183961 ⎘
Program-control systems; Nc systems; Nc in input of data, input till input file format Sort, order entered data hierarchical
Processing information management system in a plasma processing tool
#2Method and apparatus for generating relevance-sensitive collation keys
#3Hierarchically structured data model for utilization in industrial automation environments
#4Method and apparatus for generating relevance-sensitive collation keys
#5Method of operating an advanced process controller by dynamically adapting hierarchy levels
#6Processing information management in a plasma processing tool
#7Machine management system and message server used for machine management