Patents-Review.com
ClassID:

177226 ⎘

G03F7/70816 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure apparatus for microlithography; Construction of apparatus, e.g. environment, hygiene aspects or materials; Construction details, e.g. housing, load-lock, seals, windows for passing light in- and out of apparatus Bearings

Recent Application in this class:
#1
20260133402
2026-05-14

ACTUATABLE MIRROR ASSEMBLY

 #2
20260044084
2026-02-12

EXPOSURE DEVICE / TOOL FOR CIRCUITS ON CURVED SURFACES AND METHOD FOR PREPARING CURVED CIRCUITS

 #3
20250199422
2025-06-19

INDIVIDUAL MIRROR OF A PUPIL FACET MIRROR AND PUPIL FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT OF A PROJECTION EXPOSURE APPARATUS

 #4
20250164897
2025-05-22

STAGE AND ERROR COMPENSATION SYSTEM USING THE SAME

 #5
20240339910
2024-10-10

ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POSITIONING SYSTEM

 #6
20240168394
2024-05-23

Stage system, lithographic apparatus, method for positioning and device manufacturing method

 #7
20230107002
2023-04-06

Actuator device for use in a positioning system as well as such positioning system

 #8
20220317580
2022-10-06

HYDROPHOBIC MEMBRANE STRUCTURES, HYDROPHOBIC MEMBRANE STRUCTURE DETECTION METHODS, HYDROPHOBIC MEMBRANE STRUCTURE DETECTION SYSTEMS, AND WAFER CARRIERS

 #9
20220224256
2022-07-14

Magnetic levitation gravity compensation device

 #10
20210181639
2021-06-17

Vibration isolation system and lithographic apparatus

 #11
20210116823
2021-04-22

Support of an optical unit

 #12
20200356015
2020-11-12

EXPOSURE APPARATUS, MOVABLE BODY APPARATUS, FLAT-PANEL DISPLAY MANUFACTURING METHOD, AND DEVICE MANUFACTURING METHOD

 #13
20200333717
2020-10-22

Object stage bearing for lithographic apparatus

 #14
20200049203
2020-02-13

Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness

 #15
20190369507
2019-12-05

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

 #16
20190187571
2019-06-20

Stage system, lithographic apparatus, method for positioning and device manufacturing method

 #17
20190079417
2019-03-14

Bearing assembly for a lithography system, and lithography system

 #18
20190079415
2019-03-14

Movable body apparatus, exposure apparatus, and device manufacturing method

 #19
20180328434
2018-11-15

Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device

 #20
20180299788
2018-10-18

Exposure apparatus, and device manufacturing method

 #21
20180259860
2018-09-13

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LITHOGRAPHY APPARATUS

 #22
20180233707
2018-08-16

Substrate coating apparatus for floating substrate and method

 #23
20180212505
2018-07-26

Displacement device

 #24
20180164704
2018-06-14

Thermal conditioning unit, lithographic apparatus and device manufacturing method

 #25
20180157182
2018-06-07

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

 #26
20180129138
2018-05-10

Optical apparatus with adjustable action of force on an optical module

 #27
20180039185
2018-02-08

Exposure apparatus and device manufacturing method

 #28
20180010633
2018-01-11

Adjustable magnetic buoyancy gravity compensator

 #29
20170277041
2017-09-28

Vibration-assisted positioning stage

 #30
20170235237
2017-08-17

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #31
20170123326
2017-05-04

Exposure apparatus and device manufacturing method

 #32
20160369938
2016-12-22

Table device and conveyance device

 #33
20160299434
2016-10-13

Method for fabricating pattern using supporting assembly with rolling member disposed below supporting rods and semiconductor fabrication apparatus having the supporting assembly

 #34
20160216611
2016-07-28

Arrangement and lithography apparatus with arrangement

 #35
20160202617
2016-07-14

Exposure apparatus and device manufacturing method

 #36
20160135588
2016-05-19

Table device and conveyance device

 #37
20160135587
2016-05-19

Table device and conveyance device

 #38
20160109815
2016-04-21

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

 #39
20160091802
2016-03-31

Mask-mounting apparatus for exposure machine

 #40
20160085159
2016-03-24

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #41
20150381023
2015-12-31

Drive for an XY-table and XY-table

 #42
20150301458
2015-10-22

Movable body apparatus, exposure apparatus, and device manufacturing method

 #43
20150286154
2015-10-08

Balance mass system shared by workpiece table and mask table, and lithography machine

