182482 ⎘
Program-control systems; Nc systems; Operator till task planning Adapt process as function of results of quality measuring until maximum quality
Maintaining quality control, regulatory, and parameter measurement data using distributed ledgers in process control systems
#2Learning quality estimation device, method, and program
#3Maintaining quality control, regulatory, and parameter measurement data using distributed ledgers in process control systems
#4Method for controlling film production
#5PRODUCTION PLANT WITH CONTROL OF THE PRODUCTION AND/OR CONSUMPTION RATE
#6Intelligent processing modulation system and method
#7Control method for the movement of a tool and control device
#8Rapid closed-loop control based on machine learning
#9System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter
#10Correction value computation device, correction value computation method, and computer program
#11Seawater desalination plant system
#12Method and system for detecting and correcting problematic advanced process control parameters
#13Method and Apparatus for Controlling a Plant Using Feedback Signals
#14Tuning a process controller based on a dynamic sampling rate
#15Processing condition determining method and apparatus, display method and apparatus, processing apparatus, measurement apparatus and exposure apparatus, substrate processing system, and program and information recording medium
#16Method for creating a cutting plan for a strip-like material
#17Method of process control
#18System and method to analyze low yield of wafers caused by abnormal lot events
#19Management system and apparatus, method therefor, and device manufacturing method
#20Method of detecting, identifying and correcting process performance
#21Creation and display of indices within a process plant