182536 ⎘
Program-control systems; Nc systems; Operator till task planning Calculate process end time, form batch of workpieces and transport to process
Method, device, and non-transitory computer readable medium for determining timing of removing substrate from cassette in substrate processing device, and substrate processing device
#2Substrate processing device, substrate processing method, and substrate processing system
#3Processing instructing device, processing instructing method, computer program and processing device
#4Scheduling device and method therefor