 #44
20150277229
2015-10-01

Lithography apparatus, stage apparatus, and method of manufacturing articles

 #45
20150227055
2015-08-13

Optical apparatus with adjustable action of force on an optical module

 #46
20150212430
2015-07-30

Magnetic device and lithographic apparatus

 #47
20150205210
2015-07-23

Support for a movable element and lithography apparatus

 #48
20150198897
2015-07-16

Exposure apparatus and device manufacturing method

 #49
20150153660
2015-06-04

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

 #50
20140340666
2014-11-20

Lithographic apparatus and device manufacturing method

 #51
20140320831
2014-10-30

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #52
20140293252
2014-10-02

Exposure apparatus, and device manufacturing method

 #53
20140211177
2014-07-31

Exposure apparatus and device manufacturing method

 #54
20140211176
2014-07-31

Exposure apparatus and device manufacturing method

 #55
20130335504
2013-12-19

Optical writer for flexible foils

 #56
20130120732
2013-05-16

Cylindrical magnetic levitation stage and lithography

 #57
20130070225
2013-03-21

Guidance for target processing tool

 #58
20130021593
2013-01-24

Substrate handling apparatus and lithographic apparatus

 #59
20120319505
2012-12-20

Stage apparatus

 #60
20120262684
2012-10-18

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #61
20120200837
2012-08-09

Exposure apparatus, and device manufacturing method

 #62
20120118325
2012-05-17

Stage device and stage cleaning method

 #63
20120057140
2012-03-08

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

 #64
20120055786
2012-03-08

Holding unit, assembly system, sputtering unit, and processing method and processing unit

 #65
20120008111
2012-01-12

Exposure apparatus, and device manufacturing method

 #66
20110317145
2011-12-29

Driving apparatus and exposure apparatus and device fabrication method

 #67
20110234343
2011-09-29

Cylindrical magnetic levitation stage

 #68
20110232075
2011-09-29

Wafer holding apparatus and method

 #69
20110215490
2011-09-08

Device of Producing Wafer Lens and Method of Producing Wafer Lens

 #70
20110204255
2011-08-25

Stage device

 #71
20110109895
2011-05-12

Magnetic supporting mechanism having a movable magnet with a varying width, exposure apparatus with the magnetic supporting mechanism, and device manufacturing method thereof

 #72
20110085239
2011-04-14

Optical apparatus with adjustable action of force on an optical module

 #73
20110043784
2011-02-24

Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method

 #74
20110042874
2011-02-24

OBJECT PROCESSING APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #75
20110037959
2011-02-17

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #76
20110025997
2011-02-03

Exposure apparatus, and device manufacturing method

 #77
20110025996
2011-02-03

Exposure apparatus, and device manufacturing method

 #78
20100271613
2010-10-28

BEARING DEVICE, STAGE DEVICE, AND EXPOSURE APPARATUS

 #79
20100236576
2010-09-23

Stage device and stage cleaning method

 #80
20100201964
2010-08-12

Projection objective for microlithography

 #81
20100159399
2010-06-24

Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless

 #82
20100045960
2010-02-25

Magnetic levitation wafer stage, and method of using the stage in an exposure apparatus

 #83
20090323038
2009-12-31

Object support positioning device and lithographic apparatus

 #84
20090268190
2009-10-29

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

 #85
20090255447
2009-10-15

Table guided by aerostatic bearing elements for vacuum application

 #86
20090241719
2009-10-01

Six-degree-of-freedom precision positioning system

 #87
20090233234
2009-09-17

Holding apparatus, position detection apparatus and exposure apparatus, moving method, position detection method, exposure method, adjustment method of detection system and device manufacturing method

 #88
20090218511
2009-09-03

Stage apparatus and exposure apparatus

 #89
20090190112
2009-07-30

Exposure apparatus, and device manufacturing method

 #90
20090180096
2009-07-16

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #91
20090103071
2009-04-23

Driving apparatus and exposure apparatus, and device fabrication method

 #92
20090059190
2009-03-05

Movable body apparatus, exposure apparatus and optical system unit, and device manufacturing method

 #93
20080285004
2008-11-20

Monolithic, Non-Contact Six Degree-of-Freedom Stage Apparatus

 #94
20080151213
2008-06-26

Bearing Device, Stage Device, and Exposure Apparatus

 #95
20080105069
2008-05-08

Fine Stage Z Support Apparatus

 #96
20080094603
2008-04-24

Magnetic levitation wafer stage, and method of using the stage in an exposure apparatus

 #97
20080074635
2008-03-27

Supporting apparatus, exposure apparatus, and device manufacturing method

 #98
20080073982
2008-03-27

Magnetic Guide Apparatus, Stage Apparatus, Exposure Apparatus, and Device Manufacturing Method

 #99
20080062388
2008-03-13

Lithographic apparatus with gas bearing supply mechanism and device manufacturing method

 #100
20080029682
2008-02-07

Fine stage "Z" support apparatus

 #101
20080013060
2008-01-17

Support Apparatus, Stage Apparatus, Exposure Apparatus, And Device Manufacturing Method

 #102
20080002166
2008-01-03

Exposure apparatus, and device manufacturing method

 #103
20070258069
2007-11-08

Gas bearing, and lithographic apparatus provided with such a bearing

 #104
20070247603
2007-10-25

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #105
20070211234
2007-09-13

Exposure apparatus, and device manufacturing method

 #106
20070132974
2007-06-14

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #107
20070103662
2007-05-10

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #108
20070064214
2007-03-22

Exposure apparatus, and device manufacturing method

 #109
20070046913
2007-03-01

Holding unit, assembly system, sputtering unit, and processing method and processing unit

 #110
20060258214
2006-11-16

Seal assembly for an exposure apparatus

 #111
20060256309
2006-11-16

Lithographic apparatus and device manufacturing method

 #112
20060248977
2006-11-09

Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit

 #113
20060230413
2006-10-12

Optical imaging device

 #114
20060213362
2006-09-28

Lorentz motor control system for a payload

 #115
20060209279
2006-09-21

Exposure apparatus and device fabricating method

 #116
20060187437
2006-08-24

Alignment apparatus and exposure apparatus

 #117
20060139617
2006-06-29

Lithographic apparatus and actuator

 #118
20060139615
2006-06-29

Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing

 #119
20060132740
2006-06-22

Exposure apparatus, and device manufacturing method

 #120
20060132739
2006-06-22

Exposure apparatus, and device manufacturing method

 #121
20060124864
2006-06-15

Air bearing compatible with operation in a vacuum

 #122
20060119190
2006-06-08

Positioning system, magnetic bearing, and method of controlling the same

 #123
20060114445
2006-06-01

Exposure apparatus, and device manufacturing method

 #124
20060114435
2006-06-01

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #125
20060113040
2006-06-01

Stage device, exposure apparatus using the unit, and device manufacturing method

 #126
20060093244
2006-05-04

Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device

 #127
20060082755
2006-04-20

Stage system, exposure apparatus, and device manufacturing method

 #128
20060061219
2006-03-23

Z actuator with anti-gravity

 #129
20060061218
2006-03-23

Dual force wafer table

 #130
20060061042
2006-03-23

Positioning apparatus

 #131
20060060259
2006-03-23

Moving vacuum chamber stage with air bearing and differentially pumped grooves

 #132
20060033899
2006-02-16

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #133
20060028632
2006-02-09

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #134
20060023195
2006-02-02

Levitated reticle-masking blade stage

 #135
20050286039
2005-12-29

Lithographic apparatus and device manufacturing method

 #136
20050200830
2005-09-15

Drive for reticle-masking blade stage

 #137
20050190353
2005-09-01

Lithographic apparatus and device manufacturing method

 #138
20050168076
2005-08-04

Wafer stage operable in a vacuum environment

 #139
20050129339
2005-06-16

Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method

 #140
20050093502
2005-05-05

Stage with isolated actuators for low vacuum environment

 #141
20050084187
2005-04-21

Hydrodynamic bearing apparatus and stage apparatus using the same

 #142
20050083508
2005-04-21

Lithographic apparatus, device manufacturing method, and slide assembly

 #143
20050018166
2005-01-27

Stage system, exposure apparatus, and device manufacturing method

 #144
20050018161
2005-01-27

Positioning method, and positioning apparatus

 #145
20050008269
2005-01-13

Hydrostatic bearing, alignment apparatus, exposure apparatus, and device manufacturing method

 #146
20050002012
2005-01-06

Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device