182533 ⎘
Program-control systems; Nc systems; Operator till task planning Predict workpiece measurements from measurements of previous workpieces
Data management and mining to correlate wafer alignment, design, defect, process, tool, and metrology data
#2Product quality prediction method for mass customization
#3Continuous prediction of expected chip performance throughout the production lifecycle
#4Automated model building and batch model building for a manufacturing process, process monitoring, and fault detection
#5Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same
#6Data representation relating to a non-sampled workpiece
#7System and method for performing process visualization