185130 ⎘
Program-control systems; Nc systems; Measurements Correction of position error
MACHINING COMMAND CORRECTION DEVICE AND MACHINING COMMAND CORRECTION METHOD
#2EQUIPMENT CALIBRATION SYSTEM AND METHOD OF OPERATING THE SAME
#3WAFER POSITIONING AND CORRECTION METHOD, SYSTEM, AND DEVICE
#4NUMERICAL VALUE CONTROL DEVICE, NUMERICAL VALUE CONTROL SYSTEM, CONTROL METHOD, AND RECORDING MEDIUM
#5Numerical controller, numerical control machine tool, machining program generation device, and machining program generation method
#6NUMERICAL CONTROL DEVICE, AND COMPUTER-READABLE STORAGE MEDIUM
#7VIBRATION DETERMINATION IN SUBSTRATE PROCESSING SYSTEMS
#8Diagnostic methods for substrate manufacturing chambers using physics-based models
#9WIRE ELECTRIC DISCHARGE MACHINE, CORRECTION DEVICE, AND CORRECTION METHOD
#10CONTROL DEVICE
#11WORKPIECE MACHINING METHOD AND WORKPIECE MACHINING DEVICE
#12Method for analyzing overcutting defect of machining process
#13CUTTING APPARATUS, HOLDER POSITION COORDINATE CORRECTING METHOD, AND NON-TRANSITORY COMPUTER-READABLE NON-VOLATILE STORAGE MEDIUM
#14Method for monitoring machine, device, and storage medium
#15Machining error correction system and method based on key dimensional associations
#16Machining apparatus error correction system and method using safe, correction and alarm intervals
#17Controller and machine learning device
#18Method of correcting track of cutting edge, recording medium, and program
#19Numerical controller
#20Servomotor control device, and servomotor control system
#21Tool-path correcting apparatus and tool-path correcting method
#22Control device, control system, and recording medium
#23ERROR DIAGNOSIS METHOD AND ERROR DIAGNOSIS SYSTEM
#24Numerical control device
#25Method, device and system for improving system accuracy of X-Y motion platform
#26Thermal displacement correction training unit for machine tool
#27Method and system for checking positioning accuracy of a CNC machine
#28Numerical controller performing speed control that suppresses excessive positioning deviation
#29Error identification method of machine tool
#30Machine tool feed axis position controller with runout correction of tool cutting edges
#31Method and program for calculating correction value for machine tool
#32Apparatus for measuring and calibrating error of wafer prober
#33Optical apparatus
#34Interferometric servo control system for stage metrology
#35Wafer positioning and correction method, system, and device