186388 ⎘
Program-control systems; Nc systems; Servomotor, servo controller till figures Stiffness, deformation of slide, drive
Determining the rigidity of a drivetrain of a machine, in particular a machine tool or production machine
#2Servo motor controller having self-measuring function and self-monitoring function of mechanical stiffness
#3Position control system, a lithographic apparatus and a method for controlling a position of a movable object
#4DC motor control apparatus and recording apparatus
#5DC motor control apparatus and recording apparatus