182280 ⎘
Program-control systems; Nc systems; From computer integrated manufacturing till monitoring Calculate optimum path for conveying workpieces
MOBILE OBJECT HANDLING WORKSTATION WITH ADVANCED NETWORK CAPABILITIES
#2Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computing
#3Transport operation control device, transport system, transport operation control method, and recording medium
#4Automated independent cart system and method of controlling operation of a plurality of movers of the automated independent cart system
#5Machining system with optimal paths
#6Control unit for centralizing control by grouping a plurality of paths
#7Method and apparatus for assigning material transport vehicle idle locations
#8Systems and methods for cross-intrabay transport
#9Management system for semiconductor manufacturing equipment