180041 ⎘
Programme-control systems electric; Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an analogue measuring device for continuous-path control the positional error is used to control continuously the servomotor according to its magnitude
Frequency characteristic measurement device, controller and frequency characteristic measurement method
#2LOCUS GENERATION APPARATUS, CONTROL METHOD FOR LOCUS GENERATION APPARATUS, CONTROL PROGRAM, AND STORAGE MEDIUM
#3System and method for self-calibration of an actuator
#4Numerical control device having function of calculating frequency characteristic of control loop
#5Method for increasing the availability of displacement/position measuring systems on the basis of potentiometers with a slider tap
#6System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method