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Program-control systems; Nc systems; Operator till task planning If number of errors grow, augment sampling rate for testing
Method for Controlling a Production Process for Producing Components
#2Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computing
#3Auto defect screening using adaptive machine learning in semiconductor device manufacturing flow
#4Auto defect screening using adaptive machine learning in semiconductor device manufacturing flow
#5Sampling data processing device, sampling data processing method, and computer program
#6METHOD FOR USING REAL-TIME APC INFORMATION FOR AN ENHANCED LOT SAMPLING ENGINE
#7Method for using real-time APC information for an enhanced lot sampling engine
#8Method of performing measurement sampling of lots in a manufacturing process
#9Data collection method, substrate processing apparatus, and substrate processing system