182651 ⎘
Program-control systems; Nc systems; Operator till task planning Selection from a lot of workpieces to be inspected
Adaptive value capture for process monitoring
#2Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process
#3Dual-phase virtual metrology method
#4Automatically selecting wafers for review
#5Test data analyzing system and test data analyzing program
#6Systems and methods for inspection control
#7Method and apparatus for inspecting semiconductor wafer