182710 ⎘
Program-control systems; Nc systems; Operator till task planning Decision of next visiting machine selection, where job is to go
Processing instructing device, processing instructing method, computer program and processing device
#2Substrate processing apparatus, substrate transfer method and storage medium
#3Method and device for executing work consisting of a plurality of steps under computer control
#4Integrated system for processing semiconductor wafers
#5Method and device for executing work consisting of a plurality of steps under computer control