G05B2219/31013 - CPC Classification Index

ClassID:

182039 ⎘

G05B2219/31013 - CPC Classification

Classification description:

Program-control systems; Nc systems; From computer integrated manufacturing till monitoring Second AGV with wafers already underway before processing first finished

Recent Application in this class:

20160126120

2016-05-05

Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits

20140249667

2014-09-04

Processing facility

20140121828

2014-05-01

Ultra-flexible production manufacturing

20100023160

2010-01-28

CROSS-FAB MATERIAL CONTROL SYSTEM AND CONTROL METHOD THEREOF

20070276531

2007-11-29

METHODS AND APPARATUS FOR ENHANCED OPERATION OF SUBSTRATE CARRIER HANDLERS