G05B2219/32275 - CPC Classification Index

ClassID:

182713 ⎘

G05B2219/32275 - CPC Classification

Classification description:

Program-control systems; Nc systems; Operator till task planning Job, recipe cascading: no delay, next job is started immediatly when first is finished

Recent Application in this class:

20200035527

2020-01-30

Methods and apparatus to prevent interference between processing chambers

20180096871

2018-04-05

Methods and apparatus to prevent interference between processing chambers

20080255697

2008-10-16

VERTICAL FURNACE HAVING LOT-UNIT TRANSFER FUNCTION AND RELATED TRANSFER CONTROL METHOD

20070233302

2007-10-04

System for controlling production of electronic devices, system and method for producing electronic devices, and computer program product

20060223334

2006-10-05

System for controlling a plurality of lot processes, method for controlling a plurality of lot processes and method for manufacturing a semiconductor device