182638 ⎘
Program-control systems; Nc systems; Operator till task planning After inspection create correction table with position, correction data
MACHINING APPARATUS ERROR CORRECTION SYSTEM AND METHOD
#2Self-monitoring manufacturing system
#3Component mounting system and component mounting method
#4INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUM
#5Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium