2018-08-02

End effector

 #58
20180188565
2018-07-05

Method and device for processing photoresist component

 #59
20180164700
2018-06-14

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER STORAGE MEDIUM

 #60
20180076066
2018-03-15

Substrate processing method, substrate processing system and substrate processing apparatus

 #61
20180059556
2018-03-01

Lithographic apparatus

 #62
20180059554
2018-03-01

Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method

 #63
20180052393
2018-02-22

Substrate processing apparatus including transport device

 #64
20170297203
2017-10-19

Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device

 #65
20170285492
2017-10-05

Conveyance apparatus, lithography apparatus, and method of manufacturing article

 #66
20170285484
2017-10-05

Mask protection device, exposure apparatus, and method for manufacturing device

 #67
20170108781
2017-04-20

Lithographic apparatus, method of transferring a substrate and device manufacturing method

 #68
20170052463
2017-02-23

Lithographic apparatus and device manufacturing method

 #69
20170010546
2017-01-12

Lithographic apparatus

 #70
20170008017
2017-01-12

Substrate processing apparatus

 #71
20160370716
2016-12-22

Sensor system, substrate handling system and lithographic apparatus

 #72
20160274469
2016-09-22

Substrate processing apparatus, substrate processing method and storage medium

 #73
20160259254
2016-09-08

Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method

 #74
20160252828
2016-09-01

Exposure apparatus, exposure method, and method for producing device

 #75
20160243707
2016-08-25

Conveying hand and lithography apparatus

 #76
20160139514
2016-05-19

Lithographic apparatus and device manufacturing method

 #77
20160137427
2016-05-19

Load lock system and method for transferring substrates in a lithography system

 #78
20160023356
2016-01-28

Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device

 #79
20160004173
2016-01-07

Apparatus for transferring a substrate in a lithography system

 #80
20150355558
2015-12-10

Lithography apparatus and article manufacturing method

 #81
20150321356
2015-11-12

Enclosure for a target processing machine

 #82
20150286151
2015-10-08

Exposure apparatus, exposure method, method for producing device, and optical part

 #83
20150192864
2015-07-09

Lithographic apparatus

 #84
20150109600
2015-04-23

Lithography apparatus, determination method, and method of manufacturing article

 #85
20150086923
2015-03-26

Substrate processing method

 #86
20150009483
2015-01-08

Mask clamping apparatus and method of manufacturing mask

 #87
20150009479
2015-01-08

Lithographic apparatus

 #88
20140320837
2014-10-30

Monitoring apparatus and method particularly useful in photolithographically processing substrates

 #89
20140306124
2014-10-16

Yellow room system

 #90
20140055763
2014-02-27

Exposure apparatus, exposure method, and method for producing device

 #91
20140022523
2014-01-23

Exposure apparatus, exposure method, method for producing device, and optical part

 #92
20130293864
2013-11-07

Exposure apparatus and device fabrication method

 #93
20130215408
2013-08-22

Lithographic apparatus and device manufacturing method

 #94
20130177857
2013-07-11

Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method

 #95
20130107236
2013-05-02

Lithographic apparatus and device manufacturing method

 #96
20130094006
2013-04-18

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #97
20130044305
2013-02-21

Apparatus for transferring a substrate in a lithography system

 #98
20130034421
2013-02-07

Method of processing a substrate in a lithography system

 #99
20120307217
2012-12-06

System and method for treating substrate

 #100
20120274916
2012-11-01

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

 #101
20120251957
2012-10-04

Substrate transfer method for performing processes including photolithography sequence

 #102
20120249990
2012-10-04

Substrate processing apparatus

 #103
20120224154
2012-09-06

Exposure apparatus, exposure method, and method for producing device

 #104
20120162628
2012-06-28

Actuator

 #105
20120140191
2012-06-07

Coating and developing apparatus, coating and developing method, and storage medium

 #106
20120064461
2012-03-15

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, FLAT-PANEL DISPLAY MANUFACTURING METHOD, AND OBJECT EXCHANGE METHOD

 #107
20110280703
2011-11-17

Apparatus and method for contactless handling of an object

 #108
20110279806
2011-11-17

Lithographic apparatus and device manufacturing method

 #109
20110279804
2011-11-17

Lithographic apparatus and device manufacturing method

 #110
20110261330
2011-10-27

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #111
20110244396
2011-10-06

EXPOSURE APPARATUS, EXCHANGE METHOD OF OBJECT, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #112
20110241259
2011-10-06

Lithographic apparatus and device manufacturing method

 #113
20110236809
2011-09-29

Method for examining a wafer with regard to a contamination limit and EUV projection exposure system

 #114
20110209826
2011-09-01

Substrate processing method, computer-readable storage medium, and substrate processing system

 #115
20110149256
2011-06-23

Object with an improved suitability for a plasma cleaning treatment

 #116
20110128515
2011-06-02

LITHOGRAPHIC APPARATUS AND SEALING DEVICE FOR A LITHOGRAPHIC APPARATUS

 #117
20110122393
2011-05-26

Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method

 #118
20110116070
2011-05-19

Exposure aparatus and method of manufacturing device to avoid collision between an elevating member of a substrate stage and a conveyance arm

 #119
20110085150
2011-04-14

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #120
20110069294
2011-03-24

APPARATUS AND METHOD FOR EXPOSING EDGE OF SUBSTRATE

 #121
20110037957
2011-02-17

Monitoring apparatus and method particularly useful in photolithographically processing substrates

 #122
20110032505
2011-02-10

Robot for in-vacuum use

 #123
20110008718
2011-01-13

SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE, EXPOSURE APPARATUS USING SAME, AND DEVICE MANUFACTURING METHOD

 #124
20110007296
2011-01-13

Exposure apparatus and device fabrication method

 #125
20110001953
2011-01-06

Transport apparatus and exposure apparatus

 #126
20100296070
2010-11-25

Exposure apparatus, exposure method, and device manufacturing method

 #127
20100245789
2010-09-30

Exposure apparatus

 #128
20100232781
2010-09-16

Coating and developing apparatus, coating and developing method, and storage medium

 #129
20100195066
2010-08-05

System and method for treating substrate

 #130
20100192844
2010-08-05

Apparatus and method for treating substrate

 #131
20100183962
2010-07-22

Method for examining a wafer with regard to a contamination limit and EUV projection exposure system

 #132
20100182586
2010-07-22

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING DEVICE USING SAME

 #133
20100159142
2010-06-24

Substrate processing apparatus and substrate processing method

 #134
20100085553
2010-04-08

Lithographic apparatus and device manufacturing method utilizing a substrate handler

 #135
20100075054
2010-03-25

Substrate processing apparatus

 #136
20100061718
2010-03-11

Coating and developing apparatus, coating and developing method, and storage medium

 #137
20090305174
2009-12-10

Method of forming resist pattern

 #138
20090284730
2009-11-19

Substrate handler, lithographic apparatus and device manufacturing method

 #139
20090279059
2009-11-12

Exposure apparatus adjusting method, exposure apparatus, and device fabricating method

 #140
20090231558
2009-09-17

Monitoring apparatus and method particularly useful in photolithographically processing substrates

 #141
20090225292
2009-09-10

Exposure apparatus and device manufacturing method

 #142
20090219504
2009-09-03

SUBSTRATE CONVEYOR APPARATUS, SUBSTRATE CONVEYANCE METHOD AND EXPOSURE APPARATUS

 #143
20090214963
2009-08-27

Substrate processing method, computer-readable storage medium, and substrate processing system

 #144
20090213347
2009-08-27

Article loading/unloading method and article loading/unloading device, exposure method and exposure apparatus, and method of manufacturing device

 #145
20090185151
2009-07-23

Substrate processing system and substrate transfer method

 #146
20090079951
2009-03-26

Lithographic apparatus and device manufacturing method

 #147
20090075209
2009-03-19

Device manufacturing apparatus and device manufacturing method

 #148
20090059188
2009-03-05

Exposure apparatus

 #149
20090059187
2009-03-05

Coating and developing apparatus, coating and developing method, and storage medium

 #150
20090051370
2009-02-26

Method of adjusting moving position of transfer arm and position detecting jig

 #151
20090033906
2009-02-05

STAGE APPARATUS, EXPOSURE APPARATUS, STAGE CONTROL METHOD, EXPOSURE METHOD, AND DEVICE FABRICATING METHOD

 #152
20090009746
2009-01-08

Lithographic apparatus and device manufacturing method

 #153
20090004077
2009-01-01

Apparatus and Method for Preventing Haze Growth on a Surface of a Substrate

 #154
20080297758
2008-12-04

Lithographic support structure

 #155
20080278697
2008-11-13

Lithographic apparatus and device manufacturing method

 #156
20080233487
2008-09-25

Method and System for Optimizing Lithography Focus and/or Energy Using a Specially-Designed Optical Critical Dimension Pattern

 #157
20080220621
2008-09-11

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

 #158
20080186464
2008-08-07

Processing apparatus and device manufacturing method

 #159
20080143996
2008-06-19

Processing apparatus with conveyer and controller to output request signal and stop instruction signal

 #160
20080138177
2008-06-12

Load lock and method for transferring objects

 #161
20080117390
2008-05-22

Coating/developing apparatus and substrate transfer method

 #162
20080106707
2008-05-08

Exposure apparatus, exposure method, and method for producing device

 #163
20080079925
2008-04-03

PROCESSING APPARATUS

 #164
20080043229
2008-02-21

Monitoring apparatus and method particularly useful in photolithographically

 #165
20080041694
2008-02-21

Buffer station for stocker system

 #166
20080035237
2008-02-14

Gas filling facility for photomask pod or the like

 #167
20080023656
2008-01-31

Integrated thermal unit having a shuttle with a temperature controlled surface

 #168
20070298331
2007-12-27

Gas filling apparatus for photomask box

 #169
20070296940
2007-12-27

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #170
20070253710
2007-11-01

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS

 #171
20070242242
2007-10-18

Exposure apparatus, exposure method, method for producing device, and optical part

 #172
20070190437
2007-08-16

SUBSTRATE PROCESSING APPARATUS

 #173
20070185687
2007-08-09

Transportable container including an internal environment monitor

 #174
20070171391
2007-07-26

Exposure apparatus and method for producing device

 #175
20070159615
2007-07-12

Object transfer apparatus, exposure apparatus, object temperature control apparatus, object transfer method, and microdevice manufacturing method

 #176
20070153246
2007-07-05

Apparatus and method for exposing edge of substrate

 #177
20070139629
2007-06-21

Lithographic apparatus and method for manufacturing a device

 #178
20070115450
2007-05-24

Exposure apparatus, exposure method, method for producing device, and optical part

 #179
20070110916
2007-05-17

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #180
20070095791
2007-05-03

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #181
20070092651
2007-04-26

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #182
20070092646
2007-04-26

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

 #183
20070070324
2007-03-29

Lithographic apparatus, device manufacturing method and device manufactured thereby

 #184
20070052942
2007-03-08

Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method

 #185
20070046911
2007-03-01

Exposure apparatus

 #186
20070038327
2007-02-15

Semiconductor wafer processing apparatus and method for processing batch of wafers having variable number of wafer lots

 #187
20070008512
2007-01-11

Substrate handler, lithographic apparatus and device manufacturing method

 #188
20070002516
2007-01-04

Container and method of transporting substrate using the same

 #189
20070002297
2007-01-04

Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination

 #190
20060287200
2006-12-21

Substrate processing system and substrate processing method

 #191
20060257553
2006-11-16

Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method

 #192
20060256316
2006-11-16

Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method

 #193
20060252270
2006-11-09

Lithographic apparatus and device manufacturing method utilizing a flat panel display handler with conveyor device and substrate handler

 #194
20060250602
2006-11-09

Substrate carrying apparatus, exposure apparatus, and device manufacturing method

 #195
20060205114
2006-09-14

Packing material for wafer

 #196
20060201616
2006-09-14

Coating and developing system

 #197
20060193630
2006-08-31

Monitoring apparatus and method particularly useful in photolithographically

 #198
20060169208
2006-08-03

Substrate processing apparatus and substrate processing method

 #199
20060158650
2006-07-20

Substrate processing apparatus

 #200
20060158634
2006-07-20

Lithographic apparatus and device manufacturing method utilizing a substrate handler

 #201
20060154183
2006-07-13

Exposure apparatus and method for producing device

 #202
20060152698
2006-07-13

Exposure apparatus and device manufacturing method

 #203
20060142890
2006-06-29

Substrate processing apparatus, method of controlling substrate, and exposure apparatus

 #204
20060139616
2006-06-29

Lithographic apparatus and device manufacturing method utilizing a substrate handler

 #205
20060137726
2006-06-29

Substrate treating apparatus

 #206
20060132733
2006-06-22

Lithographic apparatus and device manufacturing method

 #207
20060114444
2006-06-01

Pattern control system

 #208
20060103831
2006-05-18

Lithographic apparatus and device manufacturing method

 #209
20060098978
2006-05-11

Substrate processing apparatus and substrate processing method

 #210
20060098977
2006-05-11

Substrate processing apparatus

 #211
20060087638
2006-04-27

Substrate conveyor apparatus, substrate conveyance method and exposure apparatus

 #212
20060061750
2006-03-23

Lithographic apparatus, device manufacturing method and apparatus for processing an exchangeable object

 #213
20060061747
2006-03-23

Exposure apparatus and device manufacturing method

 #214
20060033904
2006-02-16

Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method

 #215
20050284535
2005-12-29

Transportable container including an internal environment monitor

 #216
20050281638
2005-12-22

Insertion device, lithographic apparatus with said insertion device and device manufacturing method

 #217
20050280798
2005-12-22

Lithographic apparatus and device manufacturing method

 #218
20050280797
2005-12-22

Lithographic apparatus and device manufacturing method

 #219
20050280788
2005-12-22

Lithographic apparatus and device manufacturing method

 #220
20050275998
2005-12-15

Conveying method, conveyance apparatus, exposure apparatus, and device manufacturing method

 #221
20050264791
2005-12-01

Wafer handling method for use in lithography patterning

 #222
20050225735
2005-10-13

Exposure apparatus and method for producing device

 #223
20050185160
2005-08-25

Transport system for a lithographic apparatus and device manufacturing method

 #224
20050162626
2005-07-28

Lithographic alignment system

 #225
20050157280
2005-07-21

Lithographic projection method and apparatus

 #226
20050140960
2005-06-30

Method and device for alignment of a substrate

 #227
20050128459
2005-06-16

Lithographic apparatus and device manufacturing method

 #228
20050121144
2005-06-09

Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers

 #229
20050115352
2005-06-02

Motor, robot, substrate loader, and exposure apparatus

 #230
20050101050
2005-05-12

Photolithograph system and method for driving the same

 #231
20050099629
2005-05-12

Substrate processing apparatus

 #232
20050095829
2005-05-05

Housing unit and exposure method using the same

 #233
20050054217
2005-03-10

Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock

 #234
20050035312
2005-02-17

Arrangement for feeding or dissipating heat to/from a semiconductor substrate for the purpose of preparing or post-processing a lithographic projection step

 #235
20050030511
2005-02-10

Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing method

 #236
20050019709
2005-01-27

Method and apparatus for maintaining a machine part

 #237
20050018169
2005-01-27

Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method

 #238
20050002003
2005-01-06

Lithographic apparatus and device manufacturing method