G05B2219/31443 - CPC Classification Index

ClassID:

182426 ⎘

G05B2219/31443 - CPC Classification

Classification description:

Program-control systems; Nc systems; From computer integrated manufacturing till monitoring Keep track of nc program, recipe program

Recent Application in this class:

20250264867

2025-08-21

METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING

20240111275

2024-04-04

ROBOTIC WORKFLOW RECIPE

20230359179

2023-11-09

Methods and mechanisms for adjusting film deposition parameters during substrate manufacturing

20160282856

2016-09-29

Updating of a recipe for evaluating a manufacturing stage of an electrical circuit

20150346709

2015-12-03

Semiconductor process management system, semiconductor manufacturing system including the same, and method of manufacturing semiconductor

20150198947

2015-07-16

Failure detection apparatus for substrate processing apparatus, and substrate processing apparatus

20150045942

2015-02-12

Group management system and recording medium

20130310960

2013-11-21

Recipe management system and method

20100010658

2010-01-14

Control device and control method of plasma processing system, and storage medium storing control program

#10

20080244400

2008-10-02

Recipe report card framework and methods thereof

#11

20070212846

2007-09-13

Substrate processing apparatus, method for examining substrate processing conditions, and storage medium

#12

20070179651

2007-08-02

Automated tool recipe verification and correction

#13

20070129839

2007-06-07

System for controlling semiconductor device manufacturing process and method of controlling semiconductor device manufacturing process

#14

20050234574

2005-10-20

Controlling a material processing tool and performance